In-situ temperature measurement in a noisy environment

Patent metadata

Field	Value
Publication number	US-10249522-B2
Application number	US-201715613906-A
Country	US
Kind code	B2
Filing date	Jun 5, 2017
Priority date	Mar 15, 2013
Publication date	Apr 2, 2019
Grant date	Apr 2, 2019

Abstract

Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. One or more lift pins has a light pipe disposed therein to collect radiation emitted or transmitted by the substrate when the lift pin contacts the substrate surface.

First claim

The invention claimed is:

1. A lift pin for a semiconductor processing chamber, the lift pin comprising:
a light pipe disposed within a body of the lift pin; and
a cover over an end of the light pipe and configured to contact a substrate to transmit thermal energy from the substrate to the light pipe, wherein the cover is a thermally conductive material.

2. The lift pin of claim 1 , further comprising a threaded clamp, wherein the cover has a ledge that engages the threaded clamp.

3. The lift pin of claim 2 , wherein the ledge protrudes radially outward from the light pipe.

4. The lift pin of claim 2 , wherein the threaded clamp has threads that engage a threaded end of the lift pin.

5. The lift pin of claim 4 , further comprising an insulator disposed around a portion of the light pipe that protrudes above the threaded end of the lift pin.

6. The lift pin of claim 5 , wherein the cover is metal and the insulator is quartz.

7. The lift pin of claim 1 , wherein the cover is a heat shield for the light pipe.

8. The lift pin of claim 1 , wherein the cover is a metal material.

9. The lift pin of claim 1 , wherein the cover comprises tungsten and the body comprises copper.

10. A method of measuring a thermal state of a substrate, comprising:
contacting the substrate with a cover, wherein the cover is over an end of a light pipe;
measuring a first radiation intensity transmitted by the substrate to the light pipe through the cover;
measuring a second radiation intensity transmitted by the substrate to the light pipe through the cover;
relating the second radiation intensity to a level of thermal noise in the environment of the substrate;
comparing the level of thermal noise to the first radiation intensity to give a thermal state signal; and
relating the thermal state signal to the thermal state of the substrate.

11. The method of claim 10 , wherein the first radiation has a wavelength greater than 1200 nm and the second radiation has a wavelength less than 1100 nm.

12. The method of claim 11 , wherein comparing the level of thermal noise to the first radiation intensity comprises subtracting the level of thermal noise from the first radiation intensity.

Assignees

• Applied Materials Inc

Inventors

• Wu Hanbing
• Subramani Anantha K
• Wang Wei W
• Hunter Aaron Muir

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• G01J5/0818

  Waveguides · CPC title

• G01J5/0007

  of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing · CPC title

• H01L21/68742

  Electricity · mapped topic