Magnetic annealing apparatus

Patent metadata

Field	Value
Publication number	US-10254046-B2
Application number	US-201514840486-A
Country	US
Kind code	B2
Filing date	Aug 31, 2015
Priority date	Sep 3, 2014
Publication date	Apr 9, 2019
Grant date	Apr 9, 2019

Abstract

Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.

First claim

What is claimed is:

1. A magnetic annealing apparatus comprising:
a processing container having a horizontally-elongated tubular shape, and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field;
a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside;
a magnet provided to cover the heating unit from the outside of the heating unit;
a substrate holder configured to hold the plurality of substrates within the processing container; and
a plurality of shielding plates, wherein a first shielding plate of the plurality of shielding plates is provided at one end of the processing container and a second shielding plate of the plurality of shielding plates is provided at another end of the processing container, respectively,
wherein at least one of the plurality of heat shielding plates includes a slit formed thereon.

2. The magnetic annealing apparatus of claim 1 , wherein the first shielding plate is arranged substantially perpendicular to the longitudinal direction and the second shielding plate is arranged substantially perpendicular to the longitudinal direction.

3. The magnetic annealing apparatus of claim 1 , wherein the substrate holder is configured to hold the plurality of substrates at predetermined intervals along the longitudinal direction in a substantially vertically standing state.

4. The magnetic annealing apparatus of claim 1 , wherein the substrate holder is configured to hold the plurality of substrates at predetermined intervals in the vertical direction in a substantially horizontally placed state so as to form a loaded body.

5. The magnetic annealing apparatus of claim 4 , wherein the substrate holder is configured to hold a plurality of loaded bodies in parallel with each other along the longitudinal direction.

6. The magnetic annealing apparatus of claim 4 , wherein the heating unit covers substantially the whole of the surface of the processing container that extends in the longitudinal direction.

7. The magnetic annealing apparatus of claim 6 , wherein the heat shielding plate is provided to cover each of an uppermost surface and a lowermost surface of the plurality of substrates through the substrate holder.

8. The magnetic annealing apparatus of claim 1 , wherein at least some of the plurality of heat shielding plates are made from non-magnetic metal plates.

9. The magnetic annealing apparatus of claim 8 , wherein the at least some of the plurality of heat shielding plates are arranged at predetermined intervals with spacers being interposed therebetween.

10. The magnetic annealing apparatus of claim 1 , wherein at least one of the plurality of heat shielding plates includes a plurality of louver-shaped slits formed by cutting and bending.

11. The magnetic annealing apparatus of claim 1 , wherein a length of the heating unit in the longitudinal direction is 1.7 times that of the substrate holder or more.

12. The magnetic annealing apparatus of claim 1 , wherein the processing container has a cylindrical shape.

13. The magnetic annealing apparatus of claim 1 , wherein the slit is louver-shaped.

14. The magnetic annealing apparatus of claim 1 , wherein the slit is formed by cutting and bending.

15. The magnetic annealing apparatus of claim 1 , wherein the at least one of the plurality of heat shielding plates is provided in parallel with the heating unit.

Assignees

• Tokyo Electron Ltd

Inventors

• Yamazaki Mitsuru
• Clarke Barry
• Colgan Ian
• Eyres George
• Domsa Ioan

Classifications

• H10P72/13

  Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/3311

  Horizontal transfer of a batch of workpieces · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• F27B5/08

  Arrangements of linings · CPC title

• F27B17/005

  with cylindrical chambers · CPC title