Microelectromechanical structure and device

Patent metadata

Field	Value
Publication number	US-2016264401-A1
Application number	US-201615064879-A
Country	US
Kind code	A1
Filing date	Mar 9, 2016
Priority date	Mar 9, 2015
Publication date	Sep 15, 2016
Grant date	—

Abstract

A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.

First claim

1 . A microelectromechanical structure, comprising:
a capacitor element including at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element, wherein electrodes of the capacitor element are separated by a distance in a second direction that is perpendicular to the first direction, and a capacitance of the capacitor element is configured to vary according to displacements of the rotor element from an initial position in the first direction, and wherein the stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position in the first direction, a second derivative of the capacitance with respect to the displacement has negative values.

2 . The microelectromechanical structure of claim 1 , wherein the stator element and the rotor element are mutually oriented such that a range of displacements of the rotor element, wherein the second derivative of the capacitance with respect to the displacement has negative values, begins immediately after displacement from the initial position.

3 . The microelectromechanical structure of claim 1 , wherein the stator element and the rotor element are mutually oriented such that a second derivative of the capacitance with respect to the displacement is at minimum immediately after displacement from the initial position.

4 . The microelectromechanical structure of claim 1 , wherein
the stator element includes a stator beam and a plurality of stator protrusions that extend from the stator beam in the second direction, each stator protrusion including
stator side surfaces on opposite sides of the stator protrusion, each stator side surface extending in the second direction,
a stator end surface in a distal end of the stator protrusion, wherein the stator end surface extends in the first direction,
the rotor element includes a rotor beam and a plurality of rotor protrusions that extend from the rotor beam towards the stator element, each rotor protrusion including
rotor side surfaces on opposite sides of the rotor protrusion, each rotor side surface extending in the second direction,
a rotor end surface in a distal end of the rotor protrusion, wherein the rotor end surface extends in the first direction,
wherein, in initial position, the stator protrusions and the rotor protrusions are configured into protrusion pairs so that the end surfaces of the protrusions of a protrusion pair at least partly overlap by facing each other, and at least one pair of side surfaces of the protrusions of a protrusion pair are aligned to a straight line in the second direction, and wherein each protrusion pair forms a capacitor with a capacitance that is proportional to an overlap between the stator end surface and the rotor end surface of the protrusion pair, and thus arranged to vary according to a motion of the rotor parallel to the first direction.

5 . The microelectromechanical structure of claim 4 , wherein in the protrusion pairs, a length of the stator end surface in the first direction, and length of the rotor end surface in the first direction are equal.

6 . The microelectromechanical structure of claim 4 , wherein in the protrusion pairs, a length of the stator end surface in the first direction is different from a length of the rotor end surface in the first direction.

7 . The microelectromechanical structure of claim 4 , wherein in the protrusion pairs, a height of the stator protrusion is equal to a height of the rotor protrusion of the protrusion pair.

8 . The microelectromechanical structure of claim 7 , wherein the height of the stator protrusions and the rotor protrusions is 1 to 4 times a distance between the facing stator and rotor end surfaces.

9 . The microelectromechanical structure of claim 6 , wherein a length of the stator or the rotor end surface in the first direction is 1 to 3 times a distance between the facing stator and rotor end surfaces.

10 . The microelectromechanical structure of claim 6 , wherein a difference between a length of the rotor end surface and the stator end surface in the first direction is 0.5 to 3.5 times a distance between side surfaces of the facing stator and rotor protrusions.

11 . The microelectromechanical structure of claim 10 , wherein a distance between two adjacent rotor side surfaces or between two adjacent stator side surfaces is 1 to 4 times a distance between the facing stator and rotor end surfaces.

12 . The microelectromechanical structure of claim 4 , further comprising at least two detection elements, each detection element including one or more capacitor elements, stator elements of which are coupled to a same potential.

13 . The microelectromechanical structure of claim 12 , wherein
one of the at least two detection elements is positioned to detect displacements of the rotor to a positive direction parallel to the first direction, and another one of the at least two detection elements is positioned to detect displacements of the rotor in a negative direction parallel to the first direction, the negative direction being opposite to a positive direction, and wherein each detection element includes one or more capacitor elements, wherein stator elements of each capacitor element included in the detection element are electrically coupled to provide a signal for differential detection.

14 . The microelectromechanical structure of claim 13 , further comprising at least four detection elements in a cross-coupled configuration.

15 . The microelectromechanical structure of claim 1 ,
wherein the microelectromechanical structure has a planar form for alignment with a planar support structure, and wherein the rotor element is suspended to move in an in-plane direction parallel to a plane of the planar form of the microelectromechanical structure.

16 . The microelectromechanical structure of claim 1 ,
wherein the microelectromechanical structure has a planar form for alignment with a planar support structure, and wherein the rotor element is suspended to move in an out-of-plane direction perpendicular to a plane of the planar form of the microelectromechanical structure.

17 . The microelectromechanical structure of claim 16 ,
wherein the second direction is parallel to the plane of the planar form of the microelectromechanical structure, and wherein the stator beam has a height dimension in the first direction, and the stator protrusions are distributed along the height dimension of the stator beam.

18 . A microelectromechanical device including the microelectromechanical structure of claim 1 .

19 . The microelectromechanical device of claim 18 , wherein the microelectromechanical device is an accelerometer or a resonator.

20 . The microelectromechanical structure of claim 8 , wherein the height of the stator protrusions and the rotor protrusions is 2 to 3 times the distance between the facing stator and rotor end surfaces.

21 . The microelectromechanical structure of claim 9 , wherein the length of the stator or the rotor end surface in the first direction is 1.5 to 2.5 times a distance between the facing stator and rotor end surfaces.

22 . The microelectromechanical structure of claim 10 , wherein the difference between the length of the rotor end surface and the stator end surface in the first direction is 1.5 to 2.5 times the distance between side surfaces of the facing stator and rotor pr

Assignees

• Murata Manufacturing Co

Inventors

• Liukku Matti
• Ruohio Jaakko
• Vesterinen Hannu

Classifications

• B81B2201/0271

  Resonators; ultrasonic resonators · CPC title

• B81B2203/06

  Devices comprising elements which are movable in relation to each other, e.g. slidable or rotatable · CPC title

• B81B3/0045 Primary

  Improve properties related to angular swinging, e.g. control resonance frequency · CPC title

• H01G5/14

  due to longitudinal movement of electrodes · CPC title

• B81B7/02 Primary

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title