Carbon hardmask opening using boron nitride mask
US-12564022-B2 · Feb 24, 2026 · US
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Yu Hang patents
Yu Hang is listed as an inventor on 72 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yu Hang |
| Total patents | 72 |
| First publication | Nov 15, 2016 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Methods of forming memory device with reduced resistivity
US-12543521-B2 · Feb 3, 2026 · US
Heater materials to prevent arcing
US-2025389022-A1 · Dec 25, 2025 · US
Shaped showerhead for edge plasma modulation
US-2025346999-A1 · Nov 13, 2025 · US
PECVD of SiBN thin films with low leakage current
US-12451345-B2 · Oct 21, 2025 · US
Silicon oxide gap fill using capacitively coupled plasmas
US-12412741-B2 · Sep 9, 2025 · US
Enhanced deuterium migration
US-2025226203-A1 · Jul 10, 2025 · US
Shaped showerhead for edge plasma modulation
US-12338530-B2 · Jun 24, 2025 · US
Low resistivity metal stacks and methods of depositing the same
US-2025140562-A1 · May 1, 2025 · US
Methods to improve oxide sidewall quality
US-2025125145-A1 · Apr 17, 2025 · US
Recent patents
Latest publications not already listed above.
Modified stacks for 3d nand
US-2025101578-A1 · Mar 27, 2025 · US
Modified stacks for 3D NAND
US-12195846-B2 · Jan 14, 2025 · US
Doped silicon oxide for bottom-up deposition
US-2024420949-A1 · Dec 19, 2024 · US
Ion implantation for reduced roughness of silicon nitride
US-2024332009-A1 · Oct 3, 2024 · US
Pecvd of sibn thin films with low leakage current
US-2024304437-A1 · Sep 12, 2024 · US
Dry etch of boron-containing material
US-2024249953-A1 · Jul 25, 2024 · US
Integrated thermal control for additive manufacturing and coating
US-2024217182-A1 · Jul 4, 2024 · US
Faceplate with localized flow control
US-12020907-B2 · Jun 25, 2024 · US
Euv photoresist and underlayer adhesion modulation
US-2024184207-A1 · Jun 6, 2024 · US
Boron nitride for mask patterning
US-11935751-B2 · Mar 19, 2024 · US
Fluorine-doped silicon-containing materials
US-2024087882-A1 · Mar 14, 2024 · US
Low impedance current path for edge non-uniformity tuning
US-11929278-B2 · Mar 12, 2024 · US
Carbon mold for dram capacitor
US-2024038833-A1 · Feb 1, 2024 · US
Carbon hardmask opening using boron nitride mask
US-2024014039-A1 · Jan 11, 2024 · US
Mesa height modulation for thickness correction
US-11869795-B2 · Jan 9, 2024 · US
Miniature microscope for multi-contrast optical imaging in animals
US-11867892-B2 · Jan 9, 2024 · US
Swept, Confocally-Aligned Planar Excitation (SCAPE) Microscopy
US-2023408803-A1 · Dec 21, 2023 · US
Tensile nitride deposition systems and methods
US-11710631-B2 · Jul 25, 2023 · US
Mesa height modulation for thickness correction
US-2023008922-A1 · Jan 12, 2023 · US
Shaped showerhead for edge plasma modulation
US-2023011938-A1 · Jan 12, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 55 |
| Microsoft Technology Licensing Llc | 9 |
| Univ Johns Hopkins | 2 |
| Massachusetts Inst Technology | 2 |
| Univ Nanyang Tech | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6336 | 37 |
| H01L21/02274 | 27 |
| H10P14/69433 | 24 |
| H10P14/6682 | 24 |
| H01L21/0217 | 24 |