Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US9325914B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9325914-B2 |
| Application number | US-201313967823-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 15, 2013 |
| Priority date | Jul 30, 2010 |
| Publication date | Apr 26, 2016 |
| Grant date | Apr 26, 2016 |
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An apparatus and method for characterization of a directed beam of electromagnetic radiation is provided. An exemplary embodiment of the invention can include an apparatus and measuring technique method which uses a model for blackbody radiation that includes consideration all the degrees of freedom due to translation, vibration, and rotation of molecules or atoms that make up the absorber and a heat transfer term which averages the behavior of all the atoms of the material as a function of temperature. This apparatus and method provides an advantage of increased accuracy, substantial reductions of time required for processing, simplification of measuring processes, and reduction required equipment.
Opening claim text (preview).
The invention claimed is: 1. An electromagnetic field characterization apparatus comprising: an electromagnetic source adapted to emit an electromagnetic field; an electromagnetic absorption material adapted to receive said electromagnetic field; a plurality of temperature sensors adapted to orient on said electromagnetic absorption material and output a plurality of temperature sensor data; a plurality of processing sequences comprising: a first processing sequence adapted to receive said plurality of temperature sensor data and store a plurality of temperature sensor data frames created based on said plurality of temperature sensor data in a first data structure, said temperature sensor data frames comprise a plurality of temperature data associated with some or all of said temperature sensors stored at different points of time; a second processing sequence adapted to select at least two of said temperature sensor data frames based at least on a first and second temperature data parameter determined based on comparisons of all said temperature sensor data frames to find an initial state and a final state associated with temperature changes in said electromagnetic absorption material, said at least two selected temperature sensor data frames comprise an initial and final temperature sensor data frame, said second processing sequence is further adapted to determine a time differential data for every two of said selected at least two temperature sensor data frames, said second processing sequence is further adapted to store said selected at least two temperature sensor data frames and said time differential data in a second data structure; a third processing sequence adapted to determine a plurality of power density data associated with some or all of said plurality of temperature data in said initial and final temperature sensor data frames, said plurality of power density data is determined based on data stored in said second data structure, absorption attributes associated with said electromagnetic absorption material, a plurality of blackbody radiation attributes associated with said electromagnetic absorption material comprising degrees of freedom attributes, and a plurality of cooling attributes associated with a cooling medium in proximity to said electromagnetic absorption material, said second processing sequence further outputs and stores a power density image map in a third data structure, said power density image map comprising a power density data associated with all or a portion of said plurality of temperature sensors; and a fourth processing sequence adapted to produce a graphical or data output of said power density image map; wherein said first and second temperature data parameters are determined based on a determination of a high and low temperature value associated with a first and second approximate temperature equilibrium defined as a case where temperature change in the electromagnetic absorption material does not exceed a predetermined value over a predetermined period of time. 2. An electromagnetic field characterization apparatus as in claim 1 , further comprising providing a temperature control mechanism which provides cooling to said electromagnetic absorption material. 3. An electromagnetic field characterization apparatus as in claim 2 , wherein said temperature control mechanism is a circulation fan adapted to ensure approximately uniform heat transfer associated with said electromagnetic absorption material. 4. An electromagnetic field characterization apparatus as in claim 1 , wherein said electromagnetic source is a radio frequency source coupled to an electromagnetic field radiating structure. 5. An electromagnetic field characterization apparatus as in claim 1 , wherein said plurality of temperature sensors comprises one or more infrared image sensing systems. 6. An electromagnetic field characterization apparatus as in claim 1 , wherein said first temperature parameter is a lowest temperature data value and said second temperature parameter is a highest temperature value. 7. An electromagnetic field characterization apparatus as in claim 1 , further comprising a mechanism adapted to move said electromagnetic source or the electromagnetic absorption material in relation to each other in order to manipulate either said electromagnetic field which is being measured or manipulate the electromagnetic absorption material to move it through the electromagnetic field which is being measured in order to produce a plurality of power density image maps each representing a different plane measurement of said electromagnetic field or a three-dimensional power density image map. 8. An electromagnetic field characterization apparatus as in claim 1 , wherein said first processing sequence further selects additional said temperature sensor data frames in between said initial and final temperature sensor data frames and determines associated time differentials between consecutive said selected additional temperature sensor data frames, wherein said second processing sequence for calculating a power density data further serially calculates power density between each two of said selected temperature sensor data frames then said second processing sequence sums all of the power density data for each two consecutive temperature sensor data frame from said initial frame to said final frame to produce a final power density data. 9. A method of manufacturing an electromagnetic field characterization apparatus comprising: providing an electromagnetic source adapted to emit an electromagnetic field; providing an electromagnetic absorption material adapted to receive said electromagnetic field; providing a plurality of temperature sensors adapted to orient on said electromagnetic absorption material and output a plurality of temperature sensor data; providing a plurality of processing sequences comprising: a first processing sequence adapted to receive said plurality of temperature sensor data and store a plurality of temperature sensor data frames created based on said plurality of temperature sensor data in a first data structure, said temperature sensor data frames comprise a plurality of temperature data associated with some or all of said temperature sensors stored at different points of time; a second processing sequence adapted to select at least two of said temperature sensor data frames based at least on a first and second temperature data parameter determined based on comparisons of all said temperature sensor data frames to find an initial state and a final state associated with temperature changes in said electromagnetic absorption material, said at least two selected temperature sensor data frames comprise an initial and final temperature sensor data frame, said second processing sequence is further adapted to determine a time differential data for every two of said selected at least two temperature sensor data frames, said second processing sequence is further adapted to store said selected at least two temperature sensor data frames and said time differential data in a second data structure; a third processing sequence adapted to determine a plurality of power density data associated with some or all of said plurality of temperature data in said initial and final temperature sensor data frames, said plurality of power density data is determined based on data stored in said second data structure, absorption attributes associated with said electromagnetic absorption material, a plurality of blackbody radiation attributes associated with said electromagnetic absorption material comprising degrees of freedom attributes, and a plurality of cooling attributes associated with a cooling medium in proximity to said electromag
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