Resist composition, pattern forming process, polymer, and monomer

Patent metadata

Field	Value
Publication number	US-10310376-B2
Application number	US-201615372622-A
Country	US
Kind code	B2
Filing date	Dec 8, 2016
Priority date	Dec 25, 2015
Publication date	Jun 4, 2019
Grant date	Jun 4, 2019

Abstract

A polymer comprising recurring units containing a specific lactone ring and having an alkyl group on γ-butyrolactone skeleton of fused ring lactone and an alkyl ester substituent group intervening between the lactone structure and the polymer backbone is provided. A resist composition comprising the polymer as base resin is improved in such properties as DOF margin and MEF and quite effective for precise micropatterning.

First claim

The invention claimed is:

1. A polymer comprising recurring units having the formula (1):

wherein R 1 is hydrogen or methyl,
R 2 is a C 1 -C 20 straight, branched or cyclic divalent hydrocarbon group in which any constituent —CH 2 — moiety may be replaced by —O— or —C(═O)—,
R 3 and R 4 are each independently a C 1 -C 15 straight, branched or cyclic alkyl group, R 3 and R 4 may bond together to form a ring with the carbon atom to which they are attached, a ring-forming combination of R 3 and R 4 is a C 2 -C 15 straight, branched or cyclic alkylene group,
W is —CH 2 —, —CH 2 CH 2 — or —O—, or two separate —H,
the broken line designates a single bond or divalent organic group bonding the norbornane, bicyclo[2.2.2]octane, 7-oxanorbornane or cyclohexane ring structure to the γ-butyrolactone ring structure, or a structure sharing one or two constituent carbon atoms between these ring structures.

2. The polymer of claim 1 wherein the recurring units having the formula (1) are recurring units having the formula (2) or (3):

wherein R 1 to R 4 are as defined above.

3. The polymer of claim 1 , further comprising recurring units having the formula (4):

wherein R 1 is as defined above, and X is an acid labile group.

4. The polymer of claim 1 , further comprising recurring units of at least one type selected from recurring units having the formulae (5) to (7):

wherein R 1 is as defined above, R 5 and R 6 are each independently hydrogen or hydroxyl, Y is a substituent group containing a lactone structure different from formula (1) or a substituent group containing a sultone structure, Z is hydrogen, a C 1 -C 15 fluorinated hydrocarbon group, or a C 1 -C 15 fluoroalcohol-containing substituent group.

5. A resist composition comprising (A) a base resin comprising the polymer of claim 1 , (B) a photoacid generator, and (C) a solvent.

6. The resist composition of claim 5 wherein the photoacid generator (B) comprises a photoacid generator having the formula (B-1):

wherein R 7 is a C 1 -C 35 straight, branched or cyclic monovalent hydrocarbon group which may contain an oxygen atom, a nitrogen-containing heterocyclic group, or a group of the formula (i):
(R 8 )(R 9 )N—R 10 —  (i)

wherein R 8 and R 9 are each independently hydrogen or a C 1 -C 20 monovalent hydrocarbon group which may contain a heteroatom, R 8 and R 9 may bond together to form a ring with the nitrogen atom to which they are attached, R 10 is a C 1 -C 20 divalent hydrocarbon group which may contain a heteroatom,
A is hydrogen or trifluoromethyl,
R 101 , R 102 and R 103 each independently an optionally substituted C 1 -C 10 straight or branched alkyl, alkenyl or oxoalkyl group, or an optionally substituted C 6 -C 18 aryl, aralkyl or aryloxoalkyl group, any two of R 101 , R 102 and R 103 may bond together to form a ring with the sulfur atom to which they are attached.

7. The resist composition of claim 5 wherein the photoacid generator (B) comprises a photoacid generator having the formula (B-2):

wherein A is hydrogen or trifluoromethyl,
R 104 , R 105 and R 106 are each independently hydrogen or a C 1 -C 20 straight, branched or cyclic monovalent hydrocarbon group which may contain a heteroatom,
r and s are each independently an integer of 0 to 5, t is an integer of 0 to 4, and
L is a single bond or a C 1 -C 20 straight, branched or cyclic divalent hydrocarbon group which may contain a heteroatom.

8. The resist composition of claim 5 wherein the photoacid generator (B) comprises a photoacid generator having the formula (B-3):

wherein R 7 is a C 1 -C 35 straight, branched or cyclic monovalent hydrocarbon group which may contain an oxygen atom, a nitrogen-containing heterocyclic group, or a group of the formula (i):
(R 8 )(R 9 )N—R 10 —  (i)

wherein R 8 and R 9 are each independently hydrogen or a C 1 -C 20 monovalent hydrocarbon group which may contain a heteroatom, R 8 and R 9 may bond together to form a ring with the nitrogen atom to which they are attached, R 10 is a C 1 -C 20 divalent hydrocarbon group which may contain a heteroatom,
R 101 , R 102 and R 103 are each independently an optionally substituted C 1 -C 10 straight or branched alkyl, alkenyl or oxoalkyl group, or an optionally substituted C 6 -C 18 aryl, aralkyl or aryloxoalkyl group, any two of R 101 , R 102 and R 103 may bond together to form a ring with the sulfur atom to which they are attached.

9. The resist composition of claim 5 , further comprising (D) a second polymer different from the polymer (A), the second polymer comprising recurring units of at least one type selected from recurring units having the formulae (D-1) to (D-5):

wherein R 1 and W are as defined above,
R 11 is each independently hydrogen or a C 1 -C 10 straight, branched or cyclic monovalent hydrocarbon group,
R 12 is a single bond or a C 1 -C 5 straight or branched divalent hydrocarbon group,
R 13 is each independently hydrogen, a C 1 -C 15 straight, branched or cyclic monovalent hydrocarbon or monovalent fluorinated hydrocarbon group, or an acid labile group, the monovalent hydrocarbon or fluorinated hydrocarbon group represented by R 13 may have an ether bond (—O—) or carbonyl moiety (—C(═O)—) intervening in a carbon-carbon bond,
R 14 is a C 1 -C 20 straight, branched or cyclic (u+1)-valent hydrocarbon or fluorinated hydrocarbon group,
u is an integer of 1 to 3,
R 15 is each independently hydrogen or a group of the formula (ii):
—C(═O)—O—R 17   (ii)

wherein R 17 is a C 1 -C 20 straight, branched or cyclic monovalent fluorinated hydrocarbon group,
R 16 is a C 1 -C 15 straight, branched or cyclic monovalent hydrocarbon or monovalent fluorinated hydrocarbon group which may have an ether bond (—O—) or carbonyl moiety (—C(═O)—) intervening in a carbon-carbon bond.

10. A pattern forming process comprising the steps of applying the resist composition of claim 5 onto a substrate, prebaking to form a resist film, exposing the resist film to KrF excimer laser, ArF excimer laser, EB or EUV, baking, and developing the exposed resist film in a developer.

11. The process of claim 10 wherein the exposure step is carried out by immersion lithography using a liquid having a refractive index of at least 1.0 between the resist film and a projection lens.

12. The process of claim 11 , further comprising the step of forming a protective film on the resist film prior to the exposure step, wherein immersion lithography is carried out while the liquid is held between the protective film and the projection lens.

13. The process of claim 10 wherein the developing step uses the developer comprising an organic solvent to form a negative pattern.

Assignees

• Shinetsu Chemical Co

Inventors

• Adachi Teppei
• Taniguchi Ryosuke
• Hasegawa Koji
• Yamada Kenji

Classifications

• C07D493/18

  Bridged systems · CPC title

• G03F7/38

  Treatment before imagewise removal, e.g. prebaking {(G03F7/265 takes precedence)} · CPC title

• G03F7/162

  Coating on a rotating support, e.g. using a whirler or a spinner · CPC title

• C07D493/20

  Spiro-condensed systems · CPC title

• C07D307/93

  condensed with a ring other than six-membered · CPC title