Scanning probe microscope

Patent metadata

Field	Value
Publication number	US-10254307-B2
Application number	US-201815916469-A
Country	US
Kind code	B2
Filing date	Mar 9, 2018
Priority date	Mar 10, 2017
Publication date	Apr 9, 2019
Grant date	Apr 9, 2019

Abstract

A scanning probe microscope includes: a laser source 61; a photodetector 62; and a Y-drive mechanism 701 provided for at least either the laser source 61 or photodetector 62, for driving the object in a first direction (Y direction) in a plane perpendicular to an optical axis of the object. The Y-drive mechanism 701 includes: a Y-screw shaft 21 extending in the Y direction; a Y-guide shaft 23 extending parallel to the Y-screw shaft; a support member 24 for supporting the object, the support member coupled with the Y-screw shaft 21 via a nut member 211 screwed on the Y-screw shaft 21 as well as coupled with the Y-guide shaft 23 via a slide member 231 mounted on the Y-guide shaft 23 in a slidable manner; and a Y-drive motor 22 for rotating the Y-screw shaft 21.

First claim

The invention claimed is:

1. A scanning probe microscope, comprising:
a laser source;
a photodetector for detecting light emitted from the laser source and reflected by a cantilever; and
a first drive mechanism provided for at least one of the laser source and the photodetector, for driving an object in a first direction in a plane orthogonal to an optical axis of the object;

wherein the first drive mechanism comprises:
a first screw shaft extending in the first direction;
a first guide shaft extending parallel to the first screw shaft;
a support member for supporting the object, the support member coupled with the first screw shaft via a first nut member screwed on the first screw shaft as well as coupled with the first guide shaft via a first slide member mounted on the first guide shaft in a slidable manner; and
a first drive motor for rotating the first screw shaft.

2. The scanning probe microscope according to claim 1 , further comprising:
a second drive mechanism for driving the object in a second direction intersecting with the first direction in the plane;

wherein the second drive mechanism comprises:
a second screw shaft extending in the second direction;
a second guide shaft extending parallel to the second screw shaft;
a base member for supporting the first drive mechanism, the base member coupled with the second screw shaft via a second nut member screwed on the second screw shaft as well as coupled with the second guide shaft via a second slide member mounted on the second guide shaft in a slidable manner; and
a second drive motor for rotating the second screw shaft.

3. The scanning probe microscope according to claim 2 , wherein:
the first drive mechanism and the second drive mechanism are both provided for the laser source as the object; and
the scanning probe microscope further comprises:
an imager for imaging a portion illuminated with the light on the cantilever;
a laser source adjustment amount determiner for analyzing image data obtained with the imager, to determine an amount of adjustment for placing the laser source at a target position; and
a drive motor controller for controlling the first drive motor and the second drive motor to rotate the first screw shaft and the second screw shaft by respective rotation angles corresponding to the amount of adjustment.

4. The scanning probe microscope according to claim 3 , wherein:
the first drive mechanism and the second drive mechanism are both provided for the photodetector as the object; and
the scanning probe microscope further comprises:
a photodetector adjustment amount determiner for determining an amount of adjustment for placing the photodetector at a target position, based on a detection signal from the photodetector; and
a drive motor controller for controlling the first drive motor and the second drive motor to rotate the first screw shaft and the second screw shaft by respective rotation angles corresponding to the amount of adjustment.

5. The scanning probe microscope according to claim 2 , wherein:
the first drive mechanism and the second drive mechanism are both provided for the photodetector as the object; and
the scanning probe microscope further comprises:
a photodetector adjustment amount determiner for detei lining an amount of adjustment for placing the photodetector at a target position, based on a detection signal from the photodetector; and
a drive motor controller for controlling the first drive motor and the second drive motor to rotate the first screw shaft and the second screw shaft by respective rotation angles corresponding to the amount of adjustment.

Assignees

• Shimadzu Corp

Inventors

• Kobayashi Kanji
• Hirade Masato

Classifications

• G01Q60/18 Primary

  SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes · CPC title

• G01Q20/02 Primary

  by optical means · CPC title

• G01Q10/04

  Fine scanning or positioning · CPC title