Apparatus for and method of treating substrate

Patent metadata

Field	Value
Publication number	US-11715651-B2
Application number	US-202017079445-A
Country	US
Kind code	B2
Filing date	Oct 24, 2020
Priority date	Oct 30, 2019
Publication date	Aug 1, 2023
Grant date	Aug 1, 2023

Abstract

A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.

First claim

What is claimed is:

1. A substrate treatment apparatus comprising:
a substrate support unit made of a transparent material with respect to a pulsed laser beam and configured to rotatably support a substrate;
a chemical supply unit configured to eject a chemical solution onto an upper surface of a substrate supported on the substrate support unit, wherein a first portion of the chemical solution ejected forms a chemical film on the upper surface of the substrate and a second portion of the chemical solution ejected is scattered from the substrate;
a chemical recovery unit configured to surround the substrate support unit to collect the second portion of the chemical solution scattered from the substrate to recycle the chemical solution scattered from the substrate;
a laser irradiation unit positioned below the substrate support unit and configured to heat the substrate by applying the pulsed laser beam to the substrate through the substrate support unit;
a temperature measurement member configured to measure a temperature of the chemical film formed on the upper surface of the substrate; and
a controller configured to control the laser irradiation unit to emit the pulsed laser beam on the basis of the measured temperature of the chemical film such that the substrate is repeatedly heated and cooled to maintain a preset temperature,
wherein the substrate has a stacked structure in which a silicon oxide film and a silicon nitride film are alternately and repeatedly stacked on each other and a slit extending through the silicon oxide film and the silicon nitride film serves as a passage through which the chemical solution is supplied, and
the chemical solution is an etching solution for selectively etching the silicon nitride film from the stacked structure while etching of the silicon oxide film is suppressed.

2. The apparatus according to claim 1 ,
wherein the controller is further configured to control the laser irradiation unit such that an intensity of the pulsed laser beam is adjusted according to the temperature measured by the temperature measurement member.

3. The apparatus according to claim 1 ,
wherein the controller is further configured to control the laser irradiation unit such that the intensity of the pulsed laser beam changes according to a difference between a reference temperature and the temperature measured by the temperature measurement member.

4. The apparatus according to claim 1 ,
wherein the laser irradiation unit is disposed below the substrate and configured to emit the pulsed laser beam toward a rear surface of the substrate.

5. The apparatus according to claim 1 ,
wherein the pulsed laser beam is a pulse in which a first time duration for which the pulse has a first laser intensity and a second time duration for which the pulse has a second laser intensity are alternately repeated, and
wherein the second laser intensity is smaller than the first laser intensity, and equal to or greater than zero intensity.

6. The apparatus according to claim 1 ,
wherein the controller is further configured to control the laser irradiation unit such that a duty ratio of the pulsed laser beam changes according to a difference between a reference temperature and the temperature measured by the temperature measurement member.

7. The apparatus according to claim 1 ,
wherein the laser irradiation unit comprises:
a laser generation member configured to receive a signal from a pulse generator and to generate the pulsed laser beam;
a lens member including a plurality of lenses and configured to refract the pulsed laser beam generated by the laser generation member so that the pulsed laser beam is applied to the substrate;
a reflection unit configured to reflect a first portion of the pulsed laser beam generated by the laser generation member toward the lens member and to pass a second portion of the pulsed laser beam;
an image pickup unit connected to the reflection unit and configured to form an image from the second portion of the pulsed laser beam passing through the reflection unit and to convert the image into image data; and
a sensing unit engaged with the reflection unit and configured to sense an intensity of the pulsed laser beam incident on the reflection unit.

Assignees

• Semes Co Ltd

Inventors

• Chung Young Dae
• Kim Won Geun
• Lee Jee Young
• Jeong Ji Hoon
• Kim Tae Shin
• Goh Jung Suk
• Cui Cheng Bin
• Yeon Ye Rim

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P50/283 Primary

  by chemical means · CPC title