Thermal spray material, thermal spray coating and thermal spray coated article

Patent metadata

Field	Value
Publication number	US-10106466-B2
Application number	US-201615142204-A
Country	US
Kind code	B2
Filing date	Apr 29, 2016
Priority date	May 8, 2015
Publication date	Oct 23, 2018
Grant date	Oct 23, 2018

Abstract

This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material has an X-ray diffraction pattern that shows a main peak intensity I A corresponding to the rare earth element oxyhalide, a main peak intensity I B corresponding to a rare earth element oxide and a main peak intensity I C corresponding to a rare earth element halide, satisfying a relationship [(I B +I C )/I A ]<0.02.

First claim

What is claimed is:

1. A thermal sprayed article comprising:
a substrate; and
a thermal spray coating deposited on a surface of the substrate by thermal spraying of a thermal spray material, the thermal spray material comprising a yttrium oxyfluoride comprising a yttrium (Y), oxygen (O) and a fluorine (F) as its elemental constituents, wherein the thermal spray material has an X-ray diffraction pattern that shows a main peak intensity I A corresponding to the yttrium oxyfluoride, a main peak intensity I B corresponding to a yttrium oxide and a main peak intensity I C corresponding to a yttrium fluoride at a ratio of sum of the intensities I B and I C to the intensity I A , [(I B +I C )/I A ], of less than 0.02, and
wherein the thermal spray coating comprises a Y 6 O 5 F 8 phase.

2. A thermal sprayed article comprising:
a substrate; and
a thermal spray coating deposited on a surface of the substrate, the thermal spray coating comprising
a yttrium oxyfluoride, as its primary component, comprising a yttrium (Y), oxygen (O) and a fluorine (F) as its elemental constituents and a Y 6 O 5 F 8 phase, and
having an X-ray diffraction pattern that shows a main peak intensity I CA corresponding to the yttrium oxyfluoride, a main peak intensity I CB corresponding to a yttrium oxide and a main peak intensity I CC corresponding to a yttrium fluoride at a ratio of sum of the intensities I CB and I CC to the intensity I CA , [(I CB +I CC )/I CA ], of 0.45 or less.

3. The thermal sprayed article of claim 2 , wherein the thermal spray coating lacks a detectable X-ray diffraction peak corresponding to a yttrium oxide.

4. The thermal sprayed article of claim 2 , wherein the thermal spray coating further comprises a YOF phase.

5. The thermal sprayed article of claim 2 , wherein the thermal spray coating consisting essentially of yttrium oxyfluoride.

6. The thermal sprayed article of claim 2 , wherein the thermal spray coating has a Vickers hardness of 291 to 391.

7. The thermal sprayed article of claim 2 , wherein the thermal spray coating has a porosity of 11.4% to 13.7%.

8. The thermal sprayed article of claim 2 , wherein the thermal spray coating has a porosity of 11.4% to 12.4%.

Assignees

• Tokyo Electron Ltd
• Fujimi Inc

Inventors

• Nagayama Nobuyuki
• Ibe Hiroyuki
• Tsuzuki Kazuyuki

Classifications

• C01F17/265

  Fluorides · CPC title

• C04B35/62665

  Flame, plasma or melting treatment · CPC title

• C04B2235/80

  Phases present in the sintered or melt-cast ceramic products other than the main phase · CPC title

• C23C4/04

  characterised by the coating material · CPC title

• C04B35/505 Primary

  based on yttrium oxide · CPC title