Method for detecting mechanical and magnetic features with nanoscale resolution

Patent metadata

Field	Value
Publication number	US-11835547-B2
Application number	US-202217680340-A
Country	US
Kind code	B2
Filing date	Feb 25, 2022
Priority date	Nov 26, 2021
Publication date	Dec 5, 2023
Grant date	Dec 5, 2023

Abstract

The method for detecting mechanical and magnetic features comprises the steps of: aiming a probe of the sensor at a sample; defining several detected points for detection on the sample; detecting one of points and comprising the steps of: approaching the probe to the detected point from a predetermined height; contacting the probe with the detected point and applying a predetermined force on the detected point; making the probe far away from the detected point until to the predetermined height; shifting the probe to the next point for detection and repeating the detection; collecting the data of each of the detected points while the probe rapidly approaches to the points from the predetermined height; using a signal decomposition algorithm to transform the collected data to a plurality of data groups; and choosing a part of the data groups to be as data of feature distributions of the sample.

First claim

What is claimed is:

1. A method for detecting mechanical and magnetic features comprising the steps of:
(a) providing a sensor with a probe and aiming the probe at a sample;
(b) defining a plurality of points to be detected on the sample;
(c) detecting one of the plurality of points via the sensor for acquiring data of the point, and comprising the steps of:
(c1) approaching the probe to the point from a predetermined height, while collecting data on the probe's position and the forces it experiences;
(c2) contacting the probe with the point and applying a predetermined force on the point, while collecting data on the probe's position and the forces it experiences;
(c3) retracting the probe from the detected point until it reaches the predetermined height, while collecting data on the probe's position and the forces it experiences;
(c4) shifting the probe to the next point to be detected and repeating the step (c1) to the step (c3);
(d) collecting the data of each of the detected points while each of the points is in the step (c1), the step (c2) or the step (c3);
(e) using a signal decomposition algorithm to transform the collected data to a plurality of data groups; and
(f) choosing a part of the data groups to be as data of feature distributions of the sample.

2. The method for detecting mechanical and magnetic features according to claim 1 , wherein the step (d) is to collect the data acquired in the step (c1) of each of the detected points.

3. The method for detecting mechanical and magnetic features according to claim 1 , wherein the sensor is a magnetic force microscope, and one of the data groups corresponds to magnetic distributions of the sample ( 9 ).

4. The method for mechanical and magnetic features according to claim 1 , wherein the signal decomposition algorithm is principal components analysis algorithm.

5. The method for detecting mechanical and magnetic features according to claim 1 , wherein the data is a change of cantilever deflection of the probe ( 12 ) with respect to time.

6. The method for detecting mechanical and magnetic features according to claim 1 , wherein a range of the predetermined height is 50-250 nm.

7. The method for detecting mechanical and magnetic features according to claim 1 , wherein one more step between the step (e) and the step (f) is that of:
transforming the data groups into a plan view.

8. The method for detecting mechanical and magnetic features according to claim 1 , wherein the signal decomposition algorithm is selected by the group consisting of sparse coding algorithm, independent component analysis algorithm, and factor analysis algorithm.

Assignees

• Univ Nat Cheng Kung

Inventors

• Chen Yi-Chun
• Liou Yi-De
• Weng Yi-Hsin

Classifications

• G01Q30/06 Primary

  for error compensation · CPC title

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01Q60/38

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q30/04 Primary

  Display or data processing devices · CPC title

• G01Q60/08

  MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy · CPC title