Multi mode systems with retractable detectors

Patent metadata

Field	Value
Publication number	US-10074513-B2
Application number	US-201715414517-A
Country	US
Kind code	B2
Filing date	Jan 24, 2017
Priority date	Jan 25, 2016
Publication date	Sep 11, 2018
Grant date	Sep 11, 2018

Abstract

A method for evaluating a specimen includes positioning a detector in an inserted position in which a first distance between a tip of the detector and a plane extending along a surface of the specimen is less than a distance between the plane and a tip of charged particle beam optics. While maintaining the detector at the inserted position, the surface of the specimen is scanned by a primary beam that exits from the tip of the charged particle beam optics. The detector detects x-ray photons and/or charged particles emitted or reflected from the specimen as a result of scanning the specimen with the primary beam. After completion of the scanning, the detector is positioned at a retracted position in which a second distance between the tip of the detector and the plane exceeds a distance between the tip of the charged particle beam optics and the plane.

First claim

What is claimed is:

1. A method for evaluating a specimen using a charged particle beam system having charged particle beam optics, the method comprising:
positioning a detector in an inserted position in which a first distance between a tip of the detector and a plane extending along a surface of the specimen is less than a distance between a tip of the charged particle beam optics and the plane, and while maintaining the detector at the inserted position:
scanning the surface of the specimen by a primary beam that exits from the tip of the charged particle beam optics and propagates through an aperture disposed near the tip of the detector;
detecting, by the detector, x-ray photons and/or charged particles emitted or reflected from the specimen as a result of scanning the specimen with the primary beam;

after completion of the scanning, positioning the detector at a retracted position in which a second distance between the tip of the detector and the plane exceeds a distance between the tip of the charged particle beam optics and the plane;
wherein the detector includes a conduit having an upper horizontal portion, a lower horizontal portion, and a sloped intermediate portion coupled between the upper horizontal portion and the lower horizontal portion.

2. The method according to claim 1 wherein the detector is an energy dispersive X-ray (EDX) detector, and the EDX detector detects the x-ray photons emitted from the specimen.

3. The method according to claim 1 wherein the detector is an electron detector, and the electron detector detects secondary electrons emitted from the specimen and/or backscattered electrons reflected from the specimen.

4. The method according to claim 1 wherein positioning of the detector at the retracted position comprises moving the detector along a first direction that is parallel to the plane and along a second direction that is perpendicular to the plane.

5. A charged particle beam system, comprising:
a controller;
a movable stage configured to support a specimen;
charged particle beam optics having a tip configured to output a primary charged particle beam, the charged particle beam optics comprising a magnetic lens and an electrostatic lens;
a retractable detector configured to detect x-ray photons and/or charged particles emitted or reflected from the specimen, the retractable detector including an amplifier and a conduit, the conduit surrounding a conductor that is coupled between a sensor of the retractable detector and the amplifier, wherein the conduit comprises an upper horizontal portion, a lower horizontal portion, and a sloped intermediate portion coupled between the upper horizontal portion and the lower horizontal portion; and
a detector motion module configured to move the retractable detector between an inserted position and a retracted position;
wherein, when the retractable detector is positioned at the inserted position, a tip of the retractable detector is positioned between the tip of the charged particle beam optics and the movable stage;
wherein, when the retractable detector is positioned at the retracted position, a distance between the tip of the retractable detector and the movable stage exceeds a distance between the tip of the charged particle beam optics and the movable stage.

6. The system according to claim 5 wherein the retractable detector is an energy dispersive X-ray (EDX) detector, and the tip of the EDX detector is configured for detecting the x-ray photons emitted from the specimen.

7. The system according to claim 5 wherein the retractable detector is an electron detector, and the tip of the electron detector is configured for detecting secondary electrons emitted from the specimen and/or backscattered electrons reflected from the specimen.

8. The system according to claim 5 further comprising:
an energy dispersive X-ray (EDX) detector having a sensor for detecting the x-ray photons emitted from the specimen; and
an EDX detector motion module configured to move the EDX detector between an inserted position and a retracted position;
wherein, when the EDX detector is positioned at the inserted position, a tip of the EDX detector is positioned between the tip of the charged particle beam optics and the movable stage;
wherein, when the EDX detector is positioned at the retracted position, a distance between the tip of the EDX detector and the movable stage exceeds a distance between the tip of the charged particle beam optics and the movable stage.

9. The system according to claim 5 further comprising:
an electron detector having a sensor for detecting secondary electrons emitted from the specimen and/or backscattered electrons reflected from the specimen; and
an electron detector motion module configured to move the electron detector between an inserted position and a retracted position;
wherein, when the electron detector is positioned at the inserted position, a tip of the electron detector is positioned between the tip of the charged particle beam optics and the movable stage;
wherein, when the electron detector is positioned at the retracted position, a distance between the tip of the electron detector and the movable stage exceeds a distance between the tip of the charged particle beam optics and the movable stage.

10. The system according to claim 5 wherein the detector motion module is configured to move the retractable detector from the retracted position to the inserted position by moving a portion of the retractable detector downwards and moving the portion of the retractable detector inward towards the tip of the charged particle beam optics.

11. The system according to claim 5 further comprising a specimen chamber with one or more chamber openings through which the conduit passes, wherein the one or more chamber openings are sealed by bellows.

12. The system according to claim 5 wherein the lower horizontal portion comprises the tip of the retractable detector.

13. A method of scanning a specimen using a charged particle beam system having a charged particle beam optics, a detector, and a movable stage configured to support the specimen, the method comprising:
positioning the detector in an inserted position between the charged particle beam optics and the specimen so that an axis of a primary beam emitted from a tip of the charged particle beam optics passes through an aperture disposed near a tip of the detector;
setting the charged particle beam optics to a first voltage;
setting the detector to a second voltage;
setting the specimen to a third voltage;
determining a fourth voltage of an electrode disposed between the tip of the charged particle beam optics and the detector, the fourth voltage determined based in part on a position of the axis of the charged particle beam relative to a position of the aperture, and wherein the fourth voltage is determined to minimize deflection of the primary beam as the primary beam propagates from the tip of the charged particle beam optics, through the aperture, and to the specimen;
scanning the specimen using the primary beam, the primary beam emitted from the charged particle beam optics and propagating through the aperture, the scanning performed while the charged particle beam optics is maintained at the first voltage, the detector is maintained at the second voltage, the specimen is maintained at the third voltage, and the electrode is maintained at the fourth voltage;
detecting, by the detector, x-ray photons and/or charged particles emitted from the specimen as a result of scanning the specimen with the primary beam.

14. The method of claim 13 further comprising moving the de

Assignees

• Applied Materials Israel Ltd

Inventors

• Litman Alon
• Vinnitsky Efim
• Arzouan Ofir
• Petrov Igor

Classifications

• H01J2237/24475

  Scattered electron detectors · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/2448

  Secondary particle detectors · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title