Methods and apparatus for polarized wafer inspection

Patent metadata

Field	Value
Publication number	US-10228331-B2
Application number	US-201715847249-A
Country	US
Kind code	B2
Filing date	Dec 19, 2017
Priority date	Mar 28, 2016
Publication date	Mar 12, 2019
Grant date	Mar 12, 2019

Abstract

This system comprises an illumination optics subsystem for generating and directing an incident beam towards a defect on a surface of a wafer. The illumination optics subsystem includes a light source for generating the incident beam and one or more polarization components for adjusting a ratio and/or a phase difference for the incident beam's electric field components. The system includes a collection optics subsystem for collecting scattered light from the defect and/or surface in response to the incident beam, and the collection optics subsystem comprises an adjustable aperture at the pupil plane, a rotatable waveplate for adjusting a phase difference of electric field components of the collected scattered light, and a rotatable analyzer. The system includes a controller for selecting a polarization of the incident beam, obtaining a defect scattering map from the defect, obtaining a surface scattering map from the background surface, and determining a configuration of the polarization components, aperture mask, rotatable waveplate, and analyzer based on analysis of the defect and surface scattering map to maximize a defect signal to noise ratio.

First claim

What is claimed is:

1. An inspection system for inspecting a semiconductor sample, comprising:
an illumination optics subsystem for generating and directing an incident beam towards a defect on a surface of a wafer, wherein the illumination optics subsystem includes a light source for generating the incident beam and one or more polarization components for adjusting a ratio and/or a phase difference for the incident beam's electric field components;
a collection optics subsystem for collecting scattered light from the defect and/or background surface in response to the incident beam, wherein the collection optics subsystem comprises an adjustable aperture at the pupil plane, followed by a rotatable waveplate for adjusting a phase difference of electric field components of the collected scattered light, followed by a rotatable analyzer; and
a controller that is configured to perform the following operations:
via the one or more polarization components, selecting a ratio and/or a phase difference of the incident beam's electric field components;
obtaining a defect scattering map based on collection of scattered light from the defect;
obtaining a surface scattering map based on collection of scattered light from the background surface; and
determining a configuration of the one or more polarization components, aperture mask, rotatable waveplate, and analyzer based on analysis of the defect and surface scattering maps so as to maximize a defect signal to noise ratio.

2. The system of claim 1 , wherein the defect and surface maps are obtained at four or more angles of the waveplate of the collection optics subsystem, and wherein determining a configuration is accomplished by:
for each pupil position at the pupil plane, determining defect Stokes parameters based on the obtained defect scattering map,
for each pupil position at the pupil plane, determining surface Stokes parameters based on the obtained surface scattering map,
generating a polarization orthogonality map based on the determined defect and surface Stokes parameters, and
comparing relative polarization orthogonality values from the polarization orthogonality map and relative intensity distribution values from the defect scattering map to determine the configuration.

3. The system of claim 1 , wherein the one or more polarization components of the illumination subsystem include a rotatable ½ waveplate for controlling the incident beam's polarization angle and a rotatable ¼ waveplate for controlling the phase difference of electric field components of incident beam.

4. The system of claim 3 , wherein the one or more polarization components of the illumination subsystem further comprise another ½ waveplate and a linear polarizer for controlling the incident beam's power and increasing a dynamic range, wherein the ¼ waveplate is positioned before the linear polarizer.

5. The system of claim 1 , wherein the collection optics subsystem further includes an adjustable field stop that is configured for separately obtaining the defect and surface scattering maps.

6. The system of claim 1 , wherein the collection optics subsystem further includes a sensor and one or more relay lens for relaying a pupil image to the sensor.

7. The system of claim 1 , wherein a configuration of the aperture mask is determined so as to block areas of the pupil, except for areas with maximized polarization orthogonality and defect scattering intensity.

8. The system of claim 1 , wherein the one or more polarization components of the illumination optics subsystem comprise a linear polarizer, and wherein the rotatable waveplate of the collection optics subsystem is a rotatable ¼ waveplate, wherein the linear polarizer and the rotatable ¼ waveplate are each positioned at a conjugate plane.

9. The system of claim 1 , wherein analysis of the defect and surface scattering maps accounts for both scattering intensity and polarization orthogonality of the defect and surface scattering maps.

10. The system of claim 1 , wherein determining a configuration is accomplished by iteratively mathematically applying different settings for the aperture mask, ¼ waveplate, and analyzer to the defect and wafer scattering maps and selecting one of the different settings that results in maximizing the defect signal to noise ratio.

11. A method of inspecting a semiconductor sample, comprising
in an illumination optics subsystem of an inspection system, generating and directing an incident beam at a selected polarization state towards a defect on a surface of a wafer, wherein the illumination optics subsystem of the inspection system includes a light source for generating the incident beam and one or more polarization components for adjusting a ratio and/or a phase difference for the incident beam's electric field components;
in a collection optics subsystem of an inspection system, collecting scattered light from the defect and/or surface in response to the incident beam, wherein the collection optics subsystem of the inspection system comprises an adjustable aperture at the pupil plane, followed by a rotatable waveplate for adjusting a phase difference of electric field components of the collected scattered light, followed by a rotatable analyzer;
obtaining a defect scattering map based on the collected scattered light from the defect;
obtaining a surface scattering map based on the collected scattered light from the background surface; and
determining a configuration of the one or more polarization components, aperture mask, and rotatable waveplate, and analyzer based on analysis of the defect and surface scattering map by accounting for both scattering intensity and polarization orthogonality of the defect and surface scattering maps so as to maximize a defect signal to noise ratio.

12. The method of claim 11 , wherein the defect and surface maps are obtained at four or more angles of the waveplate of the collection optics subsystem, and wherein determining a configuration is accomplished by:
for each pupil position at the pupil plane, determining defect Stokes parameters based on the obtained defect scattering map,
for each pupil position at the Pupil plane, determining surface Stokes parameters based on the obtained surface scattering map,
generating a polarization orthogonality map based on the determined defect and surface Stokes parameters, and
comparing relative polarization orthogonality values from the polarization orthogonality map and relative intensity distribution values from the defect scattering map to determine the configuration.

13. The method of claim 11 , wherein the one or more polarization components of the illumination subsystem include a rotatable ½ waveplate for controlling the incident beam's polarization angle and a rotatable ¼ waveplate for controlling the phase difference of the electric field components of the incident beam, wherein the ¼ waveplate is positioned before the linear polarizer.

14. The method of claim 11 , wherein the collection optics subsystem further includes an adjustable field stop for separately obtaining the defect and surface scattering maps.

15. The method of claim 11 , wherein the collection optics subsystem further includes a sensor and one or more relay lens for relaying a pupil image to the sensor.

16. The method of claim 11 , wherein a configuration of the aperture mask is determined so as to block areas of the pupil, except for areas with maximized polarization orthogonality and defect scattering intensity.

17. The method of claim 11 , wherein determining a configuration is accomplished by iteratively ma

Assignees

• Kla Tencor Corp

Inventors

• Liu Sheng
• Zhao Guoheng

Classifications

• G01N2021/8848

  Polarisation of light · CPC title

• G01N2201/0683

  Brewster plate; polarisation controlling elements · CPC title

• G01N21/21

  Polarisation-affecting properties (G01N21/19 takes precedence) · CPC title

• G01N21/9501 Primary

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title