Semiconductor device

Patent metadata

Field	Value
Publication number	US-10283630-B2
Application number	US-201715634210-A
Country	US
Kind code	B2
Filing date	Jun 27, 2017
Priority date	Jun 27, 2016
Publication date	May 7, 2019
Grant date	May 7, 2019

Abstract

The invention relates to a semiconductor component comprising at least one field effect transistor, said transistor comprising at least a back barrier layer, a buried layer arranged on the back barrier layer, a channel layer arranged on the buried layer, a barrier layer arranged on the channel layer, and a gate layer arranged on the barrier layer, wherein the barrier layer comprises Al z Ga 1-z N and wherein the buried layer comprises Al x Ga 1-x N and at least one dopant causing a p-type conductivity, and wherein the gate layer comprises any of GaN and/or Al u In v Ga 1-v-u N. A field effect transistor according to the disclosure may be configured to show a gate threshold voltage which is higher than approximately 0.5 V or higher than approximately 1.0 V.

First claim

The invention claimed is:

1. A semiconductor component comprising at least one field effect transistor, said transistor comprising at least
a back barrier layer,
a buried layer arranged on the back barrier layer,
a channel layer arranged on the buried layer,
a barrier layer arranged on the channel layer, and
a gate layer arranged on the barrier layer,
wherein the barrier layer comprises Al z Ga 1-z N, the buried layer comprises Al x Ga 1-x N and at least one dopant causing a p-type conductivity, the gate layer comprises any of GaN and/or Al u In v Ga 1-v-u N, and a charge carrier density at an interface between the channel layer and the barrier layer is higher than approximately 5·10 12 cm −2 .

2. The semiconductor component according to claim 1 , wherein the gate layer has a thickness being selected from approximately 10 nm to approximately 100 nm.

3. The semiconductor component according to claim 1 , wherein the channel layer has a thickness being selected from approximately 10 nm to approximately 100 nm.

4. The semiconductor component according to claim 1 , wherein a concentration of the at least one dopant in the buried layer is selected from approximately 1·10 18 cm −3 to approximately 2·10 20 cm −3 and/or
wherein the thickness of the buried layer is selected from approximately 20 nm to approximately 150 nm.

5. The semiconductor component according to claim 1 , wherein the parameter x is selected from approximately 0.05 to approximately 0.20 and/or
wherein the parameter z is selected from approximately 0.20 to approximately 0.35.

6. The semiconductor component according to claim 1 , wherein a source and a drain contact are arranged adjacent to the channel layer to define a channel, and a length of the channel between the source and the drain contact is between approximately 1 μm and approximately 50 μm.

7. The semiconductor component according to claim 6 , wherein the gate layer is constituted by a partial coating being located between said source and drain contacts.

8. The semiconductor component according to claim 1 , being configured to show a gate threshold voltage which is higher than approximately 0.5 V.

9. The semiconductor component according to claim 1 , wherein the gate layer is nominally undoped.

10. The semiconductor component according to claim 1 , wherein the buried layer comprises a plurality of individual sublayers each comprising p-doped AlGaN, wherein the aluminum content increases proceeding from the back barrier layer to the channel layer.

11. The semiconductor component according to claim 1 , wherein the back barrier layer comprises a p-type dopant, said dopant comprising at least one element from the following list: magnesium, carbon, zinc, and beryllium.

12. The semiconductor component according to claim 1 , comprising a first intermediate layer arranged between the back barrier layer and the buried layer comprises or consists of Al s Ga 1-s N or GaN.

13. The semiconductor component according to claim 12 , wherein a second intermediate layer is arranged between the channel layer and the buried layer, wherein said second intermediate layer comprises or consists of Al R Ga 1-R N, wherein the parameter R is chosen between 0.05 and 1.

14. The semiconductor component according to claim 1 , wherein the channel layer comprises any of nominally undoped GaN or nominally undoped Al d Ga 1-d N.

15. A semiconductor component comprising at least one field effect transistor, said transistor comprising at least
a back barrier layer,
a buried layer arranged on the back barrier layer,
a channel layer arranged on the buried layer,
a barrier layer consisting of Al z Ga 1-z N arranged on the channel layer, and
a gate layer consisting of any of GaN or Al u In v Ga 1-v-u N arranged on the barrier layer,
wherein a charge carrier density at an interface between the channel layer and the barrier layer is higher than approximately 5·10 12 cm −2 , and the buried layer comprises Al x Ga 1-x N and at least one dopant causing a p-type conductivity in a concentration of at least 1·10 18 cm −3 and not more than 2·10 20 cm −3 .

16. The semiconductor component according to claim 15 , wherein the gate layer has a thickness being selected from approximately 10 nm to approximately 100 nm.

17. The semiconductor component according to claim 15 , wherein the channel layer has a thickness being selected from approximately 10 nm to approximately 100 nm.

18. The semiconductor component according to claim 15 , wherein the parameter x is selected from approximately 0.05 to approximately 0.20 and/or
wherein the parameter z is selected from approximately 0.20 to approximately 0.35.

19. The semiconductor component according to claim 15 , wherein the gate layer is nominally undoped.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Benkhelifa Fouad

Classifications

• H01L29/34

  Electricity · mapped topic

• H01L29/205

  Electricity · mapped topic

• H01L29/207

  Electricity · mapped topic

• H01L29/201

  Electricity · mapped topic

• H01L29/7783 Primary

  Electricity · mapped topic