Vertical FET structure

Patent metadata

Field	Value
Publication number	US-10002962-B2
Application number	US-201615139937-A
Country	US
Kind code	B2
Filing date	Apr 27, 2016
Priority date	Apr 27, 2016
Publication date	Jun 19, 2018
Grant date	Jun 19, 2018

Abstract

Techniques relate to forming a vertical field effect transistor (FET). One or more fins are formed on a bottom source or drain of a substrate, and one or more fins extend in a vertical direction. Gate material is formed to be positioned on sides of the one or more fins. Gate encapsulation material is formed on sides of the gate material to form a trench, such that top portions of the one or more fins are exposed in the trench. A top source or drain is formed on top of the one or more fins such that the top source or drain is laterally confined by the trench in a lateral direction that is parallel to the one or more fins.

First claim

What is claimed is:

1. A method of forming a vertical field effect transistor (FET), the method comprising:
forming fins on a bottom source or drain of a substrate, the fins extending in a vertical direction;
forming gate material on sides of the fins;
forming gate encapsulation material on sides of the gate material to form a trench, such that top portions of the fins are exposed in the trench; and
forming a top source or drain on top of the fins such that the top source or drain is laterally confined by the trench in a lateral direction that is parallel to the fins, a side edge of a portion of the top source or drain being in direct contact with a sidewall of the trench;
wherein the fins extend vertically in a vertical direction;
wherein the fins are on top of the bottom source or drain in the vertical direction while the top source or drain is on top of the fins in the vertical direction;
wherein the trench is above the bottom source or drain.

2. The method of claim 1 , wherein the top source or drain is an epitaxial layer grown according to the fins.

3. The method of claim 1 , wherein the top source or drain is further laterally confined by the trench in another lateral direction; and
wherein, in the another lateral direction, the fins are arranged on the side of each other.

4. The method of claim 3 , wherein the lateral direction and the another lateral direction lie in a same plane perpendicular to the vertical direction.

5. The method of claim 3 , wherein the top source or drain is formed to be wider than a fin width in the another lateral direction.

6. The method of claim 1 , wherein the top source or drain is merged between adjacent fins.

7. The method of claim 1 , wherein the top source or drain has a planar top surface.

8. The method of claim 1 , wherein the gate encapsulation material is formed on a spacer material.

9. The method of claim 1 , wherein the gate encapsulation material includes one or more dielectric materials.

10. The method of claim 1 , wherein the gate encapsulation material includes at least one of a nitride and an oxide.

11. A vertical field effect transistor (FET) comprising:
fins on a bottom source or drain of a substrate, the fins extending in a vertical direction;
gate material positioned on sides of the fins;
gate encapsulation material positioned on sides of the gate material to form a trench, such that top portions of the fins are exposed in the trench; and
a top source or drain on top of the fins such that the top source or drain is laterally confined by the trench in a lateral direction that is parallel to the fins, a side edge of a portion of the top source or drain being in direct contact with a sidewall of the trench;
wherein the fins extend vertically in a vertical direction;
wherein the fins are on top of the bottom source or drain in the vertical direction while the top source or drain is on top of the fins in the vertical direction;
wherein the trench is above the bottom source or drain.

12. The transistor of claim 11 , wherein the top source or drain is an epitaxial layer from the fins.

13. The transistor of claim 11 , wherein the top source or drain is further laterally confined by the trench in another lateral direction.

14. The transistor of claim 13 , wherein the lateral direction and the another lateral direction lie in a same plane perpendicular to the vertical direction.

15. The transistor of claim 13 , wherein the top source or drain is formed to be wider than a fin width in the another lateral direction.

16. The transistor of claim 11 , wherein the top source or drain is merged between adjacent fins.

17. The transistor of claim 11 , wherein the top source or drain has a planar top surface.

18. The transistor of claim 11 , wherein the gate encapsulation material is formed on a spacer material.

Assignees

• IBM

Inventors

• Anderson Brent A
• Bu Huiming
• Lie Fee Li
• Nowak Edward J
• Wang Junli

Classifications

• H01L21/823487

  Electricity · mapped topic

• H01L21/823412

  Electricity · mapped topic

• H01L29/7827 Primary

  Electricity · mapped topic

• H01L29/66666

  Electricity · mapped topic

• H01L27/088

  Electricity · mapped topic