Switchable filters and design structures
US-9935600-B2 · Apr 3, 2018 · US
Switchable filters and design structures
US10164596B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10164596-B2 |
| Application number | US-201715691249-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 30, 2017 |
| Priority date | Feb 21, 2012 |
| Publication date | Dec 25, 2018 |
| Grant date | Dec 25, 2018 |
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- Title
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Abstract
Official abstract text for this publication.
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
First claim
Opening claim text (preview).
What is claimed: 1. A method comprising: determining a frequency of a filter or need to have the filter activated; and turning on one or more filters by actuating a MEMS beam by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes, in response to the determining, wherein the filter is a BAW filter. 2. The method of claim 1 , wherein the MEMS beam is one of a cantilever beam and a bridge beam. 3. The method of claim 1 , wherein the MEMS beam is positioned over the interleaved electrodes formed on an underlying insulator layer.
Assignees
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Classifications
for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) · CPC title
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using MEMS techniques · CPC title
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of bulk acoustic wave devices · CPC title
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- What does patent US10164596B2 cover?
- Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEM…
- Who is the assignee on this patent?
- IBM, Smartsens Tech Cayman Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H03H3/007. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 25 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 10 related publications on this page (citations in our corpus or others sharing the same primary CPC).