Methods and apparatus for MEMS devices with increased sensitivity

Patent metadata

Field	Value
Publication number	US-9505605-B2
Application number	US-201514818095-A
Country	US
Kind code	B2
Filing date	Aug 4, 2015
Priority date	Mar 8, 2013
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

Methods and apparatus for forming MEMS devices. An apparatus includes at least a portion of a semiconductor substrate having a first thickness and patterned to form a moveable mass; a moving sense electrode forming the first plate of a first capacitance; at least one anchor patterned from the semiconductor substrate and having a portion that forms the second plate of the first capacitance and spaced by a first gap from the first plate; a layer of semiconductor material of a second thickness patterned to form a first electrode forming a first plate of a second capacitance and further patterned to form a second electrode overlying the at least one anchor and forming a second plate spaced by a second gap that is less than the first gap; wherein a total capacitance is formed that is the sum of the first capacitance and the second capacitance. Methods are disclosed.

First claim

What is claimed is:

1. An apparatus, comprising: a moving electrode forming a first plate of a first capacitance and coupled to a mass formed from a first layer of semiconductor material, the moving electrode having an upper portion, the upper portion extending a first length in a first direction, the moving electrode having a lower portion, the lower portion having a second length in the first direction, the second length less than the first length; and
a fixed electrode forming a second plate of the first capacitance and formed from the first layer of semiconductor material, the fixed electrode having a lower portion, the lower portion having a third length in the first direction and separated from the lower portion of the moving electrode by a first air gap (g 1 ), the first air gap having a first width extending in the first direction, the fixed electrode having an upper portion, the upper portion extending a fourth length in the first direction, the upper portion being aligned with and separated from the upper portion of the moving electrode by a second air gap (g 2 ), the second air gap having a second width extending in the first direction, the first air gap width being greater than the second air gap width.

2. The apparatus of claim 1 , wherein:
the upper portion of the moving electrode has a first thickness extending in a direction from a topmost surface of the moving electrode to a bottom-most surface of the electrode and the lower portion of the moving electrode has a second thickness extending in the direction from the topmost surface of the moving electrode to the bottom-most surface of the moving electrode, the second thickness being greater than the first thickness; and
the upper portion of the fixed electrode has the first thickness extending in a direction from a topmost surface of the fixed electrode to a bottom-most surface of the fixed electrode and the lower portion of the moving electrode has the second thickness extending in the direction from the topmost surface of the fixed electrode to the bottom-most surface of the fixed electrode.

3. The apparatus of claim 1 wherein the first layer of semiconductor material is a silicon wafer that is bonded to a carrier wafer.

4. The apparatus of claim 1 wherein the first layer of semiconductor material is polysilicon.

5. The apparatus of claim 4 wherein the semiconductor material comprises silicon.

6. The apparatus of claim 1 wherein a ratio of the second width to the first width is about 5:1.

7. The apparatus of claim 1 , further comprising a movable mass formed from the first layer of semiconductor material and being physically connected to the moving electrode.

8. The apparatus of claim 1 , further comprising another moving electrode forming a first plate of a second capacitance and coupled to an opposite end of the moveable mass relative the first moving electrode, the another moving electrode having an upper portion, the upper portion extending a fifth length in the first direction, the another moving electrode having a lower portion, the lower portion having a sixth length in the first direction, the second length less than the first length; and
another fixed electrode forming a second plate of the second capacitance and formed from the first layer of semiconductor material, the another fixed electrode having a lower portion, the lower portion having a seventh length in the first direction and separated from the lower portion of the another moving electrode by a third air gap the third air gap having a third width extending in the first direction, the another fixed electrode having an upper portion, the upper portion extending an eighth length in the first direction, the upper portion being aligned with and separated from the upper portion of the another moving electrode by a fourth air gap, the fourth air gap having a fourth width extending in the first direction, the third air gap width being greater than the fourth air gap width.

9. An apparatus comprising:
a patterned first layer of material having a first thickness, the layer including:
a movable mass connected to a first movable electrode, the movable mass and first movable electrode configured to have at least one degree of freedom of movement in a first direction,
a first fixed electrode adjacent the movable electrode in the first direction and separated therefrom by a first air gap having a first width;
an anchor connected to the first fixed electrode; and

a patterned second layer of material having a second thickness less than the first thickness, including:
a second fixed electrode above the first fixed electrode and a second movable electrode above the first movable electrode, wherein the second movable electrode is separated from the second fixed electrode by a second air gap, the second air gap having a second width less than the first width (g 2 ); and

a third patterned layer of material interjacent the first and second pattern layer of material, the third patterned layer of material physically and electrically connecting the first fixed electrode to the second fixed electrode and physically and electrically connecting the first movable electrode to the second movable electrode.

10. The apparatus of claim 9 , wherein the patterned first layer of material is a silicon substrate.

11. The apparatus of claim 9 , wherein the patterned second layer of material is selected from the group consisting of silicon and polysilicon.

12. The apparatus of claim 9 , wherein a ratio between the first width and the second width is about 5.

13. The apparatus of claim 9 , wherein the patterned first layer of material comprises a silicon layer and the patterned second layer of semiconductor material comprises a polysilicon material.

14. The apparatus of claim 9 , wherein a ratio of the first width of first gap to the second width of the second air gap is about 5.

15. The apparatus of claim 9 , wherein the movable mass extends from a first sidewall to a second sidewall in the first direction, and wherein the first fixed electrode and second fixed electrode are adjacent the first sidewall, and further comprising:
the patterned first layer of material further including a third movable electrode connected to the movable mass and a third fixed electrode adjacent the second sidewall of the third movable electrode and separated therefrom by a third air gap having a third width; and
the patterned second layer of material further including a fourth fixed electrode above the third fixed electrode and a fourth movable electrode above the third movable electrode, wherein the fourth movable electrode is separated from the fourth fixed electrode by a fourth air gap, the fourth air gap having a fourth width less than the third width.

16. The apparatus of claim 9 , wherein the third patterned layer of material comprises a layer of conductive vias.

17. A method of manufacturing a device, comprising:
providing a first layer of semiconductor material having a first thickness;
patterning the first layer of semiconductor material to include a movable mass configured to move in at least a first direction, a movable electrode coupled to the movable mass and configured to move in the first direction, and a fixed electrode spaced apart from the movable electrode in the first direction by an air gap of a first width;
providing on the patterned first layer a second layer of semiconductor material having a second thickness less than the first thickness; and
patterning the second layer of semiconductor material to include a second movable electrode physically and electrically conne

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chu Chia-Hua
• Cheng Chun-Wen

Classifications

• B81B3/0059 Primary

  Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056 · CPC title

• G01P15/0802

  Details · CPC title

• B81B3/0056

  Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning · CPC title

• B81C1/00158

  Diaphragms, membranes (manufacture process for semi-permeable inorganic membranes B01D67/0039) · CPC title

• B81C2201/0112

  Bosch process · CPC title