Adhesive resins for wafer bonding

Patent metadata

Field	Value
Publication number	US-10174229-B2
Application number	US-201715817843-A
Country	US
Kind code	B2
Filing date	Nov 20, 2017
Priority date	Nov 7, 2014
Publication date	Jan 8, 2019
Grant date	Jan 8, 2019

Abstract

An adhesive bonding method that includes bonding a handling wafer to a front side surface of a device wafer with an adhesive comprising N-substituted maleimide copolymers. The device wafer may then be thinned from the backside surface of the device wafer while the device wafer is adhesively engaged to the handling wafer. The adhesive can then be removed by laser debonding, wherein the device wafer is separated from the handling wafer.

First claim

What is claimed is:

1. A wafer bonding adhesive comprising a maleimide copolymer that is thermally stable at temperatures greater than 300° C., the maleimide copolymer including at least one functional group selected from the group consisting of: aryl group, alkyl group and combinations thereof resulting in the maleimide copolymer having a glass transition temperature within a range of 50° C. to 225° C.

2. The wafer bonding adhesive of claim 1 , wherein the maleimide copolymer is an N-substituted maleimide copolymer.

3. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer is a vinyl ether/maleimide copolymer.

4. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(dodecyl vinyl ether-co-phenylmaleimide).

5. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(styrene-co-N-phenylmaleimide).

6. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(styrene-co-N-phenylmaleimide-co-maleic anhydride).

7. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(norbornene-co-N-phenylmaleimide).

8. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(styrene-co-N-hexylmaleimide-co-maleic anhydride).

9. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(methyl vinyl ether-co-N-butylmaleimide-co-maleic anhydride).

10. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(butyl vinyl ether-co-N-phenylmaleimide).

11. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(butyl vinyl ether-co-N-methylmaleimide).

12. The wafer bonding adhesive of claim 2 , wherein the N-substituted maleimide copolymer comprises poly(butyl vinyl ether-co-N-ethylmaleimide).

13. The wafer bonding adhesive of claim 1 , wherein the maleimide copolymer is selected from the group consisting of: styrene-N-alkylmaleimide copolymer, styrene-N-arylmaleimide copolymer, vinyl ether-N-alkylmaleimide copolymer, vinyl ether-N-arylmaleimide copolymer, and combinations thereof.

14. The wafer bonding adhesive of claim 13 , wherein the vinyl ether monomer is selected from alkyl vinyl ethers and aryl vinyl ethers.

15. The wafer bonding adhesive of claim 1 , wherein the aryl group is selected from the group consisting of: phenyl (C 6 H 5 ), naphthyl (C 10 H 8 ), thienyl (C 4 H 4 S), indolyl and combinations thereof.

16. The wafer bonding adhesive of claim 1 , wherein the alkyl group is selected from the group consisting of: methyl (CH 3 ), ethyl (C 2 H 5 ), propyl (C 3 H 7 ), butyl (C 4 H 9 ), pentyl (C 5 H 11 ), hexyl (C 6 H 13 ), octyl (C 8 H 17 ), decyl (C 10 H 21 ), dodecyl (C 12 H 25 ), cyclopropyl, cyclohexyl and combinations thereof.

Assignees

• IBM

Inventors

• Allen Robert D
• Gelorme Jeffrey
• Hung Li-Wen
• Sooriyakumaran Ratnam
• Sundberg Linda K

Classifications

• H10P72/7448

  the bond interface between the auxiliary support and the wafer comprising two or more, e.g. multilayer adhesive or adhesive and release layer · CPC title

• C09J125/08

  Copolymers of styrene (C09J129/08, C09J135/06, C09J155/02 take precedence) · CPC title

• C08F212/08

  Styrene · CPC title

• Y02P20/582

  Recycling of unreacted starting or intermediate materials · CPC title

• C09J133/06

  of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical · CPC title