Method for treating a surface and device implemented

Patent metadata

Field	Value
Publication number	US-10214444-B2
Application number	US-201414895258-A
Country	US
Kind code	B2
Filing date	Jun 6, 2014
Priority date	Jun 7, 2013
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

The present invention relates to a method for treating a surface of an object which comprises the steps consisting of bringing the surface to be treated in contact with a diffusion intermediate and then maintaining said surface to be treated in contact with said diffusion intermediate without any movement relatively to each other, said diffusion intermediate being impregnated with a corrosive solution prior to contacting or during said contacting. The present invention also relates to a device implemented during such a method.

First claim

The invention claimed is:

1. A method for treating a surface of an object, said method consisting of:
contacting the surface to be treated with a diffusion intermediate, said diffusion intermediate being impregnated with a corrosive solution prior to contacting or during said contacting, wherein said diffusion intermediate is a porous solid support that is chemically inert towards said corrosive solution; and
maintaining said surface to be treated in contact with said diffusion intermediate without any movement relative to each other,
wherein said treatment method removes or chemically erodes a layer of material from the surface of the object put into contact with the corrosive solution.

2. The method according to claim 1 , wherein said surface is a surface in a metal, a noble metal, an oxidized metal, a transition metal or a metal alloy.

3. The method according to claim 1 , wherein said surface is a surface in silicon (Si), in silicon carbide (SiC), in gallium arsenide (AsGa), in gallium (Ga), in indium phosphide (InP), in mixtures thereof or alloys thereof.

4. The method according to claim 1 , wherein said surface is a surface in silicon dioxide (SiO 2 ), in aluminum oxide (Al 2 O 3 ), in magnesium oxide (MgO), in glass, in silica glass, in ceramic, in diamond, in mixtures thereof or in alloys thereof.

5. The method according to claim 1 , wherein said corrosive solution is an acid corrosive solution selected from among hydrochloric acid (HCl), nitric acid (HNO 3 ), hydrofluoric acid (HF), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), ammonium fluoride (NH 4 F), ammonium difluoride (NH 4 HF 2 ), an aqueous HCl solution, an aqueous HNO 3 solution, an aqueous HF solution, an aqueous H 2 SO 4 solution, an aqueous H 3 PO 4 solution, an aqueous NH 4 F solution, an aqueous NH 4 HF 2 solution and mixtures thereof.

6. The method according to claim 1 , wherein said corrosive solution is an alkaline corrosive solution selected from an aqueous solution of sodium hydroxide (NaOH), an aqueous solution of potassium hydroxide (KOH), an aqueous solution of calcium hydroxide (Ca(OH) 2 ), an aqueous solution of cesium hydroxide (CsOH), an aqueous solution of lithium hydroxide (LiOH), a solution of sodium hydride (NaH) in molten NaOH and mixtures thereof.

7. The method according to claim 1 , wherein said diffusion intermediate is a porous solid support in a material selected from the group consisting of paper comprising cellulose; cotton paper; agarose; gelatin; cellulose; methylcellulose; carboxymethylcellulose; nitrocellulose; cellulose acetate ester; an alginate; a polyolefin; an ion exchange porous membrane; a sephadex resin packaged as a membrane; or a membrane of a perfluorinated polymer; a membrane in an organic polymer; a felt fabric; a glass fiber fabric; a nylon fabric; a polyacrylamide gel; a sepharose gel; and mixtures thereof.

8. The method according to claim 1 , wherein said diffusion intermediate is impregnated with said corrosive solution prior to contacting the surface to be treated with said diffusion intermediate.

9. A method for treating a surface of an object, comprising:
bringing the surface of the object to be treated in contact with a diffusion intermediate;
impregnating, during said contacting, the diffusion intermediate with a corrosive solution, wherein said diffusion intermediate is a porous solid support that is chemically inert toward said corrosive solution; and
maintaining said surface of the object to be treated in contact with said diffusion intermediate without any movement relative to each other,
wherein said treatment method removes or chemically erodes a layer of material from the surface of the object put into contact with the corrosive solution.

10. A device comprising:
(i) a fixed base on which is deposited a diffusion intermediate; and
(ii) an element comprising a movable portion on which is attached an object to be treated and capable of bringing the surface of said object to be treated into contact with said diffusion intermediate,
said device not comprising any element capable of displacing said surface put into contact with said diffusion intermediate relative to said diffusion intermediate, wherein said diffusion intermediate is impregnated by a corrosive solution which dissolves a layer at the surface of the object to be treated, and wherein said diffusion intermediate is a porous solid support that is chemically inert towards the corrosive solution.

11. The device according to claim 10 , wherein said device further comprises an applicator capable of impregnating the diffusion intermediate with a corrosive solution.

12. The method according to claim 1 , wherein treating the surface of the object removes or chemically erodes a layer of material with a substantially constant thickness at the surface of the object.

Assignees

• Commissariat Energie Atomique

Inventors

• Pilon Fabien
• Belleville Philippe
• Lambert Sébastien
• Rondeau Olivier
• Thomas Sandrine

Classifications

• C03C15/02 Primary

  for making a smooth surface · CPC title

• C23F1/20

  for etching aluminium or alloys thereof · CPC title

• C09K13/02

  containing an alkali metal hydroxide · CPC title

• C23F1/36

  for etching aluminium or alloys thereof · CPC title

• C09K13/04

  containing an inorganic acid · CPC title