System and method for setting a temperature of an object within a chamber

Patent metadata

Field	Value
Publication number	US-10074512-B2
Application number	US-201514795795-A
Country	US
Kind code	B2
Filing date	Jul 9, 2015
Priority date	Jul 9, 2015
Publication date	Sep 11, 2018
Grant date	Sep 11, 2018

Abstract

A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.

First claim

What is claimed is:

1. A system comprising:
a chamber;
a chuck configured to support an object that is positioned within the chamber;
a motorized system configured to move the chuck in relation to the chamber;
optics arranged to illuminate specific locations of an object supported on the chuck with a beam;
a processor configured to process images acquired by the optics and detect navigation errors that occur when the optics direct a beam to a certain location but the beam impinges on another location;
a plurality of temperature sensors configured to sense multiple temperatures within the chamber, the plurality of temperature sensors including a first temperature sensor operatively coupled to sense a temperature of the chuck and a second temperature sensor operatively coupled to sense a temperature of the motorized system;
a cooling module configured to cool a unit of the motorized system; and
a controller configured to control the cooling module to cool the motorized system in response to to the first and second temperature sensors and the processor detecting a navigation error.

2. The system according to claim 1 wherein:
the motorized system comprises a first mechanical stage and a second mechanical stage;
the first mechanical stage is positioned between the chuck and the second mechanical stage; and
the unit of the motorized system is the second mechanical stage.

3. The system according to claim 1 comprising a chuck heating module that is configured to heat the chuck.

4. The system according to claim 3 wherein chuck heating module is configured to heat the chuck in parallel to a cooling of the unit of the motorized system by the cooling module.

5. The system according to claim 3 wherein the chuck heating module is configured to change a temperature of the chuck within a first temperature range; and wherein the cooling module is configured to change a temperature of the unit of the motorized system within a second temperature range; and wherein the second temperature range exceeds the first temperature range.

6. The system according to claim 1 wherein the controller is configured to send movement commands for controlling movements introduced by the motorized system.

7. The system according to claim 6 wherein the controller is configured to control the cooling module in response to the movement commands and to the multiple temperatures.

8. The system according to claim 6 wherein the controller is configured to send temperature control commands to the cooling module before the multiple temperature sensors sense a change of temperature induced by the movements of the motorized system.

9. The system according to claim 6 wherein the controller is configured to send temperature control commands to the cooling module that when implemented by the cooling module prevent the movements of the motorized system from substantially altering the multiple temperatures sensed within the chamber.

10. The system according to claim 6 wherein the controller is configured to provide an estimated heat generated by the motorized system when executing the movement commands; and wherein the controller is configured to control the cooling module in response to the estimated heat.

11. The system according to claim 1 wherein the controller is configured to control the cooling module in response to the multiple temperatures by applying control iterations.

12. The system according to claim 11 wherein the controller is configured to determine whether to initiate a control iteration; and wherein the determining is responsive to navigation errors of the motorized system.

13. The system according to claim 1 wherein the motorized system comprises one or more movement stages that enable the motorized system to move the chuck in X, Y and Z dimensions and a base coupled to the one or more movement stages.

14. The system according to claim 13 wherein the cooling module is configured to cool the base of the motorized system.

15. The system according to claim 13 wherein the cooling module is configured to cool the one or more movement stages of the motorized system.

16. A method for maintaining a stable temperature within a chamber, the method comprising:
supporting, by a chuck, an object that is positioned within a chamber;
moving, by a motorized system, the chuck in relation to the chamber;
directing one or more beams towards the object from optics arranged to illuminate specific locations of the object while the object is supported on the chuck;
processing images acquired by the optics to detect navigation errors that occur when the optics direct a beam to a certain location of the object but the beam impinges a different location;
sensing, by multiple temperature sensors, multiple temperatures of at least one point within the chamber;
cooling, by a cooling module, a unit of the motorized system;
and controlling, by a controller, the cooling of the unit of the motorized system, in response to the multiple temperatures to compensate for navigation errors.

17. A system comprising:
a chamber;
a chuck configured to support an object that is positioned within the chamber;
a mechanical movement system configured to move the chuck in relation to the chamber, the motorized system comprising one or more movement stages that enable the motorized system to move the chuck in X, Y and Z dimensions and a stationary base coupled to the one or more movement stages, wherein the one or more movement stages generate heat when moving the chuck;
optics arranged to illuminate specific locations of an object supported on the chuck with a beam;
a processor configured to process images acquired by the optics and detect navigation errors that occur when the optics direct a beam to a certain location but the beam impinges a different location;
a first temperature sensor operatively coupled to sense a temperature of the chuck;
a second temperature sensor operatively coupled to sense a temperature of the motorized system;
a cooling module operatively coupled to cool the stationary base of the mechanical movement system; and
a controller configured to control movements of the one or more movement stages and to control the cooling module in response to navigation errors detected by the processor and to the first and second temperature sensors.

Assignees

• Applied Materials Israel Ltd

Inventors

• Yen Chun-Hsiang
• Dee-Noor Barak
• Gronau Yuval
• Hagai Ronen
• Vinnitsky Efim
• Madmon Yohanan

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H01L21/68

  Electricity · mapped topic

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title