Reducing temperature transition in a substrate support

Patent metadata

Field	Value
Publication number	US-10096506-B2
Application number	US-201815897669-A
Country	US
Kind code	B2
Filing date	Feb 15, 2018
Priority date	Jun 22, 2015
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

A temperature controller for a substrate processing system includes an interface configured to receive a processing temperature corresponding to a desired processing temperature of a substrate. The temperature controller includes a thermal control element controller configured to selectively control a thermal control element to adjust a temperature of a substrate support. The thermal control element controller is further configured to, prior to the substrate being loaded onto the substrate support, determine at least one of a temperature of the substrate support and a temperature of the substrate and, based on the processing temperature and the at least one of the temperature of the substrate support and the temperature of the substrate, control the thermal control element to adjust the temperature of the substrate support to a setpoint temperature that is different than the processing temperature.

First claim

What is claimed is:

1. A temperature controller for a substrate processing system, the temperature controller comprising:
an interface configured to receive a processing temperature, wherein the processing temperature corresponds to a desired processing temperature of a substrate; and
a thermal control element (TCE) controller configured to selectively control a TCE to adjust a temperature of a substrate support, the TCE controller further configured to, prior to the substrate being loaded onto the substrate support,
determine at least one of a temperature of the substrate support and a temperature of the substrate, and
based on (i) the processing temperature and (ii) the at least one of the temperature of the substrate support and the temperature of the substrate, control the TCE to adjust the temperature of the substrate support to a setpoint temperature that is different than the processing temperature.

2. The temperature controller of claim 1 , wherein, to control the TCE to adjust the temperature of the substrate support, the TCE controller is further configured to (i) determine whether the processing temperature and the temperature of the substrate are different and (ii) control the TCE based on the determination of whether the processing temperature and the temperature of the substrate are different.

3. The temperature controller of claim 1 , wherein, to control the TCE to adjust the temperature of the substrate support, the TCE controller is further configured to (i) determine a difference between the processing temperature and the temperature of the substrate and (ii) control the TCE based on the difference between the processing temperature and the temperature of the substrate.

4. The temperature controller of claim 3 , wherein the TCE controller is further configured to (i) determine, based on the difference, an amount of heat energy that will cause the temperature of the substrate to reach the processing temperature and (ii) control the TCE based on the amount of heat energy.

5. The temperature controller of claim 4 , wherein the TCE controller is further configured to determine the amount of heat energy further based on a heat capacity constant of the substrate.

6. The temperature controller of claim 1 , wherein the TCE controller is configured to control the TCE to adjust the temperature of the substrate support to the setpoint temperature that is different than the processing temperature for a predetermined period prior to loading the substrate onto the substrate support.

7. The temperature controller of claim 1 , wherein, to control the TCE to adjust the temperature of the substrate support, the TCE controller is further configured to (i) determine whether the processing temperature and the temperature of the substrate support are different and (ii) control the TCE based on the determination of whether the processing temperature and the temperature of the substrate support are different.

8. The temperature controller of claim 1 , wherein, to control the TCE to adjust the temperature of the substrate support, the TCE controller is further configured to (i) determine a difference between the processing temperature and the temperature of the substrate and (ii) control the TCE based on the difference between the processing temperature and the temperature of the substrate support.

9. The temperature controller of claim 1 , wherein the TCE controller is further configured to calculate a temperature disturbance caused by loading the substrate onto the substrate support.

10. The temperature controller of claim 9 , wherein the TCE controller is further configured to recalculate the temperature disturbance subsequent to loading the substrate onto the substrate support.

11. A method of controlling a substrate support in a substrate processing system, the method comprising:
receiving a processing temperature, wherein the processing temperature corresponds to a desired processing temperature of a substrate; and
prior to a substrate being loaded onto the substrate support,
determining at least one of a temperature of the substrate support and a temperature of the substrate, and
based on (i) the processing temperature and (ii) the at least one of the temperature of the substrate support and the temperature of the substrate, controlling a thermal control element (TCE) to adjust the temperature of the substrate support to a setpoint temperature that is different than the processing temperature.

12. The method of claim 11 , wherein controlling the TCE to adjust the temperature of the substrate support includes (i) determining whether the processing temperature and the temperature of the substrate are different and (ii) controlling the TCE based on the determination of whether the processing temperature and the temperature of the substrate are different.

13. The method of claim 11 , wherein controlling the TCE to adjust the temperature of the substrate support includes (i) determining a difference between the processing temperature and the temperature of the substrate and (ii) controlling the TCE based on the difference between the processing temperature and the temperature of the substrate.

14. The method of claim 13 , further comprising (i) determining, based on the difference, an amount of heat energy that will cause the temperature of the substrate to reach the processing temperature and (ii) controlling the TCE based on the amount of heat energy.

15. The method of claim 14 , further comprising determining the amount of heat energy further based on a heat capacity constant of the substrate.

16. The method of claim 11 , further comprising controlling the TCE to adjust the temperature of the substrate support to the setpoint temperature that is different than the processing temperature for a predetermined period prior to loading the substrate onto the substrate support.

17. The method of claim 11 , wherein controlling the TCE to adjust the temperature of the substrate support includes (i) determining whether the processing temperature and the temperature of the substrate support are different and (ii) controlling the TCE based on the determination of whether the processing temperature and the temperature of the substrate support are different.

18. The method of claim 11 , wherein controlling the TCE to adjust the temperature of the substrate support includes (i) determining a difference between the processing temperature and the temperature of the substrate and (ii) controlling the TCE based on the difference between the processing temperature and the temperature of the substrate support.

19. The method of claim 11 , further comprising calculating a temperature disturbance caused by loading the substrate onto the substrate support.

20. The method of claim 19 , further comprising recalculating the temperature disturbance subsequent to loading the substrate onto the substrate support.

Assignees

• Lam Res Corp

Inventors

• Zhang Tao
• Waldmann Ole
• Pape Eric A

Classifications

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• G05D23/1931

  to control the temperature of one space · CPC title