Non-contact probe signal loading device

Patent metadata

Field	Value
Publication number	US-10209295-B2
Application number	US-201615539898-A
Country	US
Kind code	B2
Filing date	May 5, 2016
Priority date	Mar 9, 2016
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

A non-contact probe signal loading device is disclosed. The non-contact probe signal loading device includes a probe metal sheet electrically connected to a signal loading terminal, a lower surface of the probe metal sheet facing towards a signal inputting metal sheet into which a signal is to be loaded. A signal transmitting capacitor is formed between the probe metal sheet and the signal inputting metal sheet, and the signal transmitting capacitor functions as a medium to transmit a loaded signal to the signal inputting metal sheet from the probe metal sheet.

First claim

What is claimed is:

1. A non-contact probe signal loading device, comprising:
a probe metal sheet electrically connected to a signal loading terminal, a lower surface of the probe metal sheet facing towards a signal inputting metal sheet into which a signal is to be loaded;
a probe holder to which the probe metal sheet is fixed and from which the probe metal sheet is electrically isolated;
a support base comprising a guard groove at a lower portion thereof, wherein the guard groove is configured for receiving the probe holder and the probe metal sheet fixed to the probe holder; and
a probe lifting device for driving the probe holder to raise up or lower down,
wherein a signal transmitting capacitor is formed between the probe metal sheet and the signal inputting metal sheet, and the signal transmitting capacitor functions as a medium to transmit a loaded signal to the signal inputting metal sheet from the probe metal sheet; and
wherein, by means of the probe lifting device, the probe holder and the probe metal sheet fixed to the probe holder are in one of the following two states: an extension state in which the probe holder and the probe metal sheet fixed to the probe holder extend from the guard groove; and a retraction state in which the probe holder and the probe metal sheet fixed to the probe holder are retracted in the guard groove.

2. The non-contact probe signal loading device according to claim 1 , wherein the probe lifting device comprises a lifting rod,
wherein a trail end of the lifting rod extends into the guard groove via a through hole provided in a portion of the support base above the guard groove and is fixed to the probe holder.

3. The non-contact probe signal loading device according to claim 2 , wherein the probe lifting device further comprises:
a thread screw rod arranged in a direction perpendicular to the signal inputting metal sheet; and
a screw slider mounted around the thread screw rod, an internal thread of the screw slider being engaged with an external thread of the thread screw rod,
wherein the lifting rod has a “7”-shaped structure, a leading end of the lifting rod is fixed to the screw slider, and the probe holder and the probe metal sheet are moved up and down by the thread screw rod.

4. The non-contact probe signal loading device according to claim 3 , wherein the probe lifting device further comprises a servo motor fixed above the support base,
wherein an upper end of the thread screw rod is fixed to an output shaft of the servo motor, and a lower end of the thread screw rod is fixed to a rotary base on the support base at a corresponding position.

5. The non-contact probe signal loading device according to claim 4 , wherein the distance between the probe metal sheet and the underlying signal inputting metal sheet is in a range of 100 μm˜120 μm.

6. The non-contact probe signal loading device according to claim 3 , wherein the distance between the probe metal sheet and the underlying signal inputting metal sheet is in a range of 100 μm˜120 μm.

7. The non-contact probe signal loading device according to claim 2 , wherein the distance between the probe metal sheet and the underlying signal inputting metal sheet is in a range of 100 μm˜120 μm.

8. The non-contact probe signal loading device according to claim 1 , further comprising a control system for generating a control command to control the probe holder to raise up or lower down,
wherein the probe lifting device drives the probe holder to raise up or lower down according to the received control command.

9. The non-contact probe signal loading device according to claim 8 , further comprising a lower displacement sensor arranged at a lower portion of the probe holder for detecting a second distance between the probe metal sheet and the underlying signal inputting metal sheet,
wherein the control system is configured to control the probe holder to raise up or lower down by the probe lifting device according to a feedback from the lower displacement sensor, for transmitting the loaded signal to the signal inputting metal sheet from the probe metal sheet.

10. The non-contact probe signal loading device according to claim 9 , wherein the distance between the probe metal sheet and the underlying signal inputting metal sheet is in a range of 100 μm˜120 μm.

11. The non-contact probe signal loading device according to claim 8 , further comprising an upper displacement sensor arranged at an upper portion of the probe holder for detecting a first distance between a top of the probe holder and a bottom of the guard groove,
wherein the control system is configured to control the probe holder to raise up or lower down by the probe lifting device according to the first distance fed back from the upper displacement sensor, to ensure that the first distance is always greater than zero.

12. The non-contact probe signal loading device according to claim 11 , wherein the distance between the probe metal sheet and the underlying signal inputting metal sheet is in a range of 100 μm˜120 μm.

13. The non-contact probe signal loading device according to claim 1 , wherein the distance between the probe metal sheet and the underlying signal inputting metal sheet is in a range of 100 μm˜120 μm.

14. The non-contact probe signal loading device according to claim 1 , wherein the distance between the probe metal sheet and the underlying signal inputting metal sheet is in a range of 100 μm˜120 μm.

15. The non-contact probe signal loading device according to claim 1 , wherein a plurality of probe metal sheets are arranged in an array corresponding to a plurality of underlying signal inputting metal sheets.

16. The non-contact probe signal loading device according to claim 1 , wherein the non-contact probe signal loading device is applied to detect a TFT glass in a manufacturing process of TFT-LCD, and the signal inputting metal sheet is a signal inputting metal sheet on the TFT glass.

Assignees

• Boe Technology Group Co Ltd
• Hefei Boe Optoelectronics Tech

Inventors

• Xu Min
• Yu Jianyang
• Sun Weiwei
• Wei Zhen

Classifications

• H10P74/207

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• G02F2001/136254

  Physics · mapped topic

• H01L27/1214

  Electricity · mapped topic

• G01R31/265 Primary

  Contactless testing {(of circuits, also in wafer-form G01R31/302)} · CPC title

• H01L22/14

  Electricity · mapped topic