Chemical nano-identification of a sample using normalized near-field spectroscopy

Patent metadata

Field	Value
Publication number	US-9933453-B2
Application number	US-201715791764-A
Country	US
Kind code	B2
Filing date	Oct 24, 2017
Priority date	Mar 15, 2013
Publication date	Apr 3, 2018
Grant date	Apr 3, 2018

Abstract

Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum.

First claim

What is claimed is:

1. A method for optical characterization of a sample (SUT) using evanescent waves, the method comprising:
detecting, with an optical detector, an optical signal interferometrically formed by
(i) first electromagnetic radiation backscattered by a nanoantenna in response to incident electromagnetic radiation, said nanoantenna being controllably movable above a surface of the SUT, and
(ii) second electromagnetic radiation representing a portion of said incident electromagnetic radiation, a difference between a phase of the second electromagnetic radiation and a phase of the first electromagnetic radiation being operably variable;

to form an optical data output;
processing said optical data output to extract a first portion of said optical data output to identify a complex-valued permittivity of the SUT based at least on said first portion,
wherein said first portion represents electromagnetic field that has been caused by near-field interaction between the nanoantenna and the surface of the SUT at pre-determined distances of separation between the nanoantenna and the surface of the SUT during a motion of the nanoantenna above the SUT.

2. A method according to claim 1 , wherein said detecting includes detecting during a relative scanning motion between the surface of the SUT and the nanoantenna, said motion occurring within a scan range.

3. A method according to claim 2 ,
wherein said detecting during the relative scanning motion includes
a first scanning of the surface of the SUT at a first predetermined distance of separation between the nanoantenna and the surface of the SUT, and
a second scanning of said surface of the SUT at a second predetermined distance, and

further comprising determining at least one of real and imaginary components of a difference between first and second magnitudes of said electromagnetic field, the first magnitude corresponding to the first pre-determined distance of separation from the pre-determined distances of separation, the second magnitude corresponding to the second pre-determined distance of separation from the distances of separation.

4. A method according to claim 1 ,
wherein said detecting includes collecting first values of the optical signal while the nanoantenna is positioned at a first predetermined distance of separation above a point of the surface of the SUT, and
further includes collecting second values of the optical signal while the nanoantenna is positioned at a second predetermined distance of separation above said point.

5. A method according to claim 4 ,
wherein said processing includes determining, based on said first and second values, at least one of real and imaginary components of a difference between first and second magnitudes of said electromagnetic field, the first magnitude corresponding to the first predetermined distance of separation, the second magnitude corresponding to the second predetermined distance of separation.

6. A method according to claim 1 ,
wherein said detecting includes collecting multiple sets of values of the optical signal at respectively-corresponding multiple predetermined distances of separation above the same point of the surface.

7. A method according to claim 1 , further comprising determining amplitude of the electromagnetic field from the first portion of said optical data to ascertain a dielectric constant parameter and an absorption parameter characterizing the SUT.

8. A method according to claim 1 , wherein said incident electromagnetic radiation includes a plurality of wavelengths while the phase of second electromagnetic radiation differs from the phase of the first electromagnetic radiation by an amount that is being continuously changed in a reference arm of an interferometer according to a periodic function characterized by a modulation frequency.

9. A method according to claim 8 , wherein said periodic function includes at least one of linear and sinusoidal functions.

10. A method according to claim 1 , further comprising suppressing a contribution of background electromagnetic radiation to the first portions of the optical data output to obtain a second portion of the optical data output in which said contribution is reduced as compared to the first portion.

11. A method according to claim 1 , further comprising analyzing data, derived from the optical data output, in a time domain with the use of spectral analysis to derive a spectrum representing an interferogram.

Assignees

• Bruker Nano Inc

Inventors

• Andreev Gregory
• Osechinskiy Sergey
• Minne Stephen
• Su Chanmin

Classifications

• G01Q60/22

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q60/18

  SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes · CPC title

• G01Q30/04 Primary

  Display or data processing devices · CPC title

• G01Q20/02 Primary

  by optical means · CPC title