Method for detecting voids in interconnects and an inspection system

Patent metadata

Field	Value
Publication number	US-9805909-B1
Application number	US-201615271105-A
Country	US
Kind code	B1
Filing date	Sep 20, 2016
Priority date	Sep 20, 2016
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

An inspection system that includes charged particle optics that irradiate a bottom of a hole with a charged particle beam propagated along an optical axis, an energy dispersive x-ray detector and a processor. The x-ray detector detects x-ray photons emitted from the bottom of the hole and generates detection signals indicative of the x-ray photons. The processor processes the detection signals to provide an estimate of the bottom of the hole.

First claim

We claim:

1. A method for detecting voids in an interconnect, the method comprises:
generating or receiving information about a group of points of an upper surface of an object, where points of the group of points are spaced apart from each other and the group of points belong to a group of interaction volumes that comprise a group of interconnects, wherein the interaction volumes of the group of interaction volumes are ideally identical to each other;
irradiating the group of points with a charged particle beam thereby causing the group of interaction volumes to interact with charged particles of the charged particle beam;
detecting particles resulting from the irradiating of the group of points; wherein the particles are at least one out of (a) X-ray photons emitted from the group of interaction volumes and (b) backscattered electrons emitted from the group of interaction volumes;
generating detection signals that are indicative of the particles; and
processing the detection signals to provide an estimate about a presence of at least one void within at least one of the interconnects of the group of interconnects.

2. The method according to claim 1 , wherein the group of points consists of two points.

3. The method according to claim 1 , wherein the group of points includes less than ten points.

4. The method according to claim 1 , wherein the group of points are included within an area of the upper surface of the object; and wherein the group of points are less than 1 percent of the points of the area.

5. The method according to claim 1 , wherein each interaction volume of the group of interaction volumes comprises an interconnect and a part of a conductor of a first layer of the object.

6. The method according to claim 1 wherein the particles are X-ray photons emitted from the group of interaction volumes and backscattered electrons emitted from the group of interaction volumes.

7. The method according to claim 1 wherein the particles are X-ray photons emitted from the group of interaction volumes; and wherein the detecting of the X-ray photons emitted from the group of interaction volumes is executed by an energy dispersive X-ray (EDX) detector that is configured to detect x-ray photons emitted from a bottom of a hole and propagate within an angular range that is defined around an optical axis of the charged particle beam and exceeds ten degrees.

8. The method according to claim 1 wherein the irradiating the group of points comprises directing the charged particle beam through a charged particle beam optics tip and through an aperture of tip of the EDX detector.

9. The method according to claim 1 comprising selecting, based on design data of the object, the group of points.

10. The method according to claim 1 comprising selecting, based on design data of the object, the group of points as belonging to interaction volumes that have a probability that exceeds a probability threshold to have interconnects that include one or more voids.

11. An inspection system, comprising:
charged particle optics configured to irradiate an object with a charged particle beam that propagates along an optical axis;
a particle detector configured to detect particles resulting from the irradiating of the object and generate detection signals indicative of the particles, wherein the particles are at least one out of (a) X-ray photons emitted from the group of interaction volumes and (b) backscattered electrons emitted from the group of interaction volumes; and
a processor configured to:
(i) generate or receive information about a group of points of an upper surface of the object, where points of the group of points are spaced apart from each other and the group of points belong to a group of interaction volumes that comprise a group of interconnects, wherein the interaction volumes of the group of interaction volumes are ideally identical to each other;
(ii) control the charged particle optics to irradiate the group of points with a charged particle beam thereby causing the group of interaction volumes to interact with charged particles of the charged particle beam;
(iii) receive the detection signals from the detector; and
(iv) process the detection signals to provide an estimate about a presence of at least one void within at least one of the interconnects of the group of interconnects.

12. The inspection system according to claim 11 wherein the charged particle optics is configured to irradiate the group of points by directing the charged particle beam through a charged particle beam optics tip and through an aperture of tip of the EDX detector.

13. The inspection system according to claim 11 wherein the processor is configured to select, based on design data of the object, the group of points.

14. The inspection system according to claim 11 wherein the processor is configured to select, based on design data of the object, the group of points as belonging to interaction volumes that have a probability that exceeds a probability threshold to have interconnects that include one or more voids.

15. A computer program product that stores instructions that once executed by a computer causes the computer to execute the steps of:
generating or receiving information about a group of points of an upper surface of an object; wherein points of the group of points are spaced apart from each other; wherein the group of points belong to a group of interaction volumes that comprise a group of interconnects; wherein the interaction volumes of the group are ideally identical to each other;
irradiating the group of points with a charged particle beam thereby causing the group of interaction volumes to interact with charged particles of the charged particle beam;
detecting particles resulting from the irradiating of the group of points; wherein the particles are at least one out of (a) X-ray photons emitted from the group of interaction volumes and (b) backscattered electrons emitted from the group of interaction volumes;
generating detection signals indicative of the particles; and
processing the detection signals to provide an estimate about a presence of at least one void within at least one of the interconnects of the group of interconnects.

Assignees

• Applied Materials Israel Ltd

Inventors

• Shemesh Dror
• Zhong Lei

Classifications

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2445

  Photon detectors for X-rays, light, e.g. photomultipliers · CPC title

• H01J2237/281

  Bottom of trenches or holes · CPC title

• H01J2237/2817

  Pattern inspection · CPC title

• G01N2223/102

  beta or electrons · CPC title