Small wafer area mems switch
US-2017341930-A1 · Nov 30, 2017 · US
US10077185B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10077185-B2 |
| Application number | US-201514676089-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 1, 2015 |
| Priority date | Apr 3, 2014 |
| Publication date | Sep 18, 2018 |
| Grant date | Sep 18, 2018 |
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A method for manufacturing a micro normally-closed structure. The method includes steps of providing a flexible arm, and a stationary base and a fixed contact separated from the flexible arm, wherein the flexible arm is free to move and includes a first end configured at one terminal and a movable contact configured at another terminal, the transient base is configured at where corresponds to the first end, and the fixed contact is configured at where corresponds to the movable contact; forming a temporary electrical connection between the first end and the stationary base; forming a temporary electrical conduction between the movable contact and the fixed contact; maintaining the temporary electrical connection and the temporary electrical conduction; and securing the first end to the stationary base permanently which causes the temporary electrical connection turn into a permanent electrical connection and the temporary electrical conduction turn into the micro normally-closed structure.
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What is claimed is: 1. A method for manufacturing a micro normally-closed structure, comprising: providing a flexible arm, and a transient base and a fixed contact separated from the flexible arm, wherein the flexible arm is free to move and includes a first end configured at one terminal and a movable contact configured at another terminal, the transient base is configured at where corresponds to the first end, and the fixed contact is located at the movable contact; forming a temporary electrical connection between the first end and the transient base by filling the transient base with a liquid metal, and applying a gel layer to cover where the temporary electrical connection is formed; forming a temporary electrical conduction between the movable contact and the fixed contact by applying an external magnetic field to the flexible arm to move the flexible arm to make the movable contact touch the fixed contact; maintaining the temporary electrical connection and the temporary electrical conduction; and securing the first end to the transient base permanently which causes the temporary electrical connection turn into a permanent electrical connection and the temporary electrical conduction turn into the micro normally-closed structure. 2. The method according to claim 1 , further comprising the steps as follows: securing the first end to the transient base permanently by gel layer to anchor the first end to the transient base. 3. The method according to claim 1 , further comprising the steps as follows: forming the temporary electrical conduction between the movable contact and the fixed contact by applying an external magnetic field to the flexible arm to move the flexible arm to make the movable contact touch the fixed contact; forming the temporary electrical connection between the first end and the transient base by wiring the first end and the transient base to electrically connect the first end and the transient base, and applying the gel layer to cover where the temporary electrical connection is formed; and securing the first end to the transient base permanently by the gel layer to anchor the first end to the corresponding position of the transient base. 4. The method according to claim 2 , wherein the liquid metal is one selected from a group consisting of Galinstan, mercury or a combination thereof. 5. The method according to claim 1 , wherein the gel layer is one selected from an ultraviolet radiation sensitive gel and a thermosetting gel. 6. The method according to claim 1 , wherein the transient base includes a supporting portion and a gap, wherein the supporting portion provides a space to lay the first end, and the existence of the gap causes the first end to be movable after being placed on the supporting portion. 7. The method according to claim 1 , wherein the transient base is a hinge.
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