Apparatus for and method of treating substrate
US-11715651-B2 · Aug 1, 2023 · US
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Yeon Ye Rim patents
Yeon Ye Rim is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yeon Ye Rim |
| Total patents | 9 |
| First publication | Aug 8, 2019 |
| Latest publication | Aug 1, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for etching thin layer
US-11495467-B2 · Nov 8, 2022 · US
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
US-11149234-B2 · Oct 19, 2021 · US
Method and apparatus for substrate cleaning
US-11135624-B2 · Oct 5, 2021 · US
Method and apparatus for etching thin layer
US-2021183660-A1 · Jun 17, 2021 · US
Substrate treatment apparatus
US-2021134617-A1 · May 6, 2021 · US
Apparatus for and method of treating substrate
US-2021134614-A1 · May 6, 2021 · US
Method and apparatus for substrate cleaning
US-2019308227-A1 · Oct 10, 2019 · US
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
US-2019241844-A1 · Aug 8, 2019 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 9 |
| Samsung Electronics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0602 | 6 |
| H10P72/0431 | 5 |
| H10P72/0604 | 5 |
| H10P72/0422 | 5 |
| H10P72/0424 | 5 |