Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber

Patent metadata

Field	Value
Publication number	US-10273596-B2
Application number	US-201615753428-A
Country	US
Kind code	B2
Filing date	Aug 18, 2016
Priority date	Aug 20, 2015
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.

First claim

What is claimed is:

1. A polysilicon feeder for supplying polysilicon to a growth chamber for growing a single crystal ingot from a melt, the polysilicon feeder comprising:
a tube for supplying polysilicon to the growth chamber;
support rails for receiving one of a granular tray and a chunk tray, the granular tray or chunk tray being rotatable with respect to the tube and rotating between a feeding position in which polysilicon may enter the growth chamber and a parked position in which the granular tray or chunk tray may be interchanged; and
a feed material reservoir positioned above the support rails to feed one of either the granular tray or the chunk tray.

2. The polysilicon feeder of claim 1 , further comprising the granular tray and the chunk tray, the granular tray and chunk tray each being removable from the polysilicon feeder for interchanging the granular tray and the chunk tray, the granular tray having a first interior profile and the chunk tray having a second interior profile, wherein the second interior profile has a greater depth than the first interior profile.

3. The polysilicon feeder of claim 1 , further comprising the granular tray or the chunk tray, the granular tray or the chunk tray being removable from the polysilicon feeder, the granular tray or the chunk tray including exterior channels having the same dimensions and that engage with the support rails.

4. The polysilicon feeder of claim 1 , further comprising:
the granular tray and the chunk tray, the granular tray and chunk tray each being removable from the polysilicon feeder for interchanging the granular tray and the chunk tray; and
a vibrator that vibrates one of either the granular tray or the chunk tray, one of the granular tray and the chunk tray being connected to the vibrator, the vibrator being rotatable with respect to the tube, the vibrator rotating between a feeding position in which polysilicon may enter the growth chamber and a parked position in which the granular tray and chunk tray may be interchanged.

5. The polysilicon feeder of claim 4 , wherein the vibrator supports the support rails.

6. The polysilicon feeder of claim 1 , further comprising the granular tray and a valve mechanism for controlling the flow of polysilicon from the granular tray.

7. The polysilicon feeder of claim 6 , wherein the valve mechanism includes:
a seal that selectively obstructs an exit of the granular tray;
a driver configured to raise and lower the seal between a sealed position obstructing the exit and an open position in which the seal does not obstruct the exit; and
a linkage connecting the seal to the driver,
wherein the seal is shaped to permit a gap between the seal and a portion of the exit of the granular tray such that granular polysilicon within the exit does not prevent a seal between the seal and the exit.

8. The polysilicon feeder of claim 7 , wherein:
the exit includes an opening; and
the seal includes:
a first portion having a radius to engage with the opening of the exit and having a slope corresponding to the opening of the exit; and
a second portion having a radius smaller than the opening of the exit and that is at least partially within the opening of the exit when the seal is in the sealed position,
wherein the difference between the radius of the second portion and the radius of the opening of the exit defines the gap.

9. The polysilicon feeder of claim 1 , further comprising a tube positioned to supply the growth chamber with polysilicon exiting one of the granular tray or the chunk tray.

10. A polysilicon feed system that includes an interchangeable granular tray, the polysilicon feed system comprising:
a polysilicon feeder for supplying polysilicon to a growth chamber for growing a single crystal ingot from a melt, the polysilicon feeder comprising support rails for receiving the interchangeable granular tray; and
a vibrator for vibrating the interchangeable granular tray;
wherein the interchangeable granular tray is disposed above the vibrator and is movable along the support rails to move the interchangeable granular tray relative to the vibrator and wherein the interchangeable granular tray comprises:
an exterior portion that includes an exterior channel that removably receives the support rails of the polysilicon feeder; and
an interior profile that receives granular polysilicon from a feed material reservoir of the polysilicon feeder.

11. The polysilicon feed system of claim 10 , wherein the interior profile has a depth less than a second interior profile of a chunk tray that is interchangeable with the interchangeable granular tray.

12. A polysilicon feed system that includes an interchangeable chunk tray, the polysilicon feed system comprising:
a polysilicon feeder for supplying polysilicon to a growth chamber for growing a single crystal ingot from a melt, the polysilicon feeder comprising support rails for receiving the interchangeable chunk tray; and
a vibrator for vibrating the interchangeable chunk tray;
wherein the interchangeable chuck tray is disposed above the vibrator and is movable along the support rails to move the interchangeable chunk tray relative to the vibrator and wherein the interchangeable chunk tray comprises:
an exterior portion that includes an exterior channel that removably receives the support rails of the polysilicon feeder; and
an interior profile that receives chunk polysilicon from a feed material reservoir of the polysilicon feeder.

13. The polysilicon feed system of claim 12 , wherein the interior profile has a greater depth than a second interior profile of a granular tray that is interchangeable with the chunk tray.

14. The polysilicon feeder of claim 1 , further comprising the granular tray or the chunk tray, the granular tray or chunk tray being removable from the support rails, the granular tray or chunk tray including an exterior portion that removably receives the support rails.

15. The polysilicon feeder of claim 1 , further comprising the granular tray and the chunk tray, the granular tray and chunk tray being removable from the support rails for interchanging the granular tray and the chunk tray, the granular tray and chunk tray each including an exterior portion that removably receives the support rails.

16. The polysilicon feeder of claim 15 , wherein one of the granular tray and the chunk tray is received in the support rails.

17. The polysilicon feeder of claim 2 , wherein one of the granular tray and the chunk tray is received in the support rails.

18. The polysilicon feeder of claim 2 wherein one of the granular tray and chunk tray is received in the support rails, the guide tube being in contact with the tray received in the polysilicon feeder.

19. The polysilicon feed system as set forth in claim 10 wherein the support rails are disposed above the vibrator.

20. The polysilicon feed system as set forth in claim 12 wherein the support rails are disposed above the vibrator.

Assignees

• Sunedison Semiconductor Ltd
• Daevac Int Co Ltd
• Globalwafers Co Ltd

Inventors

• Yun Seok Min
• Park Seong Su
• Ji Jun Hwan
• Choi Won-Jin
• Jung Uisung
• Lee Young Jung
• Koo Tae Su
• Kim Sung-Jin

Classifications

• B64G1/10

  Artificial satellites; Systems of such satellites; Interplanetary vehicles (space shuttles B64G1/14) · CPC title

• C30B29/06

  Silicon · CPC title

• C30B35/005

  Transport systems · CPC title

• C30B15/20

  Controlling or regulating (controlling or regulating in general G05) · CPC title

• G01S11/02

  using radio waves (G01S19/00 takes precedence) · CPC title