Nanoscale scanning sensors
US-12169209-B2 · Dec 17, 2024 · US
Cantilever for a scanning type probe microscope
US10203354B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10203354-B2 |
| Application number | US-201715850430-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 21, 2017 |
| Priority date | Jul 3, 2015 |
| Publication date | Feb 12, 2019 |
| Grant date | Feb 12, 2019 |
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Abstract
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The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.
First claim
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What is claimed is: 1. A cantilever for a scanning type probe microscope comprising: a support portion; a lever portion extending from the support portion; a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle; and a probe in which a wire formed at a distal end of the protrusion portion is coated with a functional film, wherein a major axis width/minor axis width ratio of a shape of a cross section orthogonal to a longitudinal direction of the probe is smaller than a major axis width/minor axis width ratio of a shape of a cross section orthogonal to a longitudinal direction of the wire, wherein the longitudinal direction extends from the distal end of the protrusion portion to a distal end of the probe. 2. The cantilever according to claim 1 , wherein the major axis/minor axis ratio of the cross-sectional shape of the wire is over 3.0, and the major axis/minor axis ratio of the cross-sectional shape of the probe is equal to or less than 2.0. 3. The cantilever according to claim 1 , wherein the major axis/minor axis ratio of the cross-sectional shape of the wire is over 2.0, and the major axis/minor axis ratio of the cross-sectional shape of the probe is equal to or less than 1.5. 4. The cantilever according to claim 1 , wherein the wire is processed such that the major axis/minor axis ratio of the cross-sectional shape is over 2.0. 5. The cantilever according to claim 1 , wherein the functional film is a conductive film, a magnetic body film or a wear-resistant film. 6. The cantilever according to claim 1 , wherein the wire is carbon nanofiber or graphite nanofiber. 7. The cantilever according to claim 1 , wherein the apex angle of the protrusion portion is equal to or greater than 15 degrees. 8. A cantilever for a scanning type probe microscope, comprising: a support portion; a lever portion extending from the support portion; a protrusion portion made of silicon or silicon nitride and formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle; and a probe in which a wire formed at a distal end of the protrusion portion, made of carbon nanofiber or graphite nanofiber, is coated with a functional film which is any one of a conductive film, a magnetic body film and a wear resistance film, wherein an apex angle of the protrusion portion is over 15 degrees, a major axis width/minor axis width ratio of a shape of a cross section orthogonal to a longitudinal direction of the wire is over 3.0, and a major axis width/minor axis width ratio of a shape of a cross section orthogonal to a longitudinal direction of the probe is equal to or less than 2.0, wherein the longitudinal direction extends from the distal end of the protrusion portion to a distal end of the probe.
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- What does patent US10203354B2 cover?
- The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coa…
- Who is the assignee on this patent?
- National Univ Corporation Nagoya Institute Of Technology, Olympus Corp
- What technology area does this patent fall under?
- Primary CPC classification G01Q60/54. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 12 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).