Substrate treatment method, computer storage medium and substrate treatment system

Patent metadata

Field	Value
Publication number	US-10329144-B2
Application number	US-201615554026-A
Country	US
Kind code	B2
Filing date	Feb 10, 2016
Priority date	Mar 5, 2015
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

A substrate treatment method using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer includes a polymer separating step, wherein a ratio of a molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20% to 40% so that the hydrophilic polymers align at positions corresponding to a hexagonal close-packed structure in a plan view after the polymer separating step, and at the polymer separating step, a columnar first hydrophilic polymer is phase-separated on each of circular patterns of hydrophobic coating films and a columnar second hydrophilic polymer is phase-separated between the first hydrophilic polymers, and a diameter of the circular pattern is set so that the first hydrophilic polymers and the second hydrophilic polymers align at positions corresponding to the hexagonal close-packed structure in a plan view.

First claim

What is claimed is:

1. A substrate treatment method of treating a substrate using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer, the substrate treatment method comprising:
a neutral layer forming step of forming a neutral layer on the substrate;
a coating film pattern forming step of forming a plurality of circular patterns of hydrophobic coating films at predetermined positions on the substrate after the neutral layer forming step, wherein the predetermined positions are based on a desired pattern which is a hexagonal close-packed structure in a plan view;
a block copolymer coating step of applying the block copolymer onto the substrate on which the circular patterns of the hydrophobic coating films are formed;
a polymer separating step of phase-separating the block copolymer into the hydrophilic polymer and the hydrophobic polymer; and
a polymer removing step of selectively removing the hydrophilic polymer from the phase-separated block copolymer,
wherein a ratio of a molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20% to 40% so that the hydrophilic polymers align at positions corresponding to the hexagonal close-packed structure in the plan view after the polymer separating step, and
wherein at the polymer separating step, a columnar first hydrophilic polymer is phase-separated on each of the circular patterns of the hydrophobic coating films and a columnar second hydrophilic polymer is phase-separated between the first hydrophilic polymers, and a diameter of the circular pattern of the hydrophobic coating film is set to 2(L 0 −R) or less so that the first hydrophilic polymers and the second hydrophilic polymers align at the positions corresponding to the hexagonal close-packed structure in the plan view, where
L 0 : a pitch between the first hydrophilic polymer and the second hydrophilic polymer adjacent to each other, and
R: a radius of the second hydrophilic polymer.

2. The substrate treatment method according to claim 1 ,
wherein the ratio of a molecular weight of the hydrophilic polymer in the block copolymer is 32% to 34%.

3. The substrate treatment method according to claim 1 ,
wherein the hydrophilic polymer is polymethyl methacrylate, and
wherein the hydrophobic polymer is polystyrene.

4. The substrate treatment method according to claim 1 ,
wherein the hydrophobic coating film is a polystyrene film.

5. A substrate treatment method of treating a substrate using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer, the substrate treatment method comprising:
a neutral layer forming step of forming a neutral layer on the substrate;
a coating film pattern forming step of forming a plurality of circular patterns of hydrophobic coating films at predetermined positions on the substrate after the neutral layer forming step, wherein the predetermined positions are based on a desired pattern which is a hexagonal close-packed structure in a plan view;
a block copolymer coating step of applying the block copolymer onto the substrate on which the circular patterns of the hydrophobic coating films are formed;
a polymer separating step of phase-separating the block copolymer into the hydrophilic polymer and the hydrophobic polymer; and
a polymer removing step of selectively removing the hydrophilic polymer from the phase-separated block copolymer,
wherein a ratio of a molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20% to 40% so that the hydrophilic polymers align at positions corresponding to the hexagonal close-packed structure in the plan view after the polymer separating step, and
wherein the circular pattern of the hydrophobic coating films formed at the coating film pattern forming step is decided based on following (1) to (3):
(1) a diameter of the circular pattern of the hydrophobic coating films is 0.8 to 1.5 times a desired pitch between the hydrophilic polymers aligning after the polymer separating step;
(2) a distance between closest adjacent circular patterns of the hydrophobic coating films is twice the desired pitch; and
(3) at least one of the circular patterns of the hydrophobic coating films is arranged on a circumference having a radius of 2√{square root over ( )}3 times the desired pitch around the circular pattern of the hydrophobic coating films.

6. The substrate treatment method according to claim 5 ,
wherein the ratio of a molecular weight of the hydrophilic polymer in the block copolymer is 32% to 34%.

7. The substrate treatment method according to claim 5 ,
wherein the hydrophilic polymer is polymethyl methacrylate, and
wherein the hydrophobic polymer is polystyrene.

8. The substrate treatment method according to claim 5 ,
wherein the hydrophobic coating film is a polystyrene film.

9. A substrate treatment method of treating a substrate using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer, the substrate treatment method comprising:
a neutral layer forming step of forming a neutral layer on the substrate;
a coating film pattern forming step of forming a plurality of circular patterns of hydrophobic coating films at predetermined positions on the substrate after the neutral layer forming step, wherein the predetermined positions are based on a desired pattern which is a hexagonal close-packed structure in a plan view;
a block copolymer coating step of applying the block copolymer onto the substrate on which the circular patterns of the hydrophobic coating films are formed;
a polymer separating step of phase-separating the block copolymer into the hydrophilic polymer and the hydrophobic polymer; and
a polymer removing step of selectively removing the hydrophilic polymer from the phase-separated block copolymer,
wherein a ratio of a molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20% to 40% so that the hydrophilic polymers align at positions corresponding to the hexagonal close-packed structure in the plan view after the polymer separating step, and
wherein the circular patterns of the hydrophobic coating films formed at the coating film pattern forming step are arranged in an equilateral triangle shape having a pitch twice a desired pitch between the hydrophilic polymers aligning after the polymer separating step.

10. The substrate treatment method according to claim 9 ,
wherein the ratio of a molecular weight of the hydrophilic polymer in the block copolymer is 32% to 34%.

11. The substrate treatment method according to claim 9 ,
wherein the hydrophilic polymer is polymethyl methacrylate, and
wherein the hydrophobic polymer is polystyrene.

12. The substrate treatment method according to claim 9 ,
wherein the hydrophobic coating film is a polystyrene film.

Assignees

• Tokyo Electron Ltd

Inventors

• Muramatsu Makoto
• Tomita Tadatoshi
• Genjima Hisashi
• You Gen
• Kitano Takahiro
• Nishi Takanori

Classifications

• H10P76/4085

  characterised by the processes involved to create the masks · CPC title

• H10P76/20

  of masks comprising organic materials · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0458

  vertical arrangement · CPC title

• C08F297/00

  Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer · CPC title