Magnetic annealing apparatus and magnetic annealing method

Patent metadata

Field	Value
Publication number	US-9851149-B2
Application number	US-201514836047-A
Country	US
Kind code	B2
Filing date	Aug 26, 2015
Priority date	Aug 29, 2014
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio.

First claim

What is claimed is:

1. A magnetic annealing apparatus comprising:
a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field;
a substrate holder configured to hold the plurality of substrates substantially horizontally in the processing container such that the plurality of substrates are stacked vertically;
a division heater including a plurality of sub-division heaters that cover an upper surface, a lower surface, a right side surface, and a left side surface of the processing container and configured to cover a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction with the plurality of sub-division heaters;
a magnet installed to cover an outside of the division heater; and
a controller configured to feedback-control a temperature of a first sub-division heater that covers at least one of the right side surface and the left side surface of the processing container among the plurality of sub-division heaters, and to control a temperature of a second sub-division heater that covers at least one of the upper surface and the lower surface of the processing container by multiplying a control output of the first sub-division heater and a predetermined ratio.

2. The magnetic annealing apparatus of claim 1 , wherein a plurality of division heaters is installed in the longitudinal direction, and
the first sub-division heater is selected for each predetermined region along the longitudinal direction.

3. The magnetic annealing apparatus of claim 1 , wherein the temperature of the first sub-division heater is feedback-controlled based on a temperature detection result of a temperature detector installed in the processing container.

4. The magnetic annealing apparatus of claim 3 , wherein the temperature detector is installed at a position closest to the first sub-division heater.

5. The magnetic annealing apparatus of claim 1 , wherein the control output is an output that controls a heater power of each of the plurality of sub-division heaters.

6. The magnetic annealing apparatus of claim 5 , wherein the controller includes:
a temperature control unit configured to control the heater power of the first sub-division heater by a feedback control; and
an output conversion unit configured to perform an output conversion by multiplying the heater power of the first sub-division heater and the predetermined ratio.

7. The magnetic annealing apparatus of claim 1 , further comprising:
a surrounding heater configured to surround the entire circumference of the processing container at both ends of the division heater in the longitudinal direction,
wherein the controller feedback-controls a temperature of the surrounding heater.

8. The magnetic annealing apparatus of claim 1 , further comprising:
a heat shielding plate arranged to cover an upper surface and a lower surface of the substrate holder and configured to shield heat from the second sub-division heater,
wherein the controller is further configured to set the predetermined ratio of the second sub-division heater to a value larger than 1 at the beginning of a magnetic annealing processing.

9. The magnetic annealing apparatus of claim 8 , wherein the controller sets the predetermined ratio to 1 when a predetermined time has elapsed.

10. A magnetic annealing method of annealing a plurality of substrates in a magnetic field, the method comprising:
carrying a plurality of substrates into a processing container using a substrate holder that holds the plurality of substrates substantially horizontally such that the plurality of substrates are stacked vertically and has an upper surface and a lower surface of the substrate holder covered by a heat shielding plate, the processing container being surrounded outward by a division heater including at least four sub-division heaters covering regions including an upper portion, a lower portions, and both side portions;
heating the sub-division heaters that cover the upper and lower portions at an output higher than an output of the sub-division heaters that cover the both side portions; and
reducing the output of the sub-division heaters that cover the upper and lower portions to substantially the same level as the output of the sub-division heaters that cover the both side portions,
wherein, in the heating the sub-division heaters that cover the upper and lower portions, the output of the sub-division heaters that cover the both side portions is controlled by a feedback control, and the output of the sub-division heaters that cover the upper and lower portions is controlled by multiplying the output of the sub-division heaters that cover the both side portions and a predetermined ratio.

11. The magnetic annealing method of claim 10 , wherein the predetermined ratio is variable so as to be set to a value larger than 1 in the heating the sub-division heaters that cover the upper and lower portions and a value approximate to 1 in the reducing the output of the sub-division heaters that cover the upper and lower portions.

12. The magnetic annealing apparatus of claim 2 , wherein, when there is a difference in a temperature characteristic between the plurality of the division heaters installed in the longitudinal direction, a ratio for each of the second sub-division heater that covers at least one of the upper surface and the lower surface of the processing container is determined in consideration of the difference.

13. The magnetic annealing apparatus of claim 1 , wherein the predetermined ratio is set to a value within a range of 1.2 to 1.8 or 1.4 to 1.6.

14. The magnetic annealing apparatus of claim 1 , wherein the predetermined ratio is set to about 1.5.

Assignees

• Tokyo Electron Ltd

Inventors

• Yamazaki Mitsuru
• Clarke Barry
• Van Der Linde Jattie
• Saito Makoto
• Sugawara Kazuyoshi
• Abe Toshiji
• Enomoto Tadashi

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H01L21/67248

  Electricity · mapped topic

• F27D11/12

  with electromagnetic fields acting directly on the material being heated · CPC title

• H01L21/67115

  Electricity · mapped topic