Thermal spray material, thermal spray coating and thermal spray coated article
US-2016326059-A1 · Nov 10, 2016 · US
Thermal spray material, thermal spray coating and thermal spray coated article
US10138167B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10138167-B2 |
| Application number | US-201615142181-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 29, 2016 |
| Priority date | May 8, 2015 |
| Publication date | Nov 27, 2018 |
| Grant date | Nov 27, 2018 |
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- Title
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Abstract
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This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.
First claim
Opening claim text (preview).
What is claimed is: 1. A thermal sprayed article comprising: a substrate; and a thermal spray coating deposited on a surface of the substrate by thermal spraying of the thermal spray material, the thermal spray material comprising a yttrium oxyfluoride comprising a yttrium (Y), oxygen (O) and a fluorine (F) as its elemental constituents, the yttrium oxyfluoride having a molar ratio (F/Y) of the fluorine to the yttrium of 1.1 or greater, wherein the thermal spray coating comprises a Y 6 O 5 F 8 phase. 2. A thermal sprayed article comprising: a substrate; and a thermal spray coating deposited on a surface of the substrate, the thermal spray coating comprising: a yttrium oxyfluoride comprising a yttrium (Y), oxygen (O) and a fluorine (F) as its elemental constituents, the yttrium oxyfluoride having a fluorine to yttrium molar ratio (F/Y) of 1.1 or greater, wherein the thermal spray coating comprises a Y 6 O 5 F 8 phase. 3. The thermal sprayed article of claim 2 , wherein the thermal spray coating is essentially free of yttrium oxide. 4. The thermal sprayed article of claim 2 , wherein the thermal spray coating comprises a first phase and a second phase, the first phase comprises a YOF phase, and the second phase comprises the Y 6 O 5 F 8 phase. 5. The thermal sprayed article of claim 3 , wherein the thermal spray coating has a Vickers hardness of 291 to 391. 6. The thermal sprayed article of claim 3 , wherein the thermal spray coating has a porosity of 11.4% to 11.7%.
Assignees
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Classifications
Fluorides · CPC title
Plasma spraying · CPC title
by d-values or two theta-values, e.g. as X-ray diagram · CPC title
characterised by the coating material · CPC title
Flame spraying · CPC title
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- What does patent US10138167B2 cover?
- This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element ox…
- Who is the assignee on this patent?
- Tokyo Electron Ltd, Fujimi Inc
- What technology area does this patent fall under?
- Primary CPC classification C04B35/505. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Nov 27 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).