Variable polarization wafer inspection

Patent metadata

Field	Value
Publication number	US-9239295-B2
Application number	US-201313857744-A
Country	US
Kind code	B2
Filing date	Apr 5, 2013
Priority date	Apr 9, 2012
Publication date	Jan 19, 2016
Grant date	Jan 19, 2016

Abstract

Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).

First claim

What is claimed is:

1. A system configured to detect defects on a wafer comprising:
an illumination subsystem configured to illuminate the wafer with light having an illumination polarization;
first and second side channels configured to detect light scattered from the wafer due to illumination of the wafer by the illumination subsystem and to generate output responsive to the detected light;
a first polarizing component positioned in a path of the light from the wafer detected by the first side channel and a second polarizing component positioned in a path of the light from the wafer detected by the second side channel, wherein the first and second polarizing components are configured to have first and second detection polarizations, respectively, that are selected from two or more first and second polarization settings for the first and second polarizing components, respectively, wherein the two or more first polarization settings comprise at least one first detection polarization that is asymmetric to at least one second detection polarization included in the two or more second polarization settings, wherein the first detection polarization results in the output generated by the first side channel being sensitive to defects of interest and one or more nuisance defects, and wherein the second detection polarization results in the output generated by the second side channel being not sensitive to the one or more nuisance defects; and
a computer subsystem configured to detect defects on the wafer based on the output generated by at least one of the first and second side channels, wherein the computer subsystem is further configured to detect the defects on the wafer by identifying the defects that are detected with the output of the first side channel and not the output of the second side channel as the one or more nuisance defects.

2. The system of claim 1 , wherein the at least one first detection polarization that is asymmetric to the at least one second detection polarization is not parallel to the at least one second detection polarization, perpendicular to the at least one second detection polarization, circular polarization, or an unpolarized setting.

3. The system of claim 1 , wherein at least one of the first and second polarizing components comprises an analyzer and a device configured to rotate the analyzer in the path of the light from the wafer detected by at least one of the first and second side channels, respectively.

4. The system of claim 1 , wherein at least one of the first and second polarizing components comprises multiple discrete analyzers mounted side by side on a frame and a device configured to laterally translate the multiple discrete analyzers in the path of the light from the wafer detected by at least one of the first and second side channels, respectively.

5. The system of claim 1 , wherein the computer subsystem is further configured to detect the defects by applying a defect detection algorithm to the output, and wherein at least one of the first and second detection polarizations maximizes a number of the defects of interest that are detected by said applying while minimizing a number of the one or more nuisance defects that are detected h said applying.

6. The system of claim 1 , wherein the first and second detection polarizations are different from each other.

7. The system of claim 1 , wherein the first and second detection polarizations are selected independently of each other.

8. The system of claim 1 , wherein the first and second detection polarizations are selected combination.

9. The system of claim 1 , wherein the first and second detection polarizations independently and separately optimize the first and second side channels, respectively, for maximum defect of interest detection and minimum nuisance detection.

10. The system of claim 1 , wherein the first and second detection polarizations are not rotated during inspection of the wafer.

11. The system of claim 1 , wherein the computer subsystem is further configured for selecting a subset of defects detected on the wafer or another wafer from inspection results produced for the wafer or the other wafer, wherein the subset comprises one or more of the defects of interest and the one or more nuisance defects, wherein the illumination subsystem is further configured to illuminate the defects in the subset on the wafer or the other wafer with the light having the illumination polarization, wherein the first and second side channels are further configured to detect light, due to the illumination, scattered from the defects in the subset for the two or more first polarization settings and the two or more second polarization settings, and wherein the computer subsystem is further configured for determining one or more characteristics of each of the defects included in the subset based on the output generated for at least two of the two or more first polarization settings and at least two of the two or more second polarization settings and selecting at least one of the two or more first and second polarization settings for inspection of wafers by the system based on the determined one or more characteristics.

12. The system of claim 11 , wherein the computer subsystem is further configured for producing the inspection results for the wafer or the other wafer by performing a hot scan of the wafer or the other wafer with a nominal illumination polarization and nominal polarization settings of the first and second polarizing components.

13. The system of claim 11 , wherein selecting the subset of defects comprises selecting at least one of the defects of interest and at least one of the one or more nuisance defects from the inspection results based on region and intensity.

14. The system of claim 11 , wherein the one or more characteristics comprise one or more of defect intensity, defect local noise, and signal-to-noise ratio, and wherein the one or more characteristics arc determined as a function of at least two of the two or more first polarization settings and as a function of at least two of the two or more second polarization settings.

15. The system of claim 11 , wherein determining the one or more characteristics comprises normalizing the one or more characteristics to values for the one or more characteristics determined for nominal polarization settings of the first and second polarizing components.

16. The system of claim 11 , wherein selecting the at least one of the two or more first or second polarization settings for the inspection comprises comparing the one or more characteristics determined for the one or more of the defects of interest to the one or more characteristics determined for the one or more nuisance defects.

17. A method for detecting defects on a wafer, comprising:
illuminating the wafer with light having an illumination polarization;
detecting light scattered from the wafer due to said illuminating with first and second side channels of an inspection system and generating output responsive to the detected light;
prior to said detecting, directing the light from the wafer detected by the first side channel through a first polarizing component and directing the light from the wafer detected by the second side channel through a second polarizing component, wherein the first and second polarizing components are configured to have first and second detection polarizations, respectively, that are selected from two or more first and second polarization settings for the first and second polarizing components, respectively, wherein the two or more first polarization settings comprise

Assignees

• Kla Tencor Corp
• Kla Tencor Corp

Inventors

• Peng Xianzhao
• Wang Mark Shi
• Chen Grace Hsiu-Ling

Classifications

• G01N21/21 Primary

  Polarisation-affecting properties (G01N21/19 takes precedence) · CPC title

• G01N2021/8848

  Polarisation of light · CPC title

• G01N21/9501

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title