Thermal spray material, thermal spray coating and thermal spray coated article

Patent metadata

Field	Value
Publication number	US-2016326623-A1
Application number	US-201615142172-A
Country	US
Kind code	A1
Filing date	Apr 29, 2016
Priority date	May 8, 2015
Publication date	Nov 10, 2016
Grant date	—

Abstract

This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE-O-X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. It is characterized by being essentially free of an oxide of the rare earth element

First claim

What is claimed is:

1 . A thermal spray material comprising:
a rare earth element oxyhalide (RE-O-X) comprising a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents, the rare earth element oxyhalide accounting for at least 77% of the total mass, and being essentially free of an oxide of the rare earth element.

2 . The thermal spray material of claim 1 , further comprising a fluoride of the rare earth element up to 23% of the total mass.

3 . The thermal spray material of claim 1 essentially free of a halide of the rare earth element.

4 . The thermal spray material of claim 1 , wherein the rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.

5 . The thermal spray material of claim 4 , having an oxygen to rare earth element molar ratio (O/RE) of 0.9 or less.

6 . The thermal spray material of claim 1 , wherein the rare earth element is yttrium, the halogen is fluorine, and the rare earth element oxyhalide is an yttrium oxyfluoride.

7 . A thermal spray coating that is a thermal spray deposit of the thermal spray material of claim 1 .

8 . A thermal spray coating comprising:
as its primary component, a rare earth element oxyhalide (RE-O-X) comprising a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents, and being essentially free of a fluoride of the rare earth element.

9 . The thermal spray coating of claim 8 , essentially free of an oxide of the rare earth element.

10 . The thermal spray coating of claim 8 , wherein the rare earth element is yttrium, the halogen is fluorine, and the rare earth element oxyhalide is an yttrium oxyfluoride.

11 . A thermal sprayed article having a substrate surface provided with the thermal spray coating of claim 7 .

12 . A thermal sprayed article having a substrate surface provided with the thermal spray coating of claim 8 .

Assignees

• Tokyo Electron Ltd
• Fujimi Inc

Inventors

• Nagayama Nobuyuki
• Ibe Hiroyuki
• Tsuzuki Kazuyuki

Classifications

• C23C4/11 Primary

  Oxides · CPC title

• C04B35/50

  based on rare-earth compounds {(non-oxide rare earth compounds C04B35/5156)} · CPC title

• C23C4/134

  Plasma spraying · CPC title

• C23C4/04 Primary

  characterised by the coating material · CPC title

• C04B35/5156

  based on rare earth compounds · CPC title