Embedded high voltage LDMOS-SCR device with a strong voltage clamp and ESD robustness

Patent metadata

Field	Value
Publication number	US-10290627-B2
Application number	US-201615748492-A
Country	US
Kind code	B2
Filing date	Mar 11, 2016
Priority date	Mar 11, 2016
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

The present invention provides an embedded high voltage LDMOS-SCR device with strong voltage clamp and ESD robustness, which can be used as the on-chip ESD protection for high voltage IC. Wherein said the device comprises a P substrate, a P well, a N well, a first field oxide isolation region, a first P+ injection region, a second field oxide isolation region, a first N+ injection region, a first fin polysilicon gate, a second N+ injection region, a second fin polysilicon gate, a third N+ injection region, a third fin polysilicon gate, a polysilicon gate, a fourth fin polysilicon gate, a second P+ injection region, a fifth fin polysilicon gate, a third P+ injection region, a sixth fin polysilicon gate, a fourth P+ injection region, a third oxygen isolation region, a fourth N+ injection region and a fourth field oxygen isolation region. Under the influence of ESD pulse, the ESD discharge current path with LDMOS-SCR structure and the RC coupling current path with embedded PMOS interdigital structure in the drain terminal and embedded NMOS interdigital structure in the source terminal are formed, in order to enhance the ESD robustness of the device and improve the voltage clamp capability.

First claim

What is claimed is:

1. An embedded high voltage LDMOS-SCR device with a strong voltage clamp and ESD robustness, comprising a RC coupling current path of interdigital structure which combines an embedded NMOS in a source terminal and an embedded PMOS in a drain terminal, and a ESD discharge current path of LDMOS-SCR structure, in order to enhance a ESD robustness of the device and voltage clamp capability;
wherein the device further comprises a P substrate, a P well, a N well, a first field oxygen isolation region, a first P+ injection region, a second field oxygen isolation region, a first N+ injection region, a first fin polysilicon gate, a second N+ injection region, a second fin polysilicon gate, a third N+ injection region, a third fin polysilicon gate, a polysilicon gate, a fourth fin polysilicon gate, a second P+ injection region, a fifth fin polysilicon gate, a third P+ injection region, a sixth fin polysilicon gate, a fourth P+ injection region, a third field oxygen isolation region, a fourth N+ injection region and a fourth field oxygen isolation region;
wherein the P well and the N well are successively arranged from left to right on a surface of the P substrate, a left edge of the P substrate is connected to a left edge of the P well, a right side of the P well is connected to a left of the N well, and a right side of the N well is connected to a right edge of the P substrate;
wherein the first field oxygen isolation region, the first P+ injection region, the second field oxygen isolation region and an embedded NMOS interdigital structure are successively arranged from left to right on a surface of the P well; wherein the embedded NMOS interdigital structure comprises the first N+ injection region, the first fin polysilicon gate, the second N+ injection region, the second fin polysilicon gate, the third N+ injection region and the third fin polysilicon gate; wherein within a width range, the device is capable to be alternately extended from a N+ injection region and a fin polysilicon gate along the width direction according to an actual requirements; wherein a left side of the first field oxygen isolation region is connected to a left edge of the P well, a right side of the first field oxygen isolation region is connected to a left side of the first P+ injection region, a right side of the first P+ injection region is connected to a left side of the second field oxygen isolation region, and a right side of the second field oxygen isolation region is connected to a left side of the embedded NMOS interdigital structure;
wherein the third field oxygen isolation region, the fourth N+ injection region, the fourth field oxygen isolation region and an embedded PMOS interdigital structure are successively arranged from left to right on a surface of the N well; wherein the embedded PMOS interdigital structure comprises the fourth fin polysilicon gate, the second P+ injection region, the fifth fin polysilicon gate, the third P+ injection region, the sixth fin polysilicon gate and the fourth P+ injection region; wherein within a width range, the device is capable to be alternately extended from a P+ injection region and a fin polysilicon gate along the width direction according to an actual requirements; wherein a right side of the embedded PMOS interdigital structure is connected to the left side of a third field oxygen isolation region, a right side of the third field oxygen isolation region is connected to a left side of the fourth N+ injection region, a right side of the fourth N+ injection region is connected to a left side of the fourth field oxygen isolation region, and a right side of the fourth field oxygen isolation region is connected to a right edge of the N well;
wherein the polysilicon gate is configured to stretch across a partial surface of the P well and the N well, a left side of the polysilicon gate is connected to a right side of the embedded NMOS interdigital structure, and a right side of the polysilicon gate is connected to a left side of the embedded PMOS interdigital structure;
wherein the first P+ injection region is connected to a first metal 1, the first N+ injection region is connected to a second metal 1, the first fin polysilicon gate is connected to a third metal 1, the second N+ injection region is connected to a fourth metal 1, the second fin polysilicon gate is connected to a fifth metal 1, the third N+ injection region is connected to a sixth metal 1, the third fin polysilicon gate is connected to a seventh metal 1, the polysilicon gate is connected to an eighth metal 1, the fourth fin polysilicon gate is connected to a ninth metal 1, the second P+ injection region is connected to a tenth metal 1, the fifth fin polysilicon gate is connected to an eleventh metal 1, the third P+ injection region is connected to a twelfth metal 1, the sixth fin polysilicon gate is connected to a thirteenth metal 1, the fourth P+ injection region is connected to a fourteenth metal 1, and the fourth N+ injection region is connected to a fifteenth metal 1;
wherein the first metal 1, the second metal 1, the third metal 1, the fifth metal 1, the sixth metal 1, the seventh metal 1 are all connected to a first metal 2, and an electrode extracted from the first metal 2 is configured to be used as the metal cathode of the device;
wherein the eighth metal 1, the ninth metal 1, the tenth metal 1, the eleventh metal 1, the thirteenth metal 1, the fourteenth metal 1 and the fifteenth metal are all connected to a second metal 2, and an electrode extracted from the second metal 2 is configured to be used as the metal anode of the device;
wherein the fourth metal 1 is connected to a third metal 2, and the twelfth metal 1 is connected to the third metal 2.

2. The device of claim 1 , capable to set a high holding voltage and provide a high voltage clamp capability.

3. The device of claim 1 , capable to set a low trigger voltage, and provide a high ESD robustness and voltage clamp capability.

4. The device of claim 1 , wherein the embedded PMOS interdigital structure and the embedded NMOS interdigital structure are capable to set high parasitic capacitance, and under the influence of transient ESD pulse, a trigger current of parasitic resistance in P well and N well is capable to be set to high due to a RC coupling effect, and a trigger voltage of the device is capable to be set to low.

Assignees

• Univ Jiangnan

Inventors

• Liang Hailian
• Liu Huyun
• Gu Xiaofeng
• Ding Sheng

Classifications

• H01L27/027 Primary

  Electricity · mapped topic

• H01L29/7846

  Electricity · mapped topic

• H01L27/02

  Electricity · mapped topic

• H01L29/7826

  Electricity · mapped topic

• H10D89/713 Primary

  including a PNP transistor and a NPN transistor, wherein each of said transistors has its base region coupled to the collector region of the other transistor, e.g. silicon controlled rectifier [SCR] devices · CPC title