Substrate stack holder, container and method for parting a substrate stack

Patent metadata

Field	Value
Publication number	US-10049902-B2
Application number	US-201515526363-A
Country	US
Kind code	B2
Filing date	Aug 19, 2015
Priority date	Dec 5, 2014
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

A substrate stack holder, a container comprising a plurality of substrate stack holders, and a method for parting a substrate stack. The substrate stack holder includes (a) a holding and separating device for (i) holding a substrate stack during a parting process in which the substrate stack is split into a first substrate stack part and a second substrate stack part, said substrate stack comprised of a first substrate, a second substrate, and a connecting region therebetween, and (ii) separating the first substrate stack part from the second substrate stack part after the parting process; and (b) a fixing device for receiving and fixing the separated first and second substrate stack parts.

First claim

Having described the invention, the following is claimed:

1. A substrate stack holder, comprising:
a holding and separating device for
holding a substrate stack during a parting process in which the substrate stack is split into a first substrate stack part and a second substrate stack part, wherein said substrate stack is comprised of a first substrate, a second substrate, and a connecting region therebetween, and
separating the first substrate stack part from the second substrate stack part after the parting process; and

a fixing device for receiving and fixing the separated first and second substrate stack parts, wherein the fixing device only engages with the first and second substrate parts after the first substrate part is separated from the second substrate part by the holding and separating device.

2. The substrate stack holder according to claim 1 , wherein the holding and separating device comprises at least one clamping arm for clamping the substrate stack radially from the exterior at the connecting region of the substrate stack.

3. The substrate stack holder according to claim 2 , wherein the at least one clamping arm has a wedge angle greater than 15°.

4. The substrate stack holder according to claim 2 , wherein the at least one clamping arm is wedge-shaped.

5. The substrate stack holder according to claim 1 , wherein the holding and separating device comprises a pedestal that receives the substrate stack at the connecting region.

6. The substrate stack holder according to claim 5 , wherein the pedestal is wedge-shaped.

7. The substrate stack holder according to claim 5 , wherein the pedestal receives the substrate stack at an edge of the connecting region.

8. The substrate stack holder according to claim 5 , wherein the pedestal has a wedge angle greater than 15°.

9. The substrate stack holder according to claim 1 , wherein the fixing device comprises at least one pair of framework supports, each framework support having at least one fixing element, wherein the first and second substrate stack parts are located between said at least one pair of framework supports.

10. The substrate stack holder according to claim 9 , wherein each fixing element includes a suction opening that is connected to a vacuum to apply suction.

11. The substrate holder according to claim 9 , wherein said at least one pair of framework supports includes a first framework support for receiving and fixing said first substrate stack part and a second framework support for receiving and fixing said second substrate stack part.

12. The substrate holder according to claim 9 , wherein said at least one pair of framework supports are arranged parallel to the first and second substrate stack parts.

13. The substrate holder according to claim 9 , wherein said at least one pair of framework supports are spaced from the first and second substrate stack parts during the parting process and the separating of the first substrate stack from the second substrate stack.

14. The substrate stack holder according to claim 1 , wherein the substrate stack holder is adapted for vertical accommodation of the substrate stack.

15. A container, comprising:
a plurality of substrate stack holders arranged horizontally beside one another, wherein each substrate stack holder comprises:
a holding and separating device for holding a substrate stack during a parting process in which the substrate stack is split into a first substrate stack part and a second substrate stack part, wherein said substrate stack is comprised of a first substrate, a second substrate, and a connecting region therebetween, and
separating the first substrate stack part from the second substrate stack part after the parting process; and

a fixing device for receiving and fixing the separated first and second substrate stack parts, wherein the fixing device only engages with the first and second substrate parts after the first substrate part is separated from the second substrate part by the holding and separating device.

16. A method for parting a substrate stack, comprising:
a) loading of the substrate stack into a substrate stack holder and holding of the substrate stack in the substrate stack holder,
b) heat treatment of the substrate stack for parting of the substrate stack into two substrate stack parts along a weakening plane,
c) separating of the substrate stack parts from one another,
d) receiving and fixing of the substrate stack parts parted from one another by a fixing device of the substrate stack holder, and
e) unloading of the parted substrate stack parts from the substrate stack holder.

17. The method according to claim 16 , wherein in step b) the heat treatment takes place in a furnace, wherein the substrate stack is heated to a temperature greater than 25° C.

18. The method according to claim 17 , wherein in step b) the furnace is swept with a gas, wherein thermal conductivity of the gas is greater than 0.01 W/(m*K).

19. The method according to claim 16 , wherein in step d) the substrate stack parts are engaged by suction by means of vacuum lines arranged in the fixing device.

20. The method according to claim 16 , wherein the substrate stack is arranged vertically in the substrate stack holder.

Assignees

• Ev Group E Thallner Gmbh

Inventors

• Fehkuhrer Andreas

Classifications

• H10W10/181

  Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers · CPC title

• H10P90/1916

  with separation or delamination along an ion implanted layer, e.g. Smart-cut · CPC title

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/0434

  mainly by convection · CPC title