Electrolytic treatment method and electrolytic treatment apparatus

Patent metadata

Field	Value
Publication number	US-2016083856-A1
Application number	US-201414892269-A
Country	US
Kind code	A1
Filing date	May 12, 2014
Priority date	May 20, 2013
Publication date	Mar 24, 2016
Grant date	—

Abstract

An electrolytic treatment method in which a predetermined treatment is performed using treatment subject ions contained in a treatment liquid, the method including: an electrode positioning step for positioning a direct electrode and a counter electrode so as to sandwich the treatment liquid, and positioning an indirect electrode for forming an electric field in the treatment liquid; a treatment subject ion migration step for applying a voltage to the indirect electrode and thereby moving the treatment subject ions in the treatment liquid to the counter electrode side; and a treatment subject ion redox step for applying a voltage between the direct electrode and the counter electrode and thereby oxidizing or reducing the treatment subject ions which have migrated to the counter electrode side.

First claim

What is claimed is:

1 . An electrolytic treatment method for performing a predetermined treatment using ions to be treated (“treatment target ions”) contained in a treatment liquid, the electrolytic treatment method comprising:
an electrode arrangement step of arranging each of a direct electrode and a counter electrode such that the treatment liquid is interposed therebetween, and arranging an indirect electrode to form an electric field in the treatment liquid;
a treatment target ion migration step of causing the treatment target ions in the treatment liquid to migrate to the counter electrode side by applying a voltage to the indirect electrode; and
a treatment target ion redox step of oxidizing or reducing the treatment target ions that have migrated to the counter electrode side by applying a voltage between the direct electrode and the counter electrode.

2 . The electrolytic treatment method of claim 1 , wherein in the electrode arrangement step, the direct electrode and the indirect electrode are separately arranged to face each other.

3 . The electrolytic treatment method of claim 1 , wherein in the electrode arrangement step, the direct electrode and the indirect electrode are arranged in a front-rear side integrated manner.

4 . The electrolytic treatment method of claim 3 , wherein in the electrode arrangement step, the direct electrode and the indirect electrode are integrally arranged such that a front surface of the direct electrode and a rear surface of the indirect electrode are abutted on each other.

5 . The electrolytic treatment method of claim 3 , wherein in the electrode arrangement step, the direct electrode and the indirect electrode are integrally arranged such that the direct electrode wholly covers the indirect electrode.

6 . The electrolytic treatment method of claim 1 , wherein in the electrode arrangement step, the indirect electrode and the counter electrode are separately arranged to face each other.

7 . The electrolytic treatment method of claim 1 , wherein in the electrode arrangement step, a plurality of counter electrodes are arranged.

8 . The electrolytic treatment method of claim 1 , wherein in the electrode arrangement step, the direct electrode, the indirect electrode, and the counter electrode are separately arranged to be immersed in the treatment liquid.

9 . The electrolytic treatment method of claim 1 , wherein in the electrode arrangement step, the treatment liquid is supplied onto a top surface of the counter electrode, and the direct electrode is arranged on the treatment liquid.

10 . The electrolytic treatment method of claim 9 , wherein in the electrode arrangement step, the indirect electrode is arranged on a bottom surface side of the counter electrode or on a top surface side of the direct electrode.

11 . The electrolytic treatment method of claim 1 , wherein the direct electrode is maintained in an electrical floating state.

12 . The electrolytic treatment method of claim 1 , wherein in the treatment target ion migration step, the voltage applied to the indirect electrode is a continuously applied DC voltage, and
in the treatment target ion redox step, the voltage applied between the direct electrode and the counter electrode is a pulse voltage.

13 . The electrolytic treatment method of claim 1 , wherein in the electrode arrangement step, the counter electrode is arranged to be common to the direct electrode and the indirect electrode, and
in the treatment target ion migration step, a voltage is applied between the indirect electrode and the counter electrode, and the treatment target ions are caused to migrate to the counter electrode side.

14 . An electrolytic treatment apparatus for performing a predetermined treatment using ions to be treated (“treatment target ions”) contained in a treatment liquid, the electrolytic treatment apparatus comprising:
a direct electrode and a counter electrode that are arranged such that the treatment liquid is interposed therebetween, and further an indirect electrode configured to form an electric field in the treatment liquid,
wherein the indirect electrode causes treatment target ions in the treatment liquid to migrate to the counter electrode side when a voltage is applied thereto, and
the direct electrode reduces or oxidizes the treatment target ions that have migrated to the counter electrode side when a voltage is applied between the direct electrode and the counter electrode.

15 . The electrolytic treatment apparatus of claim 14 , wherein the direct electrode and the indirect electrode are separately arranged to face each other.

16 . The electrolytic treatment apparatus of claim 14 , wherein the direct electrode and the indirect electrode are arranged in a front-rear side integrated manner.

17 . The electrolytic treatment apparatus of claim 16 , wherein the direct electrode and the indirect electrode are integrally arranged such that a front surface of the direct electrode and a rear surface of the indirect electrode are abutted on each other.

18 . The electrolytic treatment apparatus of claim 16 , wherein the direct electrode and the indirect electrode are integrally arranged such that the direct electrode wholly covers the indirect electrode.

19 . The electrolytic treatment apparatus of claim 14 , wherein the indirect electrode and the counter electrode are separately arranged to face each other.

20 . The electrolytic treatment apparatus of claim 14 , wherein a plurality of counter electrodes are arranged.

21 . The electrolytic treatment apparatus of claim 14 , wherein the direct electrode, the indirect electrode, and the counter electrode are separately arranged to be immersed in the treatment liquid.

22 . The electrolytic treatment apparatus of claim 14 , wherein the treatment liquid is supplied onto a top surface of the counter electrode, and the direct electrode is arranged on the treatment liquid.

23 . The electrolytic treatment apparatus of claim 22 , wherein the indirect electrode is arranged on a bottom surface side of the counter electrode or on a top surface side of the direct electrode.

24 . The electrolytic treatment apparatus of claim 14 , wherein the direct electrode is maintained in an electrical floating state.

25 . The electrolytic treatment apparatus of claim 14 , wherein the voltage applied to the indirect electrode is a continuously applied DC voltage, and
the voltage applied between the direct electrode and the counter electrode is a pulse voltage.

26 . The electrolytic treatment apparatus of claim 14 , wherein the counter electrode is provided to be common to the direct electrode and the indirect electrode, and
the indirect electrode causes the treatment target ions to migrate to the counter electrode side when the voltage is applied between the indirect electrode and the counter electrode.

Assignees

• Tokyo Electron Ltd
• Univ Kumamoto Nat Univ Corp

Inventors

• Iwatsu Haruo
• Akiyama Hidenori

Classifications

• C25B11/00

  Electrodes; Manufacture thereof not otherwise provided for · CPC title

• C25B9/12

  Chemistry & Metallurgy · mapped topic

• C25B7/00 Primary

  Electrophoretic production of compounds or non-metals (separation or purification of peptides, e.g. of proteins, by electrophoresis C07K1/26) · CPC title

• C25B9/30

  Cells comprising movable electrodes, e.g. rotary electrodes; Assemblies of constructional parts thereof · CPC title

• C25D17/10

  Electrodes {, e.g. composition, counter electrode} · CPC title