Methods and apparatus for polarized wafer inspection

Patent metadata

Field	Value
Publication number	US-9874526-B2
Application number	US-201715468608-A
Country	US
Kind code	B2
Filing date	Mar 24, 2017
Priority date	Mar 28, 2016
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

Disclosed are methods and apparatus for inspecting a semiconductor sample. This system comprises an illumination optics subsystem for generating and directing an incident beam towards a defect on a surface of a wafer. The illumination optics subsystem includes a light source for generating the incident beam and one or more polarization components for adjusting a ratio and/or a phase difference for the incident beam's electric field components. The system further includes a collection optics subsystem for collecting scattered light from the defect and/or surface in response to the incident beam, and the collection optics subsystem comprises an adjustable aperture at the pupil plane, followed by a rotatable waveplate for adjusting a phase difference of electric field components of the collected scattered light, followed by a rotatable analyzer. The system also includes a controller that is configured for (i) selecting a polarization of the incident beam, (ii) obtaining a defect scattering map, (iii) obtaining a surface scattering map, and (iv) determining a configuration of the one or more polarization components, aperture mask, and rotatable ¼ waveplate, and analyzer based on analysis of the defect and surface scattering map so as to maximize a defect signal to noise ratio,

First claim

What is claimed is:

1. An inspection system for inspecting a semiconductor sample, comprising:
an illumination optics subsystem for generating and directing an incident beam towards a defect on a surface of a wafer, wherein the illumination optics subsystem includes a light source for generating the incident beam and one or more polarization components for adjusting a ratio and/or a phase difference for the incident beam's electric field components;
a collection optics subsystem for collecting scattered light from the defect and/or surface in response to the incident beam, wherein the collection optics subsystem comprises an adjustable aperture at the pupil plane, followed by a rotatable waveplate for adjusting a phase difference of electric field components of the collected scattered light, followed by a rotatable analyzer; and
a controller that is configured to perform the following operations:
selecting a polarization of the incident beam;
obtaining a defect scattering map;
obtaining a surface scattering map; and
determining a configuration of the one or more polarization components, aperture mask, and rotatable waveplate, and analyzer based on analysis of the defect and surface scattering maps so as to maximize a defect signal to noise ratio.

2. The system of claim 1 , wherein the defect and surface maps are obtained at four or more angles of the waveplate of the collection optics subsystem, and wherein determining a configuration is accomplished by:
for each pupil position at the pupil plane, determining defect Stokes parameters based on the obtained defect scattering map,
for each pupil position at the pupil plane, determining surface Stokes parameters based on the obtained surface scattering map,
generating a polarization orthogonality map based on the determined defect and surface Stokes parameters, and
comparing relative polarization orthogonality values from the polarization orthogonality map and relative intensity distribution values from the defect scattering map to determine the configuration.

3. The system of claim 1 , wherein the one or more polarization components of the illumination subsystem include a rotatable ½ waveplate for controlling the incident beam's polarization angle and a rotatable ¼ waveplate for controlling the phase difference of electric field components of incident beam.

4. The system of claim 3 , wherein the one or more polarization components of the illumination subsystem further comprise another ½ waveplate and a linear polarizer for controlling the incident beam's power and increasing a dynamic range.

5. The system of claim 4 , wherein the ¼ waveplate is positioned before the linear polarizer.

6. The system of claim 1 , wherein the collection optics subsystem further includes an adjustable field stop for separately obtaining the defect and surface scattering maps.

7. The system of claim 1 , wherein the collection optics subsystem further includes a sensor and one or more relay lens for relaying a pupil image to the sensor.

8. The system of claim 1 , wherein the illumination optics subsystem includes an aperture that is open to a full size and determining a configuration is accomplished by iteratively mathematically applying different settings for the aperture mask, ¼ waveplate, and analyzer so as to maximize the defect signal to noise ratio.

9. The system of claim 1 , wherein a configuration of the aperture mask is determined so as to block areas of the pupil, except for areas with maximized polarization orthogonality and defect scattering intensity.

10. The system of claim 1 , wherein the one or more polarization components of the illumination optics subsystem comprise a linear polarizer, and wherein the rotatable waveplate of the collection optics subsystem is a rotatable ¼ waveplate.

11. The system of claim 10 , wherein the linear polarizer and the rotatable ¼ waveplate are each positioned at a conjugate plane.

12. The system of claim 1 , wherein the light source is a broadband light source and the illumination optics subsystem is arranged to direct the incident beam through an objective onto the surface of the wafer.

13. A method of inspecting a semiconductor sample, comprising
in an illumination optics subsystem of an inspection system, generating and directing an incident beam at a selected polarization state towards a defect on a surface of a wafer, wherein the illumination optics subsystem of the inspection system includes a light source for generating the incident beam and one or more polarization components for adjusting a ratio and/or a phase difference for the incident beam's electric field components;
in a collection optics subsystem of an inspection system, collecting scattered light from the defect and/or surface in response to the incident beam, wherein the collection optics subsystem of the inspection system comprises an adjustable aperture at the pupil plane, followed by a rotatable waveplate for adjusting a phase difference of electric field components of the collected scattered light, followed by a rotatable analyzer;
obtaining a defect scattering map based on the collected scattered light;
obtaining a surface scattering map based on the collected scattered light; and
determining a configuration of the one or more polarization components, aperture mask, and rotatable waveplate, and analyzer based on analysis of the defect and surface scattering map so as to maximize a defect signal to noise ratio.

14. The method of claim 13 , wherein the defect and surface maps are obtained at four or more angles of the waveplate of the collection optics subsystem, and wherein determining a configuration is accomplished by:
for each pupil position at the pupil plane, determining defect Stokes parameters based on the obtained defect scattering map,
for each pupil position at the Pupil plane, determining surface Stokes parameters based on the obtained surface scattering map,
generating a polarization orthogonality map based on the determined defect and surface Stokes parameters, and
comparing relative polarization orthogonality values from the polarization orthogonality map and relative intensity distribution values from the defect scattering map to determine the configuration.

15. The method of claim 13 , wherein the one or more polarization components of the illumination subsystem include a rotatable ½ waveplate for controlling the incident beam's polarization angle and a rotatable ¼ waveplate for controlling the phase difference of the electric field components of the incident beam.

16. The method of claim 15 , wherein the ¼ waveplate is positioned before the linear polarizer.

17. The method of claim 13 , wherein the collection optics subsystem further includes an adjustable field stop for separately obtaining the defect and surface scattering maps.

18. The method of claim 13 , wherein the collection optics subsystem further includes a sensor and one or more relay lens for relaying a pupil image to the sensor.

19. The method of claim 13 , wherein the illumination optics subsystem includes an aperture that is open to a full size and determining a configuration is accomplished by iteratively mathematically applying different settings for the aperture mask, ¼ waveplate, and analyzer so as to maximize the defect signal to noise ratio.

20. The method of claim 13 , wherein a configuration of the aperture mask is determined so as to block areas of the pupil, except for areas with maximized polarization orthogonality and defect scattering intensity.

Assignees

• Kla Tencor Corp

Inventors

• Liu Sheng
• Zhao Guoheng

Classifications

• G01N21/21

  Polarisation-affecting properties (G01N21/19 takes precedence) · CPC title

• G01N2201/0683

  Brewster plate; polarisation controlling elements · CPC title

• G01N2021/8848

  Polarisation of light · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title

• G01N21/9501 Primary

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title