Method for measuring vibration characteristic of cantilever

Patent metadata

Field	Value
Publication number	US-9354248-B2
Application number	US-201514673372-A
Country	US
Kind code	B2
Filing date	Mar 30, 2015
Priority date	Mar 31, 2014
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.

First claim

What is claimed is:

1. A method for measuring vibration characteristic of a cantilever, the method comprising:
measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever;
obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and
calculating a Q value by using the following Expression (1):
Q value= f 1× Th.   (1)

2. The method according to claim 1 ,
wherein the stationary amplitude V0 corresponds to a vibration amplitude when a vibration amplitude after a time of TA (second) from applying the vibration with the resonant frequency f1 (Hz) to the cantilever is set to be VA and a vibration amplitude at a time of TA/2 (second) becomes 0.95×VA.

3. The method according to claim 1 ,
wherein when a Q-curve representing a vibration amplitude of the cantilever is measured by sweeping a frequency to be applied to the cantilever, if an absolute value of a difference between a sweep starting frequency and a sweep ending frequency is set to be Fsw (Hz) and a measurement time at this time in the Q-curve is set to be a sweep time Tsw (second), the Q-curve is measured by using the sweep time Tsw (second) which is calculated by the following Expression (2):
Tsw=A×Fsw ×( Q/f 1) 2   (2)

wherein, A is a positive constant.

4. A non-transitory computer-readable storage medium storing instructions to control a scanning probe microscope comprising a cantilever having a probe at a tip end, a cantilever vibrating unit that applies vibration to the cantilever, a displacement detection device that detects an amount of displacement of the cantilever and measures a vibration amplitude V of the cantilever and a control unit that controls the cantilever vibrating unit, the instructions causing the scanning probe microscope to perform:
measurement processing for measuring vibration amplitude V of the cantilever by the displacement detection device when a vibration with a resonant frequency f1 (Hz) is applied to the cantilever by the cantilever vibrating unit;
obtaining processing for obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0 by the control unit; and
calculation processing for calculating a Q value by the control unit by using the following Expression (1):
Q value= f 1× Th.   (1)

5. A scanning probe microscope comprising:
a cantilever having a probe at a tip end;
a cantilever vibrating unit configured to apply vibration to the cantilever;
a displacement detection device configured to detect an amount of displacement of the cantilever and to measure a vibration amplitude V of the cantilever; and
a control unit configured to control the cantilever vibrating unit,
wherein the displacement detection device measures the vibration amplitude V of the cantilever when a vibration with a resonant frequency f1 (Hz) is applied to the cantilever by the cantilever vibrating unit,
wherein the control unit obtains a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0, and
wherein the control unit calculates a Q value by the control unit by using the following Expression (1):
Q value= f 1 ×Th.   (1)

Assignees

• Hitachi High Tech Science Corp

Inventors

• Shigeno Masatsugu
• Shikakura Yoshiteru

Classifications

• G01Q10/00 Primary

  Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe · CPC title

• G01H1/00

  Measuring {characteristics of} vibrations in solids by using direct conduction to the detector (G01H9/00, G01H11/00 take precedence) · CPC title

• G01Q40/00 Primary

  Calibration, e.g. of probes · CPC title