Nanoscale scanning sensors

Patent metadata

Field	Value
Publication number	US-11815528-B2
Application number	US-202217675156-A
Country	US
Kind code	B2
Filing date	Feb 18, 2022
Priority date	Aug 22, 2012
Publication date	Nov 14, 2023
Grant date	Nov 14, 2023

Abstract

A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

First claim

What is claimed is:

1. A sensing probe formed of a diamond material, the sensing probe comprising:
one or more spin defects configured to emit fluorescent light; and
an optical outcoupling structure formed by the diamond material, the optical outcoupling structure formed of only one nanopillar and configured to optically guide the fluorescent light emitted by the one or more spin defects toward an output end of the optical outcoupling structure,
wherein the one or more spin defects are located no more than 50 nm from a sensing surface of the sensing probe; and
wherein the sensing probe including the optical outcoupling structure is formed of a diamond component having at least one linear dimension greater than 1 μm in length.

2. The sensing probe of claim 1 , wherein the one or more spin defects are located no more than 40 nm, 30 nm, 20 nm, 15 nm, 12 nm, or 10 nm from the sensing surface of the sensing probe.

3. The sensing probe of claim 1 , wherein the one or more spin defects are NV- (nitrogen-vacancy) defects.

4. The sensing probe of claim 1 , wherein a decoherence time of the one or more spin defects is greater than 10 μsec, 50 μsec, 100 μsec, 200 μsec, 300 μsec, 500 μsec, or 700 μsec.

5. The sensing probe of claim 1 , wherein the sensing probe including the optical component is formed of a single crystal diamond material.

6. The sensing probe of claim 1 , wherein the nanopillar has a diameter between 100 nm and 300 nm, and a length between 0.5 μm and 5 μm.

7. The sensing probe of claim 1 , wherein the sensing probe comprises no more than 50, 30, 10, 5, 3, 2, or 1 spin defects located no more than 50 nm from the sensing surface and optically coupled to the optical outcoupling structure.

8. The sensing probe of claim 1 , wherein the sensing probe comprises more than 50 spin defects in the form of a layer located no more than 50 nm from the sensing surface and optically coupled to the optical outcoupling structure.

9. A system comprising:
a sensing probe formed of a diamond material, the sensing probe comprising one or more spin defects configured to emit fluorescent light, and an optical outcoupling structure formed by the diamond material, the optical outcoupling structure formed of only one nanopillar and configured to optically guide the fluorescent light emitted by the one or more spin defects toward an output end of the optical outcoupling structure,
wherein the one or more spin defects are located no more than 50 nm from a sensing surface of the sensing probe, and wherein the sensing probe including the optical outcoupling structure is formed of a diamond component having at least one linear dimension greater than 1 μm in length;
an optical excitation source configured to generate excitation light directed to the one or more spin defects causing the one or more spin defects to fluoresce;
an optical detector configured to detect the fluorescent light that is emitted from the one or more spin defect and that exits through the output end of the optical outcoupling structure after being optically guided therethrough; and
a mounting system configured to hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface of the sensing probe and the sample surface.

10. The system of claim 9 , wherein the mounting system comprises an AFM (atomic force microscope).

11. The system of claim 9 , comprising an optical microscope coupled to the mounting system and configured to optically address and readout the one or more spin defects.

12. The system of claim 9 , further comprising a microwave source, and wherein the microwave source is configured to generate microwaves tuned to a resonant frequency of at least one of the spin defects.

13. The system of claim 12 , wherein the one or more spin defects are NV defects, and
Wherein the system is configured to detect an external magnetic field by measuring a Zeeman shift of a spin state of the NV defects.

14. The system of claim 13 , wherein the microwaves comprise a spin-decoupling sequence of pulses, and wherein the sequence includes at least one of:
a Hahn spin-echo pulse sequence;
a CPMG (Carr Purcell Meiboom Gill) pulse sequence;
an XY pulse sequence; and
a MREVB pulse sequence.

15. The system of claim 9 , wherein the system is configured to have an AC magnetic field detection sensitivity better than 200, 100, 75, 60, 50, 25, 10, or 5 nT Hz-1/2.

16. The system of claim 9 , wherein the system is configured to have a DC magnetic field detection sensitivity better than 50, 20, 10, 6, 4, 1, or 0.5 μT Hz-1/2.

17. The system of claim 9 , wherein the system is configured to resolve single spin defects in a sample.

18. The system of claim 9 , wherein required integration time for single spin imaging with a signal to noise ratio of 2 is less than 5 mins, 3 mins, 2 mins, 1 min, 30 seconds, 15 seconds, 10 seconds, 5 seconds, 2 seconds, 1 second, or 0.5 second.

Assignees

• Harvard College

Inventors

• Grinolds Michael S
• Hong Sungkun
• Maletinsky Patrick
• Yacoby Amir

Classifications

• G01Q70/14 Primary

  Particular materials · CPC title

• G01N21/645

  Specially adapted constructive features of fluorimeters · CPC title

• G01N24/10

  by using electron paramagnetic resonance (G01N24/12 takes precedence) · CPC title

• G01Q60/38

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q60/54

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title