Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate

Patent metadata

Field	Value
Publication number	US-10025192-B2
Application number	US-201615084536-A
Country	US
Kind code	B2
Filing date	Mar 30, 2016
Priority date	Apr 27, 2015
Publication date	Jul 17, 2018
Grant date	Jul 17, 2018

Abstract

A composition for removing photoresist, including an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition; an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition; and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition.

First claim

What is claimed is:

1. A method of manufacturing a semiconductor device, the method comprising:
forming gate structures on a substrate;
forming a first photoresist layer covering the gate structures on the substrate;
partially removing the first photoresist layer so that at least one gate structure of the gate structures is exposed;
forming an impurity region at an upper portion of the substrate adjacent to the exposed gate structure by an ion-implantation process; and
removing a remaining portion of the first photoresist layer using a composition that includes an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition, an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition, and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition,
wherein the alkyl ammonium fluoride salt included in the composition is represented by the following Chemical Formula:
FN((CH 2 ) n CH 3 ) 4   (Chemical Formula)

wherein, in the Chemical Formula, n is an integer between 2 and 10.

2. The method as claimed in claim 1 , wherein:
the substrate includes a first region and a second region, and the gate structures include a first gate structure and a second gate structure formed on the first region and the second region, respectively, and
partially removing the first photoresist layer includes exposing the first gate structure.

3. The method as claimed in claim 2 , further comprising, after removing the remaining portion of the first photoresist layer using the composition:
forming a second photoresist layer covering the first gate structure and the second gate structure;
partially removing the second photoresist layer so that the second gate structure is exposed;
forming a second impurity region at an upper portion of the substrate adjacent to the second gate structure by a second ion-implantation process; and
removing a remaining portion of the second photoresist layer using the composition.

4. The method as claimed in claim 2 , wherein the first region and the second region are provided as an N-channel metal oxide semiconductor (NMOS) region and a P-channel metal oxide semiconductor (PMOS) region, respectively.

5. The method as claimed in claim 1 , wherein the composition is devoid of water and other acidic components except for the organic sulfonic acid.

6. The method as claimed in claim 1 , wherein the composition consists essentially of the alkyl ammonium fluoride salt, the organic sulfonic acid, and the lactone-based solvent.

7. A method of manufacturing a semiconductor device, the method comprising:
forming a photoresist layer on a semiconductor substrate;
partially removing the photoresist layer to form a photoresist pattern, the photoresist pattern including an opening through which the semiconductor substrate is exposed;
performing an ion-implantation process on the semiconductor substrate using the photoresist pattern as an implantation mask; and
removing the photoresist pattern using a composition that includes an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition, an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition, and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition,
wherein the alkyl ammonium fluoride salt included in the composition is represented by the following Chemical Formula:
FN((CH 2 ) n CH 3 ) 4   [Chemical Formula]

wherein, in the Chemical Formula, n is an integer between 2 and 10.

8. The method as claimed in claim 7 , further comprising, before forming the photoresist layer on the semiconductor substrate, forming an object layer on the semiconductor substrate.

9. The method as claimed in claim 8 , further comprising, before performing the ion-implantation process, partially removing the object layer using the photoresist pattern as an etching mask.

10. The method as claimed in claim 9 , wherein the object layer includes a silicon oxide layer and a silicon nitride layer.

11. A method of removing photoresist from a semiconductor substrate, the method comprising:
providing a photoresist strip composition, the photoresist strip composition consisting essentially of non-aqueous components and being devoid of water; and
removing photoresist from the semiconductor substrate using the photoresist strip composition, the photoresist including a novolac positive-type polymer,
wherein the photoresist strip composition includes an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition, an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition, and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition, and
wherein the alkyl ammonium fluoride salt included in the composition is represented by the following Chemical Formula:
FN((CH 2 ) n CH 3 ) 4   [Chemical Formula]

wherein, in the Chemical Formula, n is an integer between 2 and 10.

12. The method as claimed in claim 11 , wherein the photoresist strip composition includes tetra-butyl ammonium fluoride, methane sulfonic acid, and one or more of gamma-butyrolactone, gamma-valerolactone, or gamma-caprolactone.

13. The method as claimed in claim 12 , wherein the photoresist strip composition includes:
about 2 weight percent to about 6 weight percent of the tetra-butyl ammonium fluoride, based on a total weight of the composition,
about 2 weight percent to about 6 weight percent of the methane sulfonic acid, based on the total weight of the composition, and
about 85 weight percent to about 95 weight percent of the one or more of gamma-butyrolactone, gamma-valerolactone, or gamma-caprolactone, based on the total weight of the composition.

14. The method as claimed in claim 13 , wherein the semiconductor substrate includes a germanium layer.

15. The method as claimed in claim 14 , wherein removing the photoresist from the semiconductor substrate using the photoresist strip composition includes etching the germanium layer at an etching rate of less than about 5 Å/min.

16. The method as claimed in claim 15 , wherein removing the photoresist from the semiconductor substrate using the photoresist strip composition includes etching the germanium layer at an etching rate of less than about 1 Å/min.

17. The method as claimed in claim 16 , wherein the photoresist strip composition includes:
about 4 weight percent of the tetra-butyl ammonium fluoride, based on a total weight of the composition,
about 5 weight percent of the methane sulfonic acid, based on the total weight of the composition, and
about 91 weight percent of the one or more of gamma-butyrolactone, gamma-valerolactone, or gamma-caprolactone, based on the total weight of the composition.

18. The method as claimed in claim 14 , wherein the germanium layer is on a silicon wafer.

19. The method as claimed in claim 12 , wherein the photoresist strip composition is d

Assignees

• Samsung Electronics Co Ltd
• Dongwoo Fine Chem

Inventors

• Oh Jung-Min
• Park Mi-Hyun
• Lee Hyo-San
• Jeong Ji-Hoon
• Ko Yong-Sun
• Kim In-Gi
• Kim Na-Rim
• Kim Sang-Tae
• Kim Seong-Min
• Lee Kyong-Ho

Classifications

• H10P50/287

  by chemical means · CPC title

• H10P30/22

  using masks · CPC title

• G03F7/426 Primary

  containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides · CPC title

• G03F7/422

  using liquids only (G03F7/421 takes precedence) · CPC title

• G03F7/039

  Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023) · CPC title