Method for measuring temperature by refraction and change in velocity of waves with magnetic susceptibility

Patent metadata

Field	Value
Publication number	US-10041842-B2
Application number	US-201414534563-A
Country	US
Kind code	B2
Filing date	Nov 6, 2014
Priority date	Nov 6, 2014
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

Methods and apparatuses for determining in-situ a temperature of a substrate with a thermal sensor in a vacuum chamber are described herein. In one embodiment a thermal sensor has a transmitter configured to transmit electromagnetic waves, a receiver configured to receive electromagnetic waves, and a controller configured to control the transmitter and receiver, wherein the controller determines a temperature from a difference between the transmitted electromagnetic wave and the received electromagnetic wave.

First claim

What is claimed is:

1. A thermal sensor, comprising:
a transmitter configured to transmit electromagnetic waves to a near side of a substrate;
a receiver configured to receive an electromagnetic waves refracted within and through the substrate from a far side of the substrate, the received electromagnetic waves having a displacement from the transmitted electromagnetic waves; and
a controller configured to control the transmitter and receiver, wherein the controller is configured to cause the transmitter to transmit the electromagnetic waves toward the near side of the substrate at a measured initial position, wherein the controller is further configured to measure the displacement of the refracted electromagnetic waves received from the receiver from the far side of the substrate at a second measured position relative to the initial position, wherein the controller is operable to determine a temperature from the measured displacement between the transmitted electromagnetic waves and the received refracted electromagnetic waves.

2. A processing chamber, comprising:
a chamber body;
a substrate support disposed in an internal volume of the chamber body;
a transmitter oriented to transmit an electromagnetic wave through a near side of a substrate disposed on the substrate support;
a receiver oriented to receive a electromagnetic wave refracted within and through the substrate from a far side of the substrate and emitted by the transmitter, the received electromagnetic wave having a displacement from the transmitted electromagnetic wave; and
a controller configured to control the transmitter and receiver, wherein the controller is configured to cause the transmitter to transmit the electromagnetic wave toward the near side of the substrate at a measured initial position, wherein the controller is further configured to measure the displacement of the refracted electromagnetic waves received from the receiver from the far side of the substrate at a second measured position relative to the initial position, wherein the controller is operable to determine a temperature from a magnetic fielded variation of the transmitted electromagnetic wave and the received electromagnetic wave wherein the magnetic fielded variation is the measured displacement between the transmitted electromagnetic wave and the received refracted electromagnetic wave.

3. A method for non-contact measurement of a temperature of a substrate disposed in a processing chamber, the method comprising:
transferring a substrate into a processing chamber;
directing an electromagnetic wave through a near side of the substrate at a measured initial position disposed in the processing chamber;
receiving an electromagnetic wave after the directed electromagnetic wave has refracted within and through the substrate from a far side of the substrate at a second measured position relative to the initial position; and
determining a temperature of the substrate based on a metric indicative of a change between the directed electromagnetic wave and the refracted received electromagnetic wave wherein the change is measured displacement of the second measured position relative to the initial position between the directed electromagnetic wave and the received refracted electromagnetic wave.

4. The thermal sensor of claim 1 , wherein the controller, when determining the difference between the transmitted electromagnetic wave and the received electromagnetic wave, is operable to determine the temperature as a function of a change in speed of the received electromagnetic wave.

5. The processing chamber of claim 2 , wherein the chamber body comprises:
a lower dome;
an upper dome; and
an array of radiant heating lamps arranged to heat a substrate disposed on the substrate support through the lower dome.

6. The thermal sensor of claim 2 , wherein the transmitter and the receiver are oriented obliquely to a substrate supporting surface of the substrate support.

7. The thermal sensor of claim 2 , wherein the transmitter and the receiver are oriented within about 5 degrees of each other.

8. The method of claim 3 further comprising:
annealing the substrate in the processing chamber; or
depositing on the substrate a material selected from the group consisting of a group III material, group IV material, a group V material, and a material which includes a group III material dopant, a group IV material dopant, and group V material dopant.

Assignees

• Applied Materials Inc

Inventors

• Sheelavant Gangadhar

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• G01J5/0003

  for sensing the radiant heat transfer of samples, e.g. emittance meter · CPC title

• G01K11/006 Primary

  using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object (G01K17/003, G01J5/00 take precedence; measuring the effect of a material on X-, gamma- or particle radiation G01K11/30) · CPC title

• G01R31/2656

  using non-ionising electromagnetic radiation, e.g. optical radiation · CPC title

• G01K11/30

  using measurement of the effect of a material on X-radiation, gamma radiation or particle radiation · CPC title