Method and device for cleaning substrates
US-2025328088-A1 · Oct 23, 2025 · US
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Yu da-wei patents
Yu da-wei is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yu da-wei |
| Total patents | 11 |
| First publication | Jul 1, 2021 |
| Latest publication | Oct 23, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and device for cleaning substrates
US-12393129-B2 · Aug 19, 2025 · US
Method and device for cleaning substrates
US-2024310744-A1 · Sep 19, 2024 · US
Particle removing assembly and method of cleaning mask for lithography
US-12085866-B2 · Sep 10, 2024 · US
Method and device for cleaning substrates
US-12032302-B2 · Jul 9, 2024 · US
Particle removing assembly and method of cleaning mask for lithography
US-2023314963-A1 · Oct 5, 2023 · US
Particle removing assembly and method of cleaning mask for lithography
US-11698592-B2 · Jul 11, 2023 · US
Method and device for cleaning substrates
US-2022308464-A1 · Sep 29, 2022 · US
Particle removing assembly and method of cleaning mask for lithography
US-2022252993-A1 · Aug 11, 2022 · US
Particle removing assembly and method of cleaning mask for lithography
US-11294292-B2 · Apr 5, 2022 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 11 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70925 | 11 |
| G03F1/22 | 6 |
| G03F1/82 | 6 |
| H10P74/203 | 5 |
| H10P70/20 | 5 |