Active clamp protection circuit for power semiconductor device for high frequency switching
US-9013848-B2 · Apr 21, 2015 · US
US10103140B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10103140-B2 |
| Application number | US-201615294518-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 14, 2016 |
| Priority date | Oct 14, 2016 |
| Publication date | Oct 16, 2018 |
| Grant date | Oct 16, 2018 |
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A switch circuit includes a first MOS transistor and a second MOS transistor of a same conductivity type connected in parallel between a first terminal and a second terminal of the switch circuit, the first and second MOS transistors having respective gate terminals coupled to the control terminal to receive a control signal to turn the first and second MOS transistors on or off. The first MOS transistor is characterized by a first reverse gate-to-drain capacitance (C rss ) and the second MOS transistor is characterized by a second C rss that is greater than the first C rss .
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What is claimed is: 1. A switch circuit having a first terminal, a second terminal and a control terminal, the switch circuit comprising: a first MOS transistor and a second MOS transistor of a same conductivity type connected in parallel between the first terminal and the second terminal, the first and second MOS transistors having respective gate terminals coupled to the control terminal to receive a control signal to turn the first and second MOS transistors on or off, wherein the first and second transistors are formed in a common active device area of a common semiconductor substrate, wherein the first MOS transistor is characterized by a first reverse gate-to-drain capacitance (C rss ) and the second MOS transistor is characterized by a second Crss that is greater than the first C rss and wherein the first MOS transistor has a first transistor area and the second MOS transistor has a second transistor area, the second transistor area being a fraction of the first transistor area. 2. The switch circuit of claim 1 , wherein a transistor area of the second MOS transistor is between 0.1% and 15% of a total area of the common active device area. 3. The switch circuit of claim 1 , wherein each of the first MOS transistor and the second MOS transistor comprises one or more trench transistors, each of the one or more trench transistors having a gate terminal formed in a trench in a semiconductor layer on the common semiconductor substrate, a body region formed in the semiconductor layer and a source region formed proximate the trench. 4. The circuit of claim 3 , wherein for each trench transistor of the one or more trench transistors of the second MOS transistor includes a trench and gate terminal formed to a greater depth in the semiconductor layer than for the one or more trench transistors of the first MOS transistor. 5. The circuit of claim 3 , wherein trenches for each trench transistor of the one or more trench transistors of the first and second MOS transistors are formed to a common depth and a depth of the body region formed in the semiconductor layer is greater for the first MOS transistor than for the second MOS transistor. 6. The circuit of claim 1 , wherein the first MOS transistor is a first NMOS transistor and the second MOS transistor is a second NMOS transistor. 7. The switch circuit of claim 6 , wherein each of the first NMOS transistor and the second NMOS transistor comprises one or more trench transistors, each of the one or more trench transistors having a gate terminal formed in a trench in an N-type semiconductor layer on the common N-type semiconductor substrate, a P-type body region formed in the semiconductor layer and an N-type source region formed proximate the trench. 8. The switch circuit of claim 6 , wherein the switch circuit is a high-side switch of a buck converter. 9. The switch circuit of claim 8 , wherein the buck converter includes a low-side switch having an input terminal, a output terminal, and a low-side control terminal, wherein the second terminal is connected to the input terminal.
for Group V materials or Group III-V materials · CPC title
Chemical etching · CPC title
the output circuit comprising more than one controlled field-effect transistor · CPC title
in field-effect transistor switches · CPC title
including plural semiconductor devices as final control devices for a single load · CPC title
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