Multi mode system with a dispersion X-ray detector

Patent metadata

Field	Value
Publication number	US-9818577-B2
Application number	US-201615005949-A
Country	US
Kind code	B2
Filing date	Jan 25, 2016
Priority date	Jan 25, 2016
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

First claim

What is claimed is:

1. A method for evaluating a specimen, comprising:
positioning an energy dispersive X-ray (EDX) detector at a first position, the EDX detector including an EDX detector amplifier and an EDX detector conduit, the EDX detector conduit surrounding an EDX detector conductor that is coupled between an x-ray sensitive element of the EDX detector and the EDX detector amplifier, wherein the EDX detector conduit comprises an upper horizontal portion, a lower horizontal portion, and a sloped intermediate portion that is coupled between the upper horizontal portion and the lower horizontal portion, and with the EDX detector at the first position:
scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture located at a tip of the EDX detector; and
detecting, by the x-ray sensitive element of the EDX detector, x-ray photons emitted from the flat surface as a result of scanning the flat surface with the charged particle beam;

thereafter, positioning the EDX detector at a second position in which a distance between the tip of the EDX detector and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and
wherein a projection of the tip of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

2. The method according to claim 1 further comprising processing detection signals generated by the EDX detector to provide estimated compositions of multiple points of the flat surface of the specimen.

3. The method according to claim 1 wherein positioning the EDX detector at the second position comprises moving the tip of the EDX detector along a first direction that is parallel to the flat surface of the specimen and along a second direction that is vertical to the flat surface of the specimen.

4. A charged particle beam system, comprising:
a controller;
a movable stage that is configured to support a specimen;
charged particle beam optics that comprises a charged particle beam optics tip configured to output a primary charged particle beam;
an electron detector;
an energy dispersive X-ray (EDX) detector comprising an EDX detector tip that includes an aperture and a window, the EDX detector also including an EDX detector amplifier and an EDX detector conduit, the EDX detector conduit surrounding an EDX detector conductor that is coupled between an x-ray sensitive element of the EDX detector and the EDX detector amplifier, wherein the EDX detector conduit comprises an upper horizontal portion, a lower horizontal portion, and a sloped intermediate portion that is coupled between the upper horizontal portion and the lower horizontal portion; and
an EDX detector motion module configured to move the EDX detector between a first position and a second position;
wherein, when the EDX detector is positioned at the first position and the movable stage supports the specimen, the EDX detector tip is positioned between the charged particle beam optics tip and a flat surface of the specimen, and the EDX detector tip is aligned so that the primary charged particle beam passes through the aperture;
wherein, when the EDX detector is positioned at the second position, a distance between the EDX detector tip and the movable stage exceeds a distance between the movable stage and the charged particle beam optics tip; and
wherein a projection of the EDX detector tip on a plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

5. The system according to claim 4 wherein the movable stage is configured to follow a mechanical scan pattern and the charged particle beam optics is configured to deflect the primary charged particle beam thereby scanning the flat surface of the specimen; and wherein x-ray photons emitted as a result of scanning of the specimen enter the window of the EDX detector tip and are detected by the x-ray sensitive element of the EDX detector.

6. The system according to claim 5 comprising a processor that is configured to associate between points of the flat surface of the specimen that were illuminated during scanning of the flat surface of the specimen and detection signals generated by the EDX detector.

7. The system according to claim 6 wherein the processor is configured to evaluate compositions of the points of the flat surface of the specimen that were illuminated during scanning of the specimen.

8. The system according to claim 4 wherein the EDX detector tip comprises multiple windows that are positioned at a radial symmetry.

9. The system according to claim 4 wherein the wherein the EDX detector motion module is configured to move the EDX detector from the second position to the first position by moving the EDX detector tip downwards and towards the charged particle optics tip.

10. The system according to claim 4 further comprising a specimen chamber; wherein the specimen chamber comprises a chamber opening through which the EDX detector conduit passes; wherein the chamber opening is sealed by a bellows; and wherein the bellows surrounds a portion of the EDX detector conduit.

11. The system according to claim 4 wherein the lower horizontal portion is connected to the EDX detector tip.

12. The system according to claim 4 wherein the EDX detector amplifier is positioned outside a specimen chamber and the EDX detector tip remains within the specimen chamber when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

13. A charged particle beam system, comprising:
a controller;
a movable stage that is configured to support a specimen;
charged particle beam optics that comprises a charged particle beam optics tip that is configured to output a primary charged particle beam;
a detector comprising a detector tip that includes an aperture, the detector also including a detector amplifier and a detector conduit, the detector conduit surrounding a detector conductor that is coupled between a sensing element of the detector and the detector amplifier, wherein the detector conduit comprises an upper horizontal portion, a lower horizontal portion, and a sloped intermediate portion that is coupled between the upper horizontal portion and the lower horizontal portion; and
a detector motion module configured to move the detector between a first position and a second position;
wherein, when the detector is positioned at the first position and the movable stage supports the specimen, the detector tip is positioned between the charged particle beam optics tip and the specimen, and the detector tip is aligned so that the primary charged particle beam passes through the aperture; and
wherein, when the detector is positioned at the second position, a distance between the detector tip and the movable stage exceeds a distance between the movable stage and the charged particle beam optics tip.

14. The system according to claim 13 wherein the detector motion module is configured to move the detector from the second position to the first position by moving the detector tip downwards and towards the charged particle optics tip.

15. The system according to claim 13 further comprising a specimen chamber; wherein the specimen chamber comprises a chamber opening through which the detector conduit passes; wherein the chamber o

Assignees

• Applied Materials Israel Ltd

Inventors

• Litman Alon
• Vinnitsky Efim

Classifications

• H01J2237/2807

  X-rays · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/2445

  Photon detectors for X-rays, light, e.g. photomultipliers · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title