Method and apparatus for post exposure processing of photoresist wafers

Patent metadata

Field	Value
Publication number	US-10203604-B2
Application number	US-201614989488-A
Country	US
Kind code	B2
Filing date	Jan 6, 2016
Priority date	Nov 30, 2015
Publication date	Feb 12, 2019
Grant date	Feb 12, 2019

Abstract

Embodiments described herein relate to methods and apparatus for performing immersion field guided post exposure bake processes. Embodiments of apparatus described herein include a chamber body defining a processing volume. A pedestal may be disposed within the processing volume and a first electrode may be coupled to the pedestal. A moveable stem may extend through the chamber body opposite the pedestal and a second electrode may be coupled to the moveable stem. In certain embodiments, a fluid containment ring may be coupled to the pedestal and a dielectric containment ring may be coupled to the second electrode.

First claim

What is claimed is:

1. A substrate processing apparatus, comprising:
a chamber body defining a processing volume;
a pedestal disposed in the processing volume;
one or more fluid sources coupled to the processing volume through the pedestal;
a drain coupled to the processing volume through the pedestal;
a first electrode coupled to the pedestal;
a fluid containment ring coupled to the pedestal radially outward of the first electrode;
a moveable stem disposed opposite the pedestal and extending through the chamber body; and
a second electrode coupled to the stem.

2. The apparatus of claim 1 , wherein the one or more fluid sources comprise a process fluid source and a rinse fluid source.

3. The apparatus of claim 1 , wherein the fluid containment ring is formed from a ceramic material.

4. The apparatus of claim 1 , wherein the first electrode and the second electrode are formed from an electrically conductive metallic material.

5. The apparatus of claim 1 , wherein the first electrode is coupled to a vacuum source.

6. The apparatus of claim 1 , wherein the first electrode is coupled to one or more of a heat source, a power source, a temperature sensing apparatus, and a sensing apparatus.

7. The apparatus of claim 6 , wherein the second electrode is coupled to one or more of a heat source, a power source, a temperature sensing apparatus, and a sensing apparatus.

8. The apparatus of claim 1 , wherein a purge gas source is coupled to the processing volume through the stem and the second electrode.

9. A substrate processing apparatus, comprising:
a chamber body defining a processing volume;
a pedestal disposed in the processing volume;
a drain coupled to the processing volume through the pedestal;
a first electrode coupled to the pedestal;
a fluid containment ring coupled to the pedestal radially outward of the first electrode;
a moveable stem disposed opposite the pedestal and extending through the chamber body;
a second electrode coupled to the stem;
a dielectric containment ring coupled to the second electrode; and
one or more fluid sources coupled to the processing volume through the dielectric containment ring.

10. The apparatus of claim 9 , wherein the one or more fluid sources comprise a process fluid source and a rinse fluid source.

11. The apparatus of claim 9 , wherein the fluid containment ring is formed from a ceramic material.

12. The apparatus of claim 9 , wherein the first electrode and the second electrode are formed from an electrically conductive metallic material.

13. The apparatus of claim 9 , wherein the first electrode is coupled to a vacuum source.

14. The apparatus of claim 9 , wherein the first electrode is coupled to one or more of a heat source, a power source, a temperature sensing apparatus, and a sensing apparatus.

15. The apparatus of claim 14 , wherein the second electrode is coupled to one or more of a heat source, a power source, a temperature sensing apparatus, and a sensing apparatus.

16. The apparatus of claim 9 , wherein a purge gas source is coupled to the processing volume through the stem and the dielectric containment ring.

Assignees

• Applied Materials Inc

Inventors

• Babayan Viachslav
• Buchberger Jr Douglas A
• Liang Qiwei
• Godet Ludovic
• Nemani Srinivas D
• Woodruff Daniel J
• Harris Randy
• Moore Robert B

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• G03F7/40

  Treatment after imagewise removal, e.g. baking · CPC title

• G03F7/38

  Treatment before imagewise removal, e.g. prebaking {(G03F7/265 takes precedence)} · CPC title