Substrate processing apparatus, process fluid treating apparatus, and ozone decomposition method
US-12198943-B2 · Jan 14, 2025 · US
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YOUN Junhee patents
YOUN Junhee is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | YOUN Junhee |
| Total patents | 5 |
| First publication | Apr 27, 2017 |
| Latest publication | Jan 14, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus, process fluid treating apparatus, and ozone decomposition method
US-2021114902-A1 · Apr 22, 2021 · US
Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate
US-10453672-B2 · Oct 22, 2019 · US
Substrate processing apparatus, process fluid treating apparatus, and ozone decomposition method
US-2018111860-A1 · Apr 26, 2018 · US
Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate
US-2017117137-A1 · Apr 27, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 5 |
| H01L21/67051 | 5 |
| B08B3/08 | 5 |
| B08B3/14 | 5 |
| C02F2103/346 | 5 |