Self-forming barrier process

Patent metadata

Field	Value
Publication number	US-10163695-B1
Application number	US-201715635117-A
Country	US
Kind code	B1
Filing date	Jun 27, 2017
Priority date	Jun 27, 2017
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

A method is provided, including the following operations: performing a deposition process on a substrate, the deposition process configured to deposit a copper layer in a feature on the substrate, the copper layer being doped with zinc at an atomic percentage less than approximately 30 percent; after depositing the copper layer, annealing the substrate, wherein the annealing is configured to cause migration of the zinc to an interface of the copper layer and an oxide layer of the substrate, the migration of the zinc producing an adhesive barrier at the interface that inhibits electromigration of the copper layer.

First claim

What is claimed is:

1. A method, comprising:
performing a deposition process on a substrate, the deposition process configured to deposit a copper layer in a feature on the substrate, the copper layer being doped with zinc at an atomic percentage less than approximately 30 percent;
after depositing the copper layer, annealing the substrate, wherein the annealing is configured to cause migration of the zinc to an interface at an oxide layer of the substrate, the migration of the zinc producing an adhesive barrier at the interface that inhibits electromigration of the copper layer.

2. The method of claim 1 , wherein the feature does not include a barrier layer prior to the deposition of the copper layer.

3. The method of claim 1 , wherein the annealing of the substrate causes bonding of the zinc to oxygen at the interface to form the barrier.

4. The method of claim 1 , wherein the annealing of the substrate is performed at a temperature less than approximately 350 degrees Celsius.

5. The method of claim 1 , wherein the deposition process is defined by an electroless deposition process configured to co-deposit copper and zinc.

6. The method of claim 1 , wherein the feature is a via, and wherein the method defines a pre-fill operation configured to partially fill the via with the copper layer.

7. The method of claim 6 , wherein the interface is defined along a sidewall of the via.

8. A method, comprising:
performing a deposition process on a substrate, the deposition process configured to deposit a metallic layer in a feature on the substrate, the metallic layer consisting of one or more of copper, cobalt, or nickel, and wherein the metal layer is doped with zinc at an atomic percentage less than approximately 5 percent;
after depositing the metallic layer, annealing the substrate, wherein the annealing is configured to cause migration of the zinc to an interface of the metallic layer and an oxide layer of the substrate, the migration of the zinc producing a barrier at the interface that inhibits electromigration of the metallic layer.

9. The method of claim 8 , wherein the feature does not include a barrier layer prior to the deposition of the metallic layer.

10. The method of claim 8 , wherein the annealing of the substrate causes bonding of the zinc to oxygen at the interface to form the barrier.

11. The method of claim 8 , wherein the annealing of the substrate is performed at a temperature less than approximately 350 degrees Celsius.

12. The method of claim 8 , wherein the deposition process is defined by an electroless deposition process.

13. The method of claim 8 , wherein the feature is a via, and wherein the method defines a pre-fill operation configured to partially fill the via with the metallic layer.

14. The method of claim 13 , wherein the interface of the metallic layer and the oxide layer is defined along a sidewall of the via.

15. A method, comprising:
performing a first deposition process on a substrate, the first deposition process configured to deposit a copper layer in a feature on the substrate;
performing a second deposition process on the substrate, the second deposition process configured to deposit a conformal layer of zinc over the copper layer;
annealing the substrate, wherein the annealing is configured to cause migration of the zinc to an interface at an oxide layer of the substrate, the migration of the zinc producing a barrier at the interface that inhibits electromigration of the copper layer.

16. The method of claim 15 , wherein the feature does not include a barrier layer prior to the deposition of the copper layer.

17. The method of claim 15 , wherein the annealing of the substrate causes bonding of the zinc to oxygen at the interface to form the barrier.

18. The method of claim 15 , wherein the annealing of the substrate is performed at a temperature less than approximately 350 degrees Celsius.

19. The method of claim 15 , wherein the first deposition process is defined by an electroless deposition process configured to deposit copper.

20. The method of claim 15 , wherein the feature is a via, and wherein the method defines a pre-fill operation configured to partially fill the via with the copper layer.

21. The method of claim 20 , wherein the interface is defined along a sidewall of the via.

22. The method of claim 1 , wherein the interface is an interface of the copper layer and the oxide layer of the substrate.

23. The method of claim 1 ,
wherein the feature includes a ruthenium layer prior to the deposition of the copper layer, and wherein the interface is an interface of the ruthenium layer and the oxide layer of the substrate.

Assignees

• Lam Res Corp

Inventors

• Joi Aniruddha
• Dordi Yezdi

Classifications

• C23C18/50 Primary

  with alloys based on iron, cobalt or nickel · CPC title

• H10W20/4437

  the principal metal being a transition metal · CPC title

• H10W20/0552

  by diffusing metallic dopants to react with dielectrics · CPC title

• C23C18/54

  Contact plating, i.e. electroless electrochemical plating · CPC title

• C25D5/50

  by heat-treatment · CPC title