Polishing apparatus including pad contact member with baffle in liquid flow path therein

Patent metadata

Field	Value
Publication number	US-10099340-B2
Application number	US-201615297307-A
Country	US
Kind code	B2
Filing date	Oct 19, 2016
Priority date	Oct 20, 2015
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

Disclosed is a polishing apparatus that polishes a substrate by causing the substrate to be in slide contact with a polishing pad. The polishing apparatus includes a pad temperature control mechanism configured to control a surface temperature of the polishing pad, which includes a pad contact member that comes in contact with the surface of the polishing pad and a liquid supply system configured to supply a temperature-controlled liquid to the pad contact member. The pad contact member includes a liquid flow path therein, and the liquid flow path communicates with a liquid inlet and a liquid outlet connected to the liquid supply system. At least one planar baffle is disposed in the liquid flow path, and the baffle has a space therein.

First claim

What is claimed is:

1. A polishing apparatus that polishes a substrate, the polishing apparatus comprising:
a polishing table configured to support a polishing pad that polishes the substrate by a sliding contact with the substrate;
a top ring configured to press the substrate against the polishing pad on the polishing table; and
a pad temperature control mechanism configured to control a surface temperature of the polishing pad,
wherein the pad temperature control mechanism includes a pad contact member that comes in contact with the surface of the polishing pad and a liquid supply system configured to supply a temperature-controlled liquid to the pad contact member,
the pad contact member includes a liquid flow path therein communicating with a liquid inlet and a liquid outlet connected to the liquid supply system,
at least one baffle is disposed in the liquid flow path, and
the baffle is formed by two plates arranged to be substantially parallel with each other with a space therebetween, the space being different from the liquid flow path.

2. The polishing apparatus of claim 1 , wherein the space communicates with a surrounding atmosphere of the pad contact member.

3. The polishing apparatus of claim 1 , wherein the space is a closed space.

4. The polishing apparatus of claim 3 , wherein a gas is enclosed in the closed space.

5. The polishing apparatus of claim 1 , wherein a plurality of baffles are arranged in the liquid flow path in parallel with each other.

6. The polishing apparatus of claim 1 , wherein a plurality of baffles are alternately staggered from each other in the liquid flow path, and the liquid flow path is formed in a zigzag flow path by the plurality of baffles.

7. The polishing apparatus of claim 1 , wherein the pad contact member includes two or more liquid flow path, liquids flowing in the two or more liquid flow paths are controlled to have different temperatures, respectively, and the at least one baffle is disposed to separate the two or more liquid flow paths.

8. The polishing apparatus of claim 1 , wherein the pad contact member includes a member configured to suppress heat dissipation caused by radiation from an outer surface of the pad contact member.

9. The polishing apparatus of claim 1 , wherein the pad temperature control mechanism further includes a lifting mechanism configured to move the pad contact member up and down, and a moving mechanism configured to move the pad contact member between a predetermined raised position above the polishing pad and a predetermined retracted position radially outside the polishing table.

10. The polishing apparatus of claim 1 , wherein the baffle is configured to extend in a radial direction of the polishing table, and the liquid within the liquid flow path alternately advances toward a center of the polishing table and toward an outer circumference of the polishing table.

11. The polishing apparatus of claim 1 , wherein both the liquid inlet and the liquid outlet are positioned above an outer circumference of the polishing pad.

12. The polishing apparatus of claim 11 , wherein the liquid inlet is positioned at a downstream side of the liquid outlet in relation to a rotating direction of the polishing table.

13. The polishing apparatus of claim 1 , wherein a width of the pad contact member is gradually reduced toward a center of the polishing table.

14. A polishing apparatus that polishes a substrate by causing the substrate to be in slide contact with a polishing pad, the polishing apparatus comprising:
a polishing table configured to support the polishing pad;
a top ring configured to press the substrate against the polishing pad on the polishing table; and
a pad temperature control mechanism configured to control a surface temperature of the polishing pad,
wherein the pad temperature control mechanism includes a pad contact member that comes in contact with the surface of the polishing pad and a liquid supply system configured to supply a temperature-controlled liquid to the pad contact member,
the pad contact member includes a liquid flow path therein,
the liquid flow path communicates with a liquid inlet and a liquid outlet connected to the liquid supply system,
at least one baffle is disposed in the liquid flow path,
the baffle has a space therein,
the space is a closed space, and
the closed space is a vacuum.

Assignees

• Ebara Corp

Inventors

• Motoshima Yasuyuki

Classifications

• B24B55/02

  Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant (cooling or lubricating during dressing operation B24B53/095; incorporated in grinding wheels B24D) · CPC title

• B24B49/14

  taking regard of the temperature during grinding · CPC title

• B24B37/015 Primary

  Temperature control · CPC title

• B24B37/107

  in a rotary movement only, about an axis being stationary during lapping · CPC title

• B24B37/20

  Lapping pads for working plane surfaces · CPC title