Method and apparatus for infrared scattering scanning near-field optical microscopy with high speed point spectroscopy

Patent metadata

Field	Value
Publication number	US-10082523-B2
Application number	US-201715693204-A
Country	US
Kind code	B2
Filing date	Aug 31, 2017
Priority date	Mar 15, 2013
Publication date	Sep 25, 2018
Grant date	Sep 25, 2018

Abstract

This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.

First claim

We claim:

1. A method of measuring an optical property of a sub micrometer region of a sample comprising the steps of:
a. Interacting a probe tip of a probe microscope with a region of the sample;
b. Illuminating the sample with a beam of light from at least one tunable source with a center wavelength λ such that light is scattered from the probe-sample interaction region;
c. Interfering a reference beam with the scattered light, wherein the reference beam has an adjustable relative phase;
d. Collecting with a detector at least a portion of the light resulting from the interference between the scattered light and the reference beam;
e. Constructing a signal indicative of an optical phase of the scattered light, wherein the optical phase signal has a phase error of less than 10 degrees;
f. Repeating steps a-e at a plurality of center wavelengths.

2. The method of claim 1 wherein the phase error is less than 5 degrees.

3. The method of claim 1 wherein the phase error is less than 10 degrees.

4. A method of measuring an optical property of a sub micrometer region of a sample comprising the steps of:
a. Interacting a probe tip of a probe microscope with a region of the sample;
b. Illuminating the sample with a beam of light from at least one tunable source with a center wavelength λ such that light is scattered from the probe-sample interaction region;
c. Interfering a reference beam with the scattered light, wherein the reference beam has an adjustable relative phase;
d. Collecting with a detector at least a portion of the light resulting from the interference between the scattered light and the reference beam;
e. Constructing a signal indicative of the amplitude of the scattered light, wherein the amplitude has an error of less than 15%;
f. Repeating steps a-e at a plurality of center wavelengths.

5. The method of claim 4 wherein the amplitude error is less than 5%.

6. The method of claim 4 wherein the amplitude error is less than 1%.

Assignees

• Anasys Instr
• Bruker Nano Inc

Inventors

• Yang Honghua
• Kjoller Kevin
• Berweger Sam
• Prater Craig

Classifications

• G01N2201/0612

  Laser diodes · CPC title

• G01N21/47

  Scattering, i.e. diffuse reflection (G01N21/25, G01N21/41 take precedence {G01N21/55 takes precedence}) · CPC title

• G01Q60/18 Primary

  SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes · CPC title

• G01N21/35 Primary

  using infrared light (G01N21/39 takes precedence) · CPC title

• G01N2201/10

  Scanning · CPC title