Yttrium fluoride spray material, yttrium oxyfluoride-deposited article, and making methods
US-2017114440-A1 · Apr 27, 2017 · US
Thermal spray material and thermal spray coated article
US10227263B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10227263-B2 |
| Application number | US-201715800419-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 1, 2017 |
| Priority date | Nov 7, 2016 |
| Publication date | Mar 12, 2019 |
| Grant date | Mar 12, 2019 |
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- Title
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Abstract
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Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O—X) and a rare earth element halide (REX 3 ).
First claim
Opening claim text (preview).
What is claimed is: 1. A thermal spray material comprising a rare earth element, oxygen, and a halogen element as constituent elements, and comprising a mixed crystal of a rare earth element oxyhalide and a rare earth element halide. 2. The thermal spray material according to claim 1 , substantially being free from a rare earth element halide that is a halide of the rare earth element. 3. The thermal spray material according to claim 1 , substantially being free from a rare earth element oxide that is an oxide of the rare earth element. 4. The thermal spray material according to claim 1 , substantially being free from the rare earth element oxyhalide. 5. The thermal spray material according to claim 1 , wherein the mixed crystal comprises the rare earth element halide in the range of at least 5 mol % and not more than 95 mol %. 6. The thermal spray material according to claim 1 , comprising yttrium as the rare earth element, comprising fluorine as the halogen element, comprising yttrium oxyfluoride as the rare earth element oxyhalide, and comprising yttrium fluoride as the rare earth element halide. 7. The thermal spray material according to claim 1 , comprising a powder having an average particle diameter of at least 5 μm and not more than 60 μm. 8. The thermal spray material according to claim 7 , wherein the cumulative pore volume in the powder for pore radii equal to or less than 1 μm is not more than 0.1 cm3/g.
Assignees
Inventors
Classifications
- C23C4/04Primary
characterised by the coating material · CPC title
Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying · CPC title
Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide · CPC title
obtaining ceramic coatings (coating of mortars, concrete, artificial or natural stone or ceramics C04B41/45; laminated ceramic products B32B18/00; coating of glass C03C17/00, applying ceramic coatings on silicon for semi-conductor purposes H10W; coating metallic materials C23) · CPC title
Granulation or pelletising (devices for shaping artificial aggregates from ceramic mixtures B28B1/004) · CPC title
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- What does patent US10227263B2 cover?
- Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O—X) and a rare earth element ha…
- Who is the assignee on this patent?
- Tokyo Electron Ltd, Fujimi Inc
- What technology area does this patent fall under?
- Primary CPC classification C23C4/04. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Mar 12 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 6 related publications on this page (citations in our corpus or others sharing the same primary CPC).