Electric field treatment method and electric field treatment device

Patent metadata

Field	Value
Publication number	US-10294575-B2
Application number	US-201415110231-A
Country	US
Kind code	B2
Filing date	Dec 12, 2014
Priority date	Jan 8, 2014
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

An electrolytic treatment device that performs a prescribed treatment using ions to be treated that are contained in a treatment liquid, and includes a direct electrode and a counter electrode which are arranged on either side of the treatment liquid, an indirect electrode which forms an electric field in the treatment liquid, and a switch which switches between connection of the indirect electrode to the power source and connection of the indirect electrode to the direct electrode or the counter electrode. The switch connects and applies a voltage across the indirect electrode and the power source, and breaks the connection between the indirect electrode and the power source and connects the indirect electrode to the direct electrode or the counter electrode.

First claim

What is claimed is:

1. An electrolytic treatment method for performing a prescribed treatment using treatment target ions contained in a treatment liquid, the method comprising:
an arranging step of arranging a direct electrode and a counter electrode with the treatment liquid being interposed therebetween, arranging an indirect electrode configured to form an electric field in the treatment liquid, and arranging a switch configured to perform a switching operation between connection of a power source with the indirect electrode and connection of the direct electrode or the counter electrode with the indirect electrode;
a treatment target ion migrating step of migrating the treatment target ions contained in the treatment liquid to the counter electrode, by connecting the indirect electrode with the power source and then applying a voltage using the switch; and
a treatment target ion treatment step of oxidizing or reducing the treatment target ions migrated to the counter electrode, by disconnecting the indirect electrode from the power source and connecting the indirect electrode to the direct electrode or the counter electrode using the switch.

2. The method of claim 1 , wherein the treatment target ion migrating step is performed until the treatment target ions are uniformly arranged on a surface of the counter electrode.

3. The method of claim 1 , wherein, in the arranging step, the indirect electrode is disposed so as not to come into contact with the treatment liquid.

4. The method of claim 1 , wherein the direct electrode or the counter electrode connected to or disconnected from the indirect electrode by the switch is a semiconductor substrate, and
the indirect electrode is a support member that supports the semiconductor substrate.

5. An electrolytic treatment device that performs a prescribed treatment using treatment target ions contained in a treatment liquid, the device comprising:
a direct electrode and a counter electrode arranged such that the treatment liquid is interposed therebetween;
an indirect electrode configured to form an electric field in the treatment liquid; and
a switch configured to perform a switching operation between connection of a power source with the indirect electrode and connection of the direct electrode or the counter electrode with the indirect electrode,
wherein the switch connects the indirect electrode with the power source and applies a voltage, and
the switch disconnects the indirect electrode from the power source, and connects the indirect electrode with the direct electrode or the counter electrode.

6. The device of claim 5 , wherein, when the treatment target ions are uniformly arranged on a surface of the counter electrode, the switch disconnects the indirect electrode from the power source, and connects the indirect electrode with the direct electrode or the counter electrode.

7. The device of claim 5 , wherein the indirect electrode is disposed so as not to come into contact with the treatment liquid.

8. The device of claim 5 , wherein the direct electrode or the counter electrode connected to or disconnected from the indirect electrode by the switch is a semiconductor substrate, and
the indirect electrode is a support member that supports the semiconductor substrate.

Assignees

• Tokyo Electron Ltd

Inventors

• Iwatsu Haruo

Classifications

• C25D5/00 Primary

  Electroplating characterised by the process; Pretreatment or after-treatment of workpieces · CPC title

• C25D17/007

  Current directing devices · CPC title

• C25D21/12

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D17/10 Primary

  Electrodes {, e.g. composition, counter electrode} · CPC title

• C25F7/00

  Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects (for both electrolytic coating and removal C25D); Servicing or operating · CPC title